Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

3H9( ) depth 2.5 +0.025 0 3.2 3.2 6.3 7 7 12 1 A B NN x M4 x 0.7 thread depth 8 4 3H9 ( ) depth 2.5 +0.025 0 HA GA A-A B-B (mm) Model F 22 25 21 26 27 N 4 4 6 6 6 G 6 13 11 21 H 23 26 28 28 NN 2 2 3 3 3 GA 13 13 29 39 49 HA 16 26 20 28 28 I 9 9 9 16 9 J 17 27 37 48 65 K 21.5 31.5 41.5 51.5 61.5 M 42 52 62 80 90 Z 41.5 51.5 61.5 79.5 89.5 ZZ 64 74 84 102 112 13-/22-MXQ6-10 13-/22-MXQ6-20

modular-press-e

C2SF-C C4SF-J C4SF-W C4SF-6 AD47-6 AD48-6 C4SF-6J C4SF-6W C4SF-2 AD47-2 AD48-2 C4SF-2J C4LF-8 AD47-8 AD48-8 C4LF-8J C2SF-C Drain AD27-C AD27-C C2SF-J C3SF-J C4SF-J Polycarbonate C2SF-J C3SF-J AF50, AF60 C3SF-W C4SF-W C3SF-W C2SF-CJ C2SF-CJ C3SF-6 C4SF-6 C2SF-6 C1SF-6 AD17-6 C1SF-2 AD17-2 C3SF-6 C2SF-6 C1SF-6 OUT IN C2SF-6C C2SF-6C AD37-6 AD47-6 AD27-6 AD37-6 AD17-6 AD27-6 AD38-6

Modular F.R.L. Pressure Control Equipment

C2SF-C C4SF-J C4SF-W C4SF-6 AD47-6 AD48-6 C4SF-6J C4SF-6W C4SF-2 AD47-2 AD48-2 C4SF-2J C4LF-8 AD47-8 AD48-8 C4LF-8J C2SF-C Drain AD27-C AD27-C C2SF-J C3SF-J C4SF-J Polycarbonate C2SF-J C3SF-J AF50, AF60 C3SF-W C4SF-W C3SF-W C2SF-CJ C2SF-CJ C3SF-6 C4SF-6 C2SF-6 C1SF-6 AD17-6 C1SF-2 AD17-2 C3SF-6 C2SF-6 C1SF-6 OUT IN C2SF-6C C2SF-6C AD37-6 AD47-6 AD27-6 AD37-6 AD17-6 AD27-6 AD38-6

MGG

Hs Approx. 14.5 B 24.5 Auto switch D-B5, B6 D-G5, K5 A B 8.5 Approx.

MVGQ

9 to @2 20Solenoid valve with adapter assembly SYJ3 3-M VZ5 4 -M VF3 4 -M VZ3 4 -M A B A B A B A B @3 Data Note 1) Seal kit includes !9 to @2. Order the seal kit, based on each bore size.

SMC

JIS B 8370: General rules for pneumatic equipment. JIS B 8361: General rules for hydraulic equipment. JIS B 9960-1: Safety of machinery Electrical equipment of machines. (Part 1: General requirements) JIS B 8433-1993: Manipulating industrial robots Safety. etc. 2) Labor Safety and Sanitation Law, etc. Caution: Operator error could result in injury or equipment damage.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

d (H8) M A B C D G L F E K J H N Applicable cylinder type Bore size (mm) Spring pin P Order no.

MGP

Contents Contents 20 25 32 40 50 63 80 100 MGP63-B-PS MGP80-B-PS MGP100-B-PS MGP20-B-PS MGP25-B-PS MGP32-B-PS MGP40-B-PS MGP50-B-PS Kits include items 21, 22, 23, 24, 32, 33, 41 and 42 from the table above. Kits include items 21, 22, 23, 24, 32, 33, 41 and 42 from the table above. Items 32 and 33 are not included for bores sizes 80 and 100.

CL

BP BP lock-up port, Unlocked when pressurized A BP BP lock-up port B With rod boot S + Stroke Long stroke 2-Rc P EA D e 4-LD Plug cap 2 positions Plug cap 2 positions Plug cap 2 positions Width across flats KA l LS + Stroke ZZ + Stroke h + l ZZ + l + Stroke Bore size (mm) Stroke range (mm) F FA GA GB GC H1 K KA LD LH J A AL B B1 BX BY C D EA EB BP Without rod boot With rod boot Up to 500

