LEC-OM02904

: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.

Aluminum High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 XLS Series Dimensions XLS/Without control power supply D E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT C B L (mm) Grommet (G) A B C

CG5-S

A A B 1 Chromic acid (25%, 70C) B D D A A B 2 Boric acid Inorganic salt B D A A B A 3 Sulphuric acid (30%, Room temperature) D D A A B A 4 Phosphoric acid (50%, Room temperature) D A A B B A 5 Ammonium hydroxide B A A B B D 6 Sodium hydroxide (30%, Room temperature) Inorganic alkali A D C D A A 7 Calcium hydroxide A D A A C A 8 Magnesium hydroxide A B A A B A 9 Acetylene A A A A A A 10 Formic

CG5-S

A A B 1 Chromic acid (25%, 70C) B D D A A B 2 Boric acid Inorganic salt B D A A B A 3 Sulfuric acid (30%, Room temperature) D D A A B A 4 Phosphoric acid (50%, Room temperature) D A A B B A 5 Ammonium hydroxide B A A B B D 6 Sodium hydroxide (30%, Room temperature) Inorganic alkali A D C D A A 7 Calcium hydroxide A A A D C A 8 Magnesium hydroxide A A A B B A 9 Acetylene A A A A A A 10 Formic

VS 8-2/VS 8-4

(A) 4 (B) 2 Flow-rate Characteristics 1 (P) 5 (R1) 3 (R2) 4, 2 5, 3 (A, B EA, EB) 1 4, 2 (P A, B) Flow-rate characteristics Series Response time (msec) Mass (g) 4-position dual 3-port valve Note) (A) Type of actuation Seal C [dm3/(sbar)] C [dm3/(sbar)] Cv b Cv b (A) 4 (B) 2 140 140 170 170 185 185 185 185 185 185 170 225 215 260 250 285 275 285 275 285 275 250 0.30 0.50 0.30 0.50 0.30

Table of Contents

Description Material AS800 AS900 y u i JIS B 2401 P-7 JIS B 2401 P-7 AQ NBR O-ring u O-ring O-ring Spring NBR NBR Stainless steel JIS B 2401 P-12 JIS B 2401 G-50 14115 JIS B 2401 P-16 JIS B 2401 G-65 14124 JIS B 2401 P-48 JIS B 2401 P-38 NBR O-ring ASV i AK ASS Dimensions: AS420/500/600 Dimensions: AS800/900 ASR ASF 2-Port size 2-Port size Dimensions Dimensions L1 L2 L4 Min.

XL

(c) (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

): Dimension of the D-A96 D-A9V D-M9V D-M9WV D-M9AV Auto switch Auto switch Hs Hs A B A B 21.5 (23.5) 23.5 14.5 14.5 12.5 12.5 ( ): Dimension of the D-M9AV D-A7/A80 D-A73C/A80C D-A79W D-F7/J79 D-F7W/J79W D-F79F/F7BA Auto switch Auto switch Hs Hs Hs Hs A B A B D-A7H/A80H D-F7V/F7WV D-F7BAV D-J79C Auto switch Auto switch B A A B 10 Auto Switch Mounting Series CJ2Y Auto Switch Proper Mounting

Air Fittings & Tubing

D1 Port B min. port size Weight (g) a b H (Hex.)

Vacuum

rib O Deep type B Bellows type List o Pad dia.

Vacuum

rib O Deep type B Bellows type List o Pad dia.

High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

MXS Series Air Slide Table

7 2 38 12 6.6 11 12 A B 34 16 34 16 H Cross section AA Cross section BB (NN-1) X H G (mm) Note) Refer to "Dimensions" of MXS25 on P. 64 for one with shock absorber as symmetric.

Direct Solenoid

NPTF PodLocallon P A B EA EB sP0101/sP01r r 1/B s S sPot0zsP0112 S sP01m/sP0113 1/6 9B S/B S/B s/B S/B sPoto4/sP0114 1/. B B B sPor05/sP011s la S S S Electrictl Conncllons: Class 1 suFplates provide access of alectri(El solenoid leads from the vatue bass inlothe conduitcavitywithinthe sub-platediecasting.

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B ZZ -t2 xstrokes.1 12 + 2X!

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

Formula for Obtaining the Set Value A B ZSP P_1 or P_3 P_2(H_1) or P_4(H_2) PSE200 PSE300 P_1(P_3)=A-(A-B)/4 P_2(P_4)=B+(A-B)/4 Hi Auto-shift input PS H_1(H_2)=(A-B)/2 Lo ISA B Switch output response time at time of auto-shift input A Auto-shift input time C Precision indicator setting PSE PSE200 PSE300 15 ms or less 10 ms or more This function eliminates slight differences in the output

Pin Cylinders Series CJP2/CJP

Applicable bore size (mm) Applicable bore size (mm) A B L L1 L2 MM NX R1 R2 U A NDd9 NDH10 B L1 L2 MM NDH10 NX R1 R2 U Part no. Part no.

Plate Cylinder

Material: Carbon steel 20 Series MU Auto Switch Proper Mounting Position (Detection at stroke end) and Mounting Height D-M9 D-M9W D-M9AL D-A9 D-M9V D-M9WV D-M9AVL D-A9V B B A A Hs Hv D-M9 D-M9W D-M9AL D-M9V D-M9WV D-M9AVL D-A9 D-M9V D-M9WV D-M9AVL Size A B A B Hs Hv A B A B Hs Hv 25 5 5 5 5 7.5 27.5 1 1 1 1 32 5 5 5 5 14.5 30 1 1 1 1 40 5.5 5.5 5.5 5.5 16.5 37 1.5 1.5 1.5 1.5 50 7

CJ5-S

Applicable bore size (mm) A1 L NDd9 MM B C d H B C d H CEP1 0.030 0.060 0.030 0.060 Y-J010SUS 10 SNJ-016SUS 10 NTJ-010SUS 10 3.3 7 8 15.2 21 M4 x 0.7 16.2 M10 x 1.0 4 8.1 M4 x 0.7 3.2 Y-J016SUS SNKJ-016SUS NTJ-015SUS 16 16 16 5 17 8 11 16.6 21 M5 x 0.8 19.6 M12 x 1.0 4 9.2 M5 x 0.8 4 CE1 NDH10 U1 NX R1 Part no.