OMU0023

Step Request data Response data Operation details 1 01 03 0600 0004 01 03 08 Acquires the alarm history. 2 Alarm history confirmation Confirms the acquired alarm history. (9) Alarm history clearance example E.g) The Alarm History saved in the Card Motor controller (controller ID1) is cleared.

70pvpump

PAP: Clean room LVH Note 1) 1 to 12 l for 3/8" tubing type. Note 2) The above values are for a normal temperature and using clean water. LVD Refer to the separate pamphlet P-E00-5A for further details.

Check Valve Series AK 1

Inch size Metric size Port size 4 04 03 5/32 M5 M5 x 0.8 Thread type 6 06 07 1/4 U10/32 10-32 UNF 8 08 09 5/16 Metric thread (M5) 01 1/8 Nil 10 10 11 3/8 Unified thread (10-32 UNF) 02 1/4 12 12 13 1/2 R 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tubing O.D./Port Size Combinations From male thread to One-touch fitting A Metric size Inch size Applicable tubing O.D.

PA300/500/700

15 0.29 0.23 3.1 3.8 2.9 3.8 12 14 0.36 0.25 VPA742 (Body ported) 0.64 Series VPA700 2.9/3.1 3.5/3.3 3.5/3.5 3.8/4.0 0.18/0.23 0.19/0.18 0.27/0.27 0.26/0.28 14/14 15/16 12/12 15/14 VPA744 (Base mounted) 0.71 Note 1) In the case of body ported type, the valve is without bracket.

E-P HYREG

sub-plate ITVH 02 14 03 38 04 12 4 ITVX A M5 M5 (3) (3) 1 01 18 (3) (3) 02 14 PVQ 3 02 14 03 38 04 12 VY1 VY1 VBA VBAT Body ported 5 04 12 VY1B0-X39 (5) 06 34 10 1 AP100 7 10 1 1 14 12 1 14 9 14 1 12 2 20 2 Note 3) Only bracket or foot may be mounted.

modular-press-e

7) IS1000M-60 IS1000M-50 Y510-(02) 03 IS1000M-20 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 Y610-03 (04) Y610-(03) 04 T-interface Note 6) Note 7) Y110-M5 Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E100-M5 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure

Modular F.R.L. Pressure Control Equipment

7) IS1000M-60 IS1000M-50 Y510-(02) 03 IS1000M-20 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 Y610-03 (04) Y610-(03) 04 T-interface Note 6) Note 7) Y110-M5 Y110-M5 VHS20-01 02 VHS50-06 10 3-port valve for residual pressure release Note 7) VHS30-02 03 VHS40-06 01 E200-02 03 02 E300-03 04 E600-06 10 E100-M5 Piping adapter Note 7) E500-06 E100-M5 01 IS1000E-2002 03 02 IS1000E-3003 04 Pressure

Electro-Pneumatic Proportional Valve Series VEF/VEP

characteristics Set pressure range (MPa) Without sub-plate Without sub-plate 1 2 3 Nil 02 03 13 9 5 Symbol 2 1/4 Nil 02 03 0.05 to 0.65MPa 1 3/8 2 1/4 2 0.1 to 0.9MPa 2 02 03 04 03 04 06 1/4 3/8 1/2 3/8 1/2 3/4 1 2 3 4 3/8 03 04 06 3 1 30 3/8 0.005 to 0.15MPa 1 4 1/2 4 45 1 3/4 12 8 4.5 2.5 Without sub-plate Nil 02 03 1(P) Symbol Flow type (VEF2) Flow type (VEF3) Pressure type (VEP3) 2 2

1 Blow Gun Series VMG K
M
H
D
MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T
VMG Pressure loss is less than 1%. (nozz

12 12 12 305.3 305.3 605.3 605.3 Note 1) Note 1) Nozzle size 1 1.5 2 2.5 1 1.5 2 Nozzle size 0.75 x 4 0.9 x 8 1 x 4 1.1 x 8 1.5 2 1.5 2 Type Nozzle model KN-R02-100 KN-R02-150 KN-R02-200 KN-R02-250 KNH-R02-100 KNH-R02-150 KNH-R02-200 Type Nozzle model KNS-R02-075-4 KNS-R02-090-8 KNS-R02-100-4 KNS-R02-110-8 KNL3-06-150 KNL3-06-200 KNL6-06-150 KNL6-06-200 Low noise nozzle with male thread

Air Cylinder

8 20 0 0.033 13 10.5 8 41 5 28 5 6 12 M8 x 1.25 24 M20 x 1.5 1/8 9 11.5 25 22 19.5 17 8 22 12 10 26 0 0.033 13 10.5 8 45 6 33.5 5.5 8 12 M10 x 1.25 30 M26 x 1.5 1/8 9 11.5 32 22 19.5 17 10 27 20 12 26 0 0.033 13 10.5 8 45 6 37.5 5.5 10 15 M10 x 1.25 34.5 M26 x 1.5 1/8 12 14.5 40 24 21 22 10 33 20 14 32 0 0.039 16 13.5 11 50 8 46.5 7 12 15 M14 x 1.5 42.5 M32 x 2 1/4 12 14.5 Dimensions by

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

12 49 17 73 95 32 64 7 50 79 16 10 130 45 26 26 10 12 9.5 142 65 55 36 36 11 4.5 10 161 163 63 16 16 58 22 82.5 106.5 36 72 9 55 90 20 10 145 52 28 28 12 15 12 160 75 68 45 45 12 5.5 10 170 175 75 16 16 71 22 90 122 45 90 9 70 110 25 12 155 60 32 32 12 15 12 170 80 80 50 50 12 5.5 10 185 190 90 20 20 87 28 97.5 129.5 50 100 9 80 120 25 12 170 70 40 40 16 20 16 190 90 100 63 63 14 6.5 12

5 Port Air Operated Valve Series VFA3000 1

VFA5120-03 2 pcs. VFA5220-03 2 pcs. DXT156-19-1A 1 pc.

MNB

) 2 (n 4) 2 (n 4) 2 (n 4) 2 110 + 45 (n 4) 2 85 + 45 90 + 45 n = 4, 8, 12, 16 100 + 45 n 20 + 45 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 140 2 (Different sides, same side), 1 15 120 130 D-P5DWL 140 + 65 n = 4, 8, 12, 16 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 120 + 65 n = 4, 8, 12, 16 130 + 65 n = 4, 8, 12, 16 n 15 + 65 n = 2, 4, 6, 8 Other than

MNB

) 2 (n 4) 2 (n 4) 2 (n 4) 2 110 + 45 (n 4) 2 85 + 45 90 + 45 n = 4, 8, 12, 16 100 + 45 n 20 + 45 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 140 2 (Different sides, same side), 1 15 120 130 D-P5DWL 140 + 65 n = 4, 8, 12, 16 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 120 + 65 n = 4, 8, 12, 16 130 + 65 n = 4, 8, 12, 16 n 15 + 65 n = 2, 4, 6, 8 Other than

LEC-OM02904

C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.

I

from the VY Valve. 02 14 2.0 3 03 38 3.3 body Ported Type 04 12 3.9 Terminal Designations are as follows: 04 12 7.2 5 06 34 8.9 1 = 24v Power Supply 2 = Control Signal 3 = Common Negative for both power and signal. 10 1 10 5% 2% + -2% 7 10 1 114 17 12 114 18 9 14 112 2 33 20 2 37 Courtesy of Steven Engineering, Inc. !

C95

MR 212 238 259 288 341 371 50 63 75 90 110 132 12 16 16 20 20 25 26 28 32 40 50 60 48 55 68 80 100 120 4 4 5 5 6 6 38 46 52 62 63 75 10 10 12 12 16 16 7 9 9 9 12 14 7 9 9 9 12 14 32 36 45 50 63 71 10 12 12 16 16 20 59 67.5 82.5 95 114 129 32 40 50 63 80 100 72 83 100 115 126 150 12 15 15 20 20 25 26 28 32 40 50 60 10 11 12 12 14 16 9.5 12 12 16 16 20 65 75 80 90 110 140 56 65 77 92 100 120

5 Port Solenoid Valve, Series VQC

Kit type Thread type Port size F T Rc G NPT/NPTF 1 2 S Kit T Kit Symbol C3 C4 C6 C8 C10 C12 N1 N3 N7 N9 N11 M5 02 03 B T02 T03 G02 G03 VQC4000 Port size VQC2000 VQC1000 3.2 One-touch fitting 4 One-touch fitting 6 8 10 12 1/8" 5/32" 1/4" 5/16" 3/8" M5 thread Rc 1/4" Rc 3/8" Rc 1/4" bottom ported 1/4" NPT/NPTF 3/8" NPT/NPTF 1/4" G 3/8" G U-side end plate assembly 12 U-side end plate assembly

NCA1

8 2 1 1/4 -12 1 3/8 NY-1200 2.531 1 3/4 4 1/2 2 3/8 1 1/4 2 3/8 2 1/4 2 1/4 1 1/2 -12 1 3/4 NY-1400 2.531 2 5 1/2 2 15/16 1 1/4 2 15/16 2 1/2 3 1 7/8 -12 2 NY-1401 3.032 2 1/2 6 1/2 3 1/2 1 1/2 3 1/2 3 3 1/2 2 1/4 -12 2 1/2 NY-1402 3.032 3 6 3/4 3 7/8 1 1/2 3 7/8 3 1/4 3 1/2 2 1/2 -12 2 3/4 Order to Match Rod Thread Rod Eyes Pivot Pin Pivot Pin Part No A CA CB CD ER KK Part No CD1 CD2 CL

MNB

size (mm) J T P MM N S V GF K Q H W ZZ GL GL1 GR GE VA 34 1/8 M10 x 1.25 27 154 6.5 32 18.3 6 37 47 6.5 211 8.5 12 4 88.5 13 M6 x 1.0 39.5 1/4 M14 x 1.5 27 161 8 40 19.5 6 41.5 51 9 222 10 12 4 96.5 16.5 M6 x 1.0 47 1/4 M18 x 1.5 31.5 183 9 50 22.4 7 47.5 58 10.5 253 12.5 15 5 111.2 20 M8 x 1.25 55.5 3/8 M18 x 1.5 31.5 197 8.5 63 20.7 7 55 58 12 267 17.5 12 9 123.5 23 M8 x 1.25 61.5 3/8