Magnet: Built-in, Mounting: Foot, Bore Size: Ø10 (3/8"), Stroke: 2", Port Location: In-line, Auto Switch: H7BL--Solid State, Gen. Purpose, 2 Wire, Lead Wire, 3M, Number: -

Magnet: Built-in, Mounting: Foot, Bore Size: Ø10 (3/8"), Stroke: 5", Port Location: Perpendicular, Auto Switch: H7BL--Solid State, Gen. Purpose, 2 Wire, Lead Wire, 3M, Number: -

Magnet: Built-in, Mounting: Double Clevis, Bore Size: Ø10 (3/8"), Stroke: 1/2", Port Location: Perpendicular, Auto Switch: H7BL--Solid State, Gen. Purpose, 2 Wire, Lead Wire, 3M, Number: 1 pc.

Magnet: Built-in, Mounting: Foot, Bore Size: Ø10 (3/8"), Stroke: 1/2", Port Location: Perpendicular, Auto Switch: H7BL--Solid State, Gen. Purpose, 2 Wire, Lead Wire, 3M, Number: 1 pc.

Magnet: Built-in, Mounting: Foot, Bore Size: Ø16 (5/8"), Stroke: 5", Port Location: Perpendicular, Auto Switch: H7BL--Solid State, Gen. Purpose, 2 Wire, Lead Wire, 3M, Number: -

Magnet: Built-in, Mounting: Double Clevis, Bore Size: Ø10 (3/8"), Stroke: 1 1/2", Port Location: Perpendicular, Auto Switch: H7BL--Solid State, Gen. Purpose, 2 Wire, Lead Wire, 3M, Number: 1 pc.

Magnet: Built-in, Mounting: Double Clevis, Bore Size: Ø16 (5/8"), Stroke: 1 1/2", Port Location: Perpendicular, Auto Switch: H7BL--Solid State, Gen. Purpose, 2 Wire, Lead Wire, 3M, Number: 1 pc.

Magnet: Built-in, Mounting: Basic, Bore Size: Ø10 (3/8"), Stroke: 1 1/2", Port Location: Perpendicular, Auto Switch: H7BL--Solid State, Gen. Purpose, 2 Wire, Lead Wire, 3M, Number: -

Magnet: Built-in, Mounting: Flange, Bore Size: Ø16 (5/8"), Stroke: 1/2", Port Location: Perpendicular, Auto Switch: H7BL--Solid State, Gen. Purpose, 2 Wire, Lead Wire, 3M, Number: 1 pc.

Magnet: Built-in, Mounting: Basic, Bore Size: Ø16 (5/8"), Stroke: 3", Port Location: In-line, Auto Switch: H7BL--Solid State, Gen. Purpose, 2 Wire, Lead Wire, 3M, Number: 1 pc.

Magnet: Built-in, Mounting: Basic, Bore Size: Ø16 (5/8"), Stroke: 4", Port Location: In-line, Auto Switch: H7BL--Solid State, Gen. Purpose, 2 Wire, Lead Wire, 3M, Number: 1 pc.

Magnet: Built-in, Mounting: Basic, Bore Size: Ø16 (5/8"), Stroke: 8", Port Location: Perpendicular, Auto Switch: H7BL--Solid State, Gen. Purpose, 2 Wire, Lead Wire, 3M, Number: 1 pc.

Magnet: Built-in, Mounting: Foot, Cushion: Rubber Bumper, Bore Size: 1 Inch, Stroke: 2 Inch, Auto Switch: H7BL--Solid State, Gen. Purpose, 2 Wire, Lead Wire, 3M, Number: -

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

[Nm] Class M3.5 [Class 100] 104 Tightening torque Model Screw size CYP15 0.3 M3 x 0.5 103 Class M2.5 [Class 10] CYP32 2.45 M6 x 1 102 Plate Class M1.5 [Class 1] 101 Stroke adjustment screw (inner cover) 100 0.01 0.1 1 10 Particle diameter (m) Flat head screwdriver Note 1) This chart indicates the level of cleanliness inside the measurement chamber.

Shock Absorbers and Rate Controls

6.4 22.2 M5 100 N/A fflf15xl.5 2fs63i Ofl Sorisr60.526.C 95.3 7 6.2 8.60 54.9 12.7 29.5 9.7 flA M8 370 I fl/A lMltb4x?

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

TB W Counterbore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60 100

CYV

Table 1 100 Total operation cycles (10,000) 50 40 30 20 10 100 200 300 400 500 700 1000 Stroke (mm) Inner cover holding screw tightening torques [Nm] Tightening torque Model Screw size CYV15 0.3 M3 x 0.5 CYV32 2.45 M6 x 1 Plate Stroke adjustment screw (inner cover) Hexagon wrench Inner cover holding screw direction + direction 11 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Impact acceleration [m/s] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Features 1 in vacuum environments (1.3 x 10-Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.

CYP

Table 1 100 Total operation cycles (10,000) 50 40 30 20 10 100 200 300 400 500 700 1000 Stroke (mm) Table 2 10 Particle concentration (particles/m) Class M3.5 [Class100] 10 10 Class M2.5 [Class10] Inner cover holding screw tightening torque [Nm] 10 Tightening torque Model Screw size Class M1.5 [Class1] CYP15 0.3 M3 x 0.5 10 CYP32 2.45 M6 x 1 10 0.01 0.1 1 10 Plate Particle diameter (m) Note

CYPSeries

Table 1 100 Total operation cycles (10,000) 50 40 30 20 10 100 200 300 400 500 700 1000 Stroke (mm) Table 2 10 Particle concentration (particles/m) Class M3.5 [Class100] 10 10 Class M2.5 [Class10] Inner cover holding screw tightening torque [Nm] 10 Tightening torque Model Screw size Class M1.5 [Class1] CYP15 0.3 M3 x 0.5 10 CYP32 2.45 M6 x 1 10 0.01 0.1 1 10 Plate Particle diameter (m) Note