Vacuum System Peripherals:

pressure gauge mounting Standard specification Valid combination Invalid combination Pressure gauge VAC (Vacuum pump side) SET (Pad side) Applicable model Specifications Symbol L H O S C U K IRV2000 IRV3000 IRV1000 P SMC Connection Rc 1/8 01 Connection Rc 1/4 02 Standard specifications Connection Rc 3/8 03 Accessory Connection Rc 1/2 04 None With bracket With pressure gauge Nil B

7

VXZ Height Weight Class H/24 VDC Class H/DIN terminal Seal material: EPDM 7%Smaller 20%Lighter VXS (90 g) (7 mm) Approx.

Series KC Self-seal Fittings

connector union: KBH T Connecting thread H (Hex.)

LEC-OM02904

(9001100) [mm] D H T E ()L d W D T Max.

CL

Use care that auto switch for rail mounting style is not available. 9-2-16 15 Fine Lock Cylinder Double Acting, Single Rod Series CLM2 20, 25, 32, 40 How to Order CL J L E 25 100 H CL1 CLM2 Without auto switch MLGC E J H7BW L 25 H 100 CDLM2 With auto switch CNG Number of auto switches MNB Built-in magnet Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370

Vacuum Pad: Ball Joint Type

(mm) Model A B C D F Y H I J K K Q: 4 Q: 6 ZPT10F10-0-A10 12 12.5 27 10 10 38.5 74.5 88.5 89.5 1.5 ZPT13F10-0-A10 39 23 Hexagon width across flats 13 15 13 1/8 (Rc, NPT, NPTF) 10.5 13 27.5 75 89 90 2 ZPT16F10-0-A10 18 16 M14 x 1 Additional Dimensions by Stroke (mm) Hexagon width across flats 19 H I J K Stroke 20 +38 +10 5 5 D C +28 30 +48 +20 I 40 +84 +30 +54 50 +94 +40 J H F Width across

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

ZP C ZCU Dimensions H B AMJ Ball joint type: 10 to 32 Misc.

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Q H R R H F F E E D C D C Y Y 2.5 2.5 A B A B With a stroke of 10mm With a stroke of 20 to 50mm Dimensions/10mm stroke Additional dimensions by stroke(mm) (mm) I H J Q: 6 Q: 8 Stroke A B C D E F H I J Y Model R S R S 20 +10 3 0 ZPR40F10-0-A14 ZPR50F10-0-A14 30 40 43 12.5 18.5 32.3 49.5 61.5 129.5 5 +20 +7 50 12.8 24.3 15.2 26.2 50 50 53 13.5 19.5 33.3 50.5 62.5 130.5 6 +25 +40 +52 15

AKH/AKB Series Check Valve with One-touch Fitting

86 113 6.5 14 24 34 H Reference dimension after screwing into R threads.

Modular Type Air Filter Series AF

Drain guide 1/4 Note 4) AFM30, 40 Rc NPT G Nil C AFM20 to 40 1/8 1/4 3/8 1/2 3/4 01 02 03 04 06 R Flow direction: Right to left AFM20 to 40 N Note 1) Float type auto drain (N.O.)

PFA/PFW

Press the SET button while pressing the H button. The display holds the value accumulated up to now and stops. To start further accumulation from this point, press the SET button while pressing the H button. The display can be cleared by pressing the G button and the H button simultaneously for 2 seconds or more.

AR20-B to AR60-B

H H Center of piping Center of piping Center of piping Dimensions Model Standard specifications Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Round type pressure gauge (with color zone) P1 P2 A B*1 C D F J K H J H J H J H J AR10-A M5 x 0.8 1/16 25 47.4 11 12.5 M18 x 1 12.5 26 26 AR20(K)-B 1/8, 1/4 1/8 40 67.4 26.5 28.5 M28

Dual Speed Controller with One-touch Fitting Series ASD 1

L4 L4 H (Hexagon width across flats) H (Hexagon width across flats) D3 D3 L5 A1 A2 AS L5 A1 A2 D1 D1 ASP ASN T T AQ Inch Size ASV L4 L5 A1 A2 M Max.

ASD

-10S 32.6 64.3 18.5 57.3 64.8 57.6 50.1 18.6 R(PT)1/2 49.6 42.1 28.6 26.5 25.9 24 12 22 179 ASD630F-04-12S 34.4 66.1 20.9 Reference dimensions of M5 X 0.8, R(PT) thread after being screwed in. 4.1-15 Dual Speed Controller with One-touch Fittings Series ASD Dimensions/Inch Applicable tube O.D. d ASD230F ASD330F/430F ASD530F/630F Applicable tube O.D. d L2 L2 L3 L3 M M D2 D2 L1 L1 L4 L4 H H

VCA

AXT632-69-1 AXT632-69-2 VVCA30-3A-04-2 VVCA30-3A-04-1 OR-2200-200-H VCA35--VVCA30-6-n VVCA30-4A-04-2 VVCA30-4A-04-1 Material Part no.

VCA

AXT632-69-1 AXT632-69-2 VVCA30-3A-04-2 VVCA30-3A-04-1 OR-2200-200-H VCA35--VVCA30-6-n VVCA30-4A-04-2 VVCA30-4A-04-1 No. Part no.

Rotary One-touch Fittings Manifold Series KM

N H (Hex.) Applicable tube O.D.

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

Universal Type/Metric Size Applicable tubing O.D. d H D1 (Hexagon width across flats) M L3 A L4 L5 D3 D2 L1 Connecting thread T L2 Uni thread H D1 D2 L1 L2 L5 A Max. Min. Max. Min.

VXA21/22

Option Symbol and Configuration Fluid and Options Option symbol and Body material Brass Stainless steel Option symbol Seal material Body material Support material (Driving Parts) Fluid(Application) V M Silicon oil A H Standard A B G H J M (Non-leak) N P V (Non-leak) NBR FPM EPR NBR FPM EPR FPM FPM EPR FPM Vacuum (Up to 103Torr) Fuel oil (Up to 60C) Brass A H V M Insulating oil A H Polyacetal

Modular Type Regulator Series AR

Body size Port size Symbol 20 25 30 40 50 60 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Circuit diagram Accessories Note 1) Applicable model Description With bracket Symbol Nil B AR20K to 60K Circuit diagram With square embedded type pressure gauge (with limit indicator) AR20K to 60K E With round pressure gauge (with limit indicator) G AR20K to 60K H With set nut (for panel mount) AR20K to