Modular Type Air Filter Series AF

Metal bowl with level gauge Metal bowl Metal bowl Optional specifications B B B B B N.O.: Black N.C.: Gray M5 x 0.8 Barb fitting Applicable tubing: T0604 B B O S 10 One-touch fitting O S 1/4 Width across flats 17 With bracket Accessory specification Port size Standard specification With auto drain Model B 115 170 204 208 M 2.3 2.3 2.3 2.3 J 5.4 6.5 8.5 8.5 K 8.4 8 10.5 10.5 L 40 53 70 70

MG

Slide Bearing Felt Holder Ball bushing Spacer Aluminum alloy Replacement Parts: Seal Kit Bore size (mm) Contents Kit no. 20 25 32 40 50 MGP20-B-PS MGP25-B-PS MGP32-B-PS MGP40-B-PS MGP50-B-PS Set of nos. above @1, @2, @3, @4, #2, #3, $1, $2 Seal kit includes @1 to @4, #2, #3, $1, $2.

Stopper Cylinder

J Q F Z Stroke 32 40 50 RSQB -DZ (Double acting) Bore size: 32, 40, 50 M E J 2 x P (Rc, NPT, G) T 0 0.1 D Q F Z Stroke M E J T 0 0.1 D Width across flats K A + 2 stroke B + Stroke V H + Stroke 2 x P (Rc, NPT, G) E M 4 x N through 8 x O counterbore Q F Z Stroke T 0 0.1 Width across flats K A + 2 stroke B + Stroke V H + Stroke D M E J E M 4 x N through 8 x O counterbore Width across flats K

Free Mount Cylinder

JA E H A' A 2-P through KA B 4-T counterbore Width across flats L S + Stroke Z + Stroke (mm) Port size Bore size (mm) GA H J JA A B A' C CA CB D E GB 20 25 32 29 32.5 35 19 23 27 16 20 24 12 15 19 26 32 40 42 50 62 20 25 31 22 25 31 9 10 11 27 22.5 25 14 18 22 12 15.5 19.5 8 10 12 M5 x 0.8 M5 x 0.8 Rc1/8 Bore size (mm) Standard stroke NN T S Z K KA L MM P Q R 20 25 32 M5 x 0.8 with depth

V

n d a d j u s t m e n t i s p o s s i b l e w i t h o u t d i s a s s e m b l y o f the manifold H O W T O O R D E R NZM V A C U U M E J E C T O R M A N I F O L D (N)ZZM B NUMBER OF STATIONS 01 ... 1 Station 02 ... 2 Stations to 10 ... 10 Stations EXHAUST PORT 04 ... 1/2 06 ... 3/4 PORT THREAD Nil ...PT* Remove (N) when ordering T .NPTF Fitted with an Optional Silencer Series NAN: see section

LVQ

S) SMC C A B D SMC B A SMC (Max. T) U Z M N LVQ40, LVQ60 C B A D (Max.

Electric Actuator/Slider Type

5 A-A t y @2 C B e @1 !0 C B r w C-C B-B !4 !2 Body Table !3 Component Parts No. Description Material Note No.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

A 3.2 6.5 7 7 15 1 3H9 ( ) depth 3 +0.025 0 4 NN x M4 x 0.7 thread depth 8 B A 3H9 ( ) depth 3 +0.025 0 HA GA Section AA Section BB (mm) ZZ 74 79 90 108 126 176 M 49 54 65 83 101 151 Z 48.5 53.5 64.5 82.5 100.5 150.5 K 23.5 33.5 43.5 53.5 63.5 88.5 J 19.5 29 39 56 60 96 I 13 8.5 9.5 10.5 24.5 38.5 NN 2 2 3 3 4 5 HA 20 30 20 28 46 56 H 28 30 20 28 23 28 GA 17 12 33 43 43 83 G 9 12 13 15 20

10

Cushion valve G 2 x Rc P W V Port G E Width across flats KA TX D E B C H1 AL MM MB MA N 2 x 4 x J N TY B C Width across flats B1 A H K F TT ZZ + Stroke S + Stroke With rod boot d e 10.2 10.2 f h l [mm] Bore size [mm] A AL B B1 C D E F G H H1 J K KA MA MB MM N P S TT TX TY V W ZZ 32 22 19.5 46 17 32.5 12 30 13 13 47 6 M6 x 1 6 10 16 4 M10 x 1.25 27 1/8 84 17 48 49 4 6.5 135 40 30 27 52 22

Series IDG

(G) B D Purge air discharge tubing port for dehumidification Applicable tube O.D.: J (NPT thread: K inch) Purge air for dehumidification Purge air for dehumidification (Maintenance space 100mm or more) Option: P Port size L A B C D E Model F G J H K 97 224 8 119 [126] 5/16 114 249 10 147 [154] 3/8 83 187 53 165 62 113 212 54 190 82 IDG10, IDG10H IDG20, IDG20H Values inside [ ] are for NPT

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-