Magnet: Built-in, Mounting: -, Bore Size: 32mm, Thread Type: -, Stroke: 30mm, Rod End Nut: Female Thread, Auto Switch: Y7BAL--Solid State, Water Resist., 2 Wire, Horizontal, 3M, Lead Wire or Prewired Connector: -, Number: -

Magnet: Built-in, Mounting: -, Bore Size: 32mm, Thread Type: -, Stroke: 75mm, Rod End Nut: Female Thread, Auto Switch: Y7BAL--Solid State, Water Resist., 2 Wire, Horizontal, 3M, Lead Wire or Prewired Connector: -, Number: -

Magnet: Built-in, Mounting: -, Bore Size: 32mm, Thread Type: -, Stroke: 20mm, Rod End Nut: Female Thread, Auto Switch: Y7BAL--Solid State, Water Resist., 2 Wire, Horizontal, 3M, Lead Wire or Prewired Connector: -, Number: -

Magnet: Built-in, Mounting: -, Bore Size: 40mm, Thread Type: -, Stroke: 40mm, Rod End Nut: Female Thread, Auto Switch: Y7BAL--Solid State, Water Resist., 2 Wire, Horizontal, 3M, Lead Wire or Prewired Connector: -, Number: -

Magnet: Built-in, Mounting: -, Bore Size: 40mm, Thread Type: -, Stroke: 40mm, Rod End Nut: Female Thread, Auto Switch: Y7BAL--Solid State, Water Resist., 2 Wire, Horizontal, 3M, Lead Wire or Prewired Connector: -, Number: -

Magnet: Built-in, Mounting: -, Bore Size: 63mm, Thread Type: -, Stroke: 40mm, Rod End Nut: Female Thread, Auto Switch: Y7BAL--Solid State, Water Resist., 2 Wire, Horizontal, 3M, Lead Wire or Prewired Connector: -, Number: -

Magnet: Built-in, Mounting: -, Bore Size: 40mm, Thread Type: -, Stroke: 5mm, Rod End Nut: Male Thread, Auto Switch: Y7BAL--Solid State, Water Resist., 2 Wire, Horizontal, 3M, Lead Wire or Prewired Connector: -, Number: 1 pc.

Magnet: Built-in, Mounting: -, Bore Size: 100mm, Thread Type: -, Stroke: 25mm, Rod End Nut: Female Thread, Auto Switch: Y7BAL--Solid State, Water Resist., 2 Wire, Horizontal, 3M, Lead Wire or Prewired Connector: -, Number: -

Magnet: Built-in, Mounting: -, Bore Size: 50mm, Thread Type: -, Stroke: 40mm, Rod End Nut: Female Thread, Auto Switch: Y7BAL--Solid State, Water Resist., 2 Wire, Horizontal, 3M, Lead Wire or Prewired Connector: -, Number: -

Magnet: Built-in, Bore Size: 200mm, Stroke: 40mm, Body Option: Standard (Rod End Female Thread), Auto Switch: Y7BAL--Solid State, Water Resist., 2 Wire, Horizontal, 3M, Number: -

Series MY3A/3B Mechanically Jointed Rodless Cylinder/Basic Type ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

A96 A96V 5 V IC circuit Grommet Yes A93 A90 A93V A90V IC circuit 100 V Relay, PLC 2-wire 24 V 12 V No 100 V or less Solid state auto switches marked with a symbol are produced upon receipt of order. Lead wire length symbols: 0.5 m .Nil (Example) M9NW 1 m . M (Example) M9NWM 3 m . L (Example) M9NWL 5 m .

NCQ2/CQ2

st 75 100 32 75 100 40 75 100 50 75 100 63 75 100 80 75 100 100 Bore size Stroke Symbol A B L 36.5 33 3.5 43 39.5 3.5 44 40.5 3.5 49.5 46 3.5 57 53.5 3.5 66.5 63 3.5 Note) The H/C dimensions are the same as above.

24

32, 40 5 10 30 51 50 100 101 300 200 5 10 30 51 50 100 101 300 200 Stroke [mm] Stroke [mm] MGPL80/100, MGPA80/100 MGPL80/100, MGPA80/100 50 50 100 100 100 80 100 100 Load mass m [kg] Load mass m [kg] 80 80 80 100 80 10 10 80 5 10 29 30 51 50 300 200 100 5 10 29 30 51 50 300 200 100 Stroke [mm] Stroke [mm] 444 Model Selection MGP Series L L m m Horizontal Mounting Ball Bushing (19) L = 50

MY1

) Backup plate Special resin Guide roller B Special resin Guide roller A Stainless steel (80, 100) MX #6 Special resin (63 to 100) #7 #8 #9 MTS End cover Nickel plated (80, 100) y Carbon steel (80, 100) (80, 100) Wear ring Special resin u i o !

Clean Room Rodless Cylinder Series CYP ø15, ø32

CY Graph (1) MG 100 Total operation cycles (10,000) CX 50 D40 30 -X 20 2010 Data 100 200 300 400 500 700 1000 Stroke (mm) Graph (2) 105 Particle concentration (particles/m3) Inner Cover Holding Screw Tightening Torque [Nm] Class M3.5 [Class 100] 104 Tightening torque Model Screw size CYP15 0.3 M3 x 0.5 103 Class M2.5 [Class 10] CYP32 2.45 M6 x 1 102 Plate Class M1.5 [Class 1] 101 Stroke adjustment

Shock Absorbers and Rate Controls

6.4 22.2 M5 100 N/A fflf15xl.5 2fs63i Ofl Sorisr60.526.C 95.3 7 6.2 8.60 54.9 12.7 29.5 9.7 flA M8 370 I fl/A lMltb4x?

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

[Nm] Class M3.5 [Class 100] 104 Tightening torque Model Screw size CYP15 0.3 M3 x 0.5 103 Class M2.5 [Class 10] CYP32 2.45 M6 x 1 102 Plate Class M1.5 [Class 1] 101 Stroke adjustment screw (inner cover) 100 0.01 0.1 1 10 Particle diameter (m) Flat head screwdriver Note 1) This chart indicates the level of cleanliness inside the measurement chamber.

CYV

Table 1 100 Total operation cycles (10,000) 50 40 30 20 10 100 200 300 400 500 700 1000 Stroke (mm) Inner cover holding screw tightening torques [Nm] Tightening torque Model Screw size CYV15 0.3 M3 x 0.5 CYV32 2.45 M6 x 1 Plate Stroke adjustment screw (inner cover) Hexagon wrench Inner cover holding screw direction + direction 11 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK

Rodless Cylinder for Vacuum Series CYV ø15, ø32

TB W Counterbore depth TC Inner cover holding screw Note) (mm) A 8 12 B 10.5 16 C 6.4 10.2 E 4 6 ED 9.5 13 EK 4 6 F 12.5 25 G 10 9 H 45 75 HA 23 39 HI 23 39 HL 37.6 63.3 HP 44 73.5 J M6 x 1 M10 x 1.5 JK 10 12 K 21 20 L 67 90 LD 5.6 9.2 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 LW 69 115 MM M4 x 0.7 M6 x 1 M 6 8 N 4.5 7.5 P 5/16-24 UNF 7/16-20 UNF PA 25 50 PB 60 100 PC 10 12 Q 112 147 QW 48

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

TB W Counterbore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60 100