HRS100/150

Required installation space 800 mm or more Required installation space for ventilation and maintenance 400 mm or more 800 mm or more 800 mm or more 800 mm or more Piping 2000 mm or more Caution 1. Regarding the circulating fluid and facility water pipings, consider carefully the suitability for temperature, circulating fluid and facility water.

Modular F.R.L. Unit

OUT IN OUT IN e q r r w w AR50, 60 AR30, 40 t q t q e e IN OUT IN OUT r w w r Parts list Material Color No.

energy saving effect

For installation indoors, ventilation ports and a ventilation fan should be equipped as needed. 800 mm or more Required installation space for ventilation and maintenance 400 mm or more 800 mm or more 800 mm or more 800 mm or more 4.

Modular F.R.L. Unit

F E E F B C Cross interface E: 4-Rc E A F: Without thread D Model Port size A B C D Applicable model Y14-M5 M5 23 16 14 25 AC10 Y24-01 1/8 40 40 22 40 AC20 Y24-02 1/4 Y34-01 1/8 49 43 28 48 AC25, AC30 Y34-02 1/4 Y44-02 1/4 60 48 36 54 AC40 Y44-03 3/8 Cautions in Mounting When mounting a cross interface directly on the IN side of the lubricator, be sure to use a series AKM check valve between

CXS

8 Piston rod B Rod seal e Aluminum bearing alloy NBR !

S070

1 o Note) Order is accepted in 10 units. 16 Series S070 Exploded View of Stacking Type Body Ported Type/SS073M01-C Exploded View of Stacking Type D side end plate assembly Valve U side end plate assembly w Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com e q r < U

MGQ

Dimensions MGQL (Ball bushing bearing) A, DB, E Dimensions E E 30 st or less Over 30 st A A Symbol Symbol DB DB Stroke Stroke Bore size (mm) 12 16 20 25 Bore size (mm) 12 16 20 25 50 st or less Over 50 Over 50 50 st or less 30 st or less Over 30 st 43 39 4 6 8 16 0 55 49 43 6 8 10 22 0 65 57 10 61.5 10 12 27 14.5 0 74 47 63.5 16 62 13 16 32 14.5 0 79.5 47.5 8-20-9 10 Series MGQ Bore Size

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

For actuators with external stopper, the rotation end can be set within the ranges shown in the drawing by adjusting the stopper bolt. c l o r e c t k n w u o i s C e CRB2 CRBU2 CRB1 MSU B port A port C e l o s c i w k CRJ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Series AK1000

Refer to gauge guide (P.94,95). 2P 3P t r t Sample Order Number Port t AK1510S e q 4 4 4 4 w 4 4 4 4 r w w q q 2P 3P 4PL 5PC MPA MPA MPA 1 1 1 0 0 40 e e 4PL 5PC qIN wOUT eExtra bottom port (Outlet) rGauge port (Inlet) tGauge port (Outlet) Specifications AK1502 1 to 30 psig (0.007 to 0.2 MPa) AK1515 5 to 150 psig (0.034 to 1.0 MPa) Select compatible materials of construction for the gas AK1506

KJ

K Screw for bracket Panel mounting bracket (Standard) Type E snap ring M Plate Operation on the panel front permits mounting. Holes for mounting bolts are not necessary. (Mountable panel thickness is 5 mm maximum.)

LEF-OM006xx

LEFB32 (mm) (300) 500 (600) (700) 800 (900) 1000 (300) 500 (600)(700) 800 (900) 1000 (1200) (1500) (1800) (2000) (300) 500 (600) (700) 800 (900) 1000 (1200) (1500) (1800) (2000) (kg) 1.19 1.45 1.58 1.71 1.84 1.97 2.10 2.39 2.85 3.08 3.31 3.54 3.77 4.00 4.46 5.15 5.84 6.30 4.12 4.80 5.14 5.48 5.82 6.16 6.50 7.18 8.20 9.22 9.90 (kg) 0.12 0.19 0.35 1( ) 2{-}5m 5m 10% 3() 452000Hz 1 () 4 5

VXP21/22/23

Normally open Normally closed Model Grommet Electrical entry Conduit Conduit terminal Bracket H F E D C B f M L K J A e 57 62 67 b 39 45.5 49.5 Q 39 39 41.5 Q 23 23 25.5 N 61 (68) 69 (76) 79 (89) d 47 52 57 a 34 51 58 N 69 (76) 77 (84) 87 (97) N 61 69 79 c 65 78 86 Q R 57 74 81 VXP2142 , 30 30 35 20 20 23 34 43 47 29 37 43 28 35 40 3 8 8 63 80 90 59 59 62 104 (116) 118 (136) 133 (150) 26

ZQ

) 258-9200-www.stevenengineering.com L2 L1 ZL Release flow adjusting screw ZY 8 P PE Exhaust part 2-3.5 ZQ 62.8 (Body mounting hole Note 1)) 3 75 Suction filter ZF With L type plug connector ZP Vacuum pressure switch PE P EXH ZCU AMJ S R U N L H L H S R U N L H L H S R U N L H L H S R U N L H L H k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS Misc. (72.4)

Table of Contents

Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Average speed Series (mm/s) VQC 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SQ VQ0149-C4 VQ0 VQ4 800 700 600 500 400 300 200

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com E depth EK Q + Stroke Z + Stroke A G Stroke adjustment screw Note 3) (inner cover) Plug Plug [P (port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com I J K L M N O Model ZH18DS-12-12-12 ZH18DL-12-12-12 ZH20DS-12-16-16 ZH20DL-12-16-16 12 12 16 16 15.8 35.5 50 17 10 15.8 35.5 50 10 17.2 38.5 54.3 12 17.2 38.5 54.3 12 12 12 16 16 17 21.7 21.7 One-touch and screw-in connection Applicable tubing diameter N Applicable tubing diameter E S type: White color L type: Black color

XL

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

CJP

M15 x 1.5 4 10 20 23.5 17 15 27 30.5 24 5 14.5 19 11.5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 15 19 4.5 M22 x 1.5 5 10 20.5 25 17.5 15 27 31.5 24 Note) E and F should be machined in a concentric manner.

VCL

(mm) A B C D E F G H J L Port size Bracket part no.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

1 u Material Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 Note CRJ Aluminum alloy Body A Light gray color Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !