IDG

Purge air flow rate (l/min(ANR))(3) 2.5 12 25 50 75 125 125 150 190 6 Inlet air pressure (MPa) 0.7 Part no.

MGG

size (mm) AA AB AC AD AE AF AP A B C D E F G H I J GC GK GL GQ GR 12 16 19 100 35 M6 x 1 depth 12 35 20 25 32 40 129 135 29 80 118 6.6 M10 x 1.5 depth 18 40 73 27 5.5 6 8 4 75, 100, 125, 150, 200 11 depth 8 16 19 19 120 40 M8 x 1.25 depth 16 45 149 170 29 100 150 9 50 93 M12 x 1.75 depth 21 34 6.5 9 10 7 75, 100, 125 14 depth 10 16 19 19 120 40 45 M8 x 1.25 depth 16 149 170 29 100 150 9

Series AK1000

Refer to gauge guide (P.94,95). 2P 3P t r t Sample Order Number Port t AK1510S e q 4 4 4 4 w 4 4 4 4 r w w q q 2P 3P 4PL 5PC MPA MPA MPA 1 1 1 0 0 40 e e 4PL 5PC qIN wOUT eExtra bottom port (Outlet) rGauge port (Inlet) tGauge port (Outlet) Specifications AK1502 1 to 30 psig (0.007 to 0.2 MPa) AK1515 5 to 150 psig (0.034 to 1.0 MPa) Select compatible materials of construction for the gas AK1506

MNB

f 1 to 50 25 25 25 25 25 25 51 to 100 37.5 37.5 37.5 37.5 37.5 37.5 101 to 150 50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 187.5 187.5 701 to 750 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177

Lightweight and Compact

HRS HRS 090 HRS 090 HRS 100/150 HRSH 090 HRSH HRSE HRZ HRZD HRW Lots of variations are available in response to the users requirements.

MXW

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Bore size (Stroke (mm)) 8 12 16 20 25 25, 50, 75, 100, 125, 150 50, 75, 100, 125, 150 75, 100, 125, 150, 175, 200 100, 125, 150, 175, 200, 225, 250 100, 125, 150, 175, 200, 225, 250, 275, 300 Auto switch Nil Without

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

2 e @1 q @7 @5 @8 MY CXSM10 CXSM15 CY @0 !5 @9 @4 r w !3 i !0 @2 u t !6 @0 !5 @9@3@4r w !3i!0@2u t!6 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX D-X 20!4 y e !1 !2 @3 @1 q !4y e !1 !2 q @1 Data CXSM20 to 32 @0 !5 !6 @3 @4rw o i !0 u @2 t !4 y e !1 !

REA/REB

8 Hard anodized Aluminum alloy Port cover C J G5-S Stainless steel Shaft e !

REA/REB

8 Hard anodized Aluminum alloy Port cover C J G5-S Stainless steel Shaft e !

CLS

+ 100 (n 2) n = 2, 4, 6, 8 CNA 1 15 110 150 Different sides CNS 110 150 35 2 Same side 110 150 55 CLS D-A44 150 + 30 (n 2) n = 2, 4, 6, 8 150 + 50 (n 2) n = 2, 4, 6, 8 Different sides 110 + 30 (n 2) n = 2, 4, 6, 8 35 + 30 (n 2) n Same side 110 + 50 (n 2) n = 2, 4, 6, 8 55 + 55 (n 2) CLQ 1 110 150 15 MLGP D-Z7/Z80 D-Y59/Y7P D-Y7W 115 115 110 105 15 RLQ 1, 2 MLU D-Y69/Y7PV D-Y7WV 100

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

machined on the flange for E.

Slider Type Ball Screw Drive/11-LEFS Series

D x 150 (= E) B 15 15 Note 1) When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin to be 3 mm or more because of round chamfering.

SMC Pneumatic Clean Series

With air cushion 4-FD E-0.05 0 FT F FX0.15 B (mm) Bore size 40 B 61 E 25 F 2 FX 46 FD 6.6 FT 8 50 63 76 92 30 32 2 2 58 70 9 11 9 9 Note) End boss is machined on the flange for E.

C95

Standard Stroke Bore size (mm) Standard stroke (mm) 25, 50, 75, 100, 125, 150, 175, 200, 250, 32 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 40 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 50 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 63 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 80 300, 350

Thermo-chiller

Polyester band Forklift insertion side Cardboard box 800 mm Less than 150 mm 300 mm or more or more Wooden skid Forklift insertion side Less than 150 mm Model Weight [kg] Dimensions [mm] HRLE050-A-20 150 Height 1320 x Width 580 x Depth 1240 HRLE050-W-20 143 HRLE090-A-20/40 176 HRLE090-W-20/40 170 300 mm or more 500 mm or more 2. Transporting with forklift 1.

REA/REB

0 e w #1 #3 !1 @0 i !7 @3 @1 @7 @2 @6 @5 #0 REAL10 Parts list Parts list Note No. Description No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

MVGQ

CC MVGQM (Slide bearing) A, DB, E Dimensions MVGQL (Ball bushing bearing) A, DB, E Dimensions RB A A E E Symbol Symbol DB DB Bore size (mm) Bore size (mm) Stroke Stroke J Up to 50 st Over 50 st 30 st or less 30 st or less Over 30 st Over 30 st Up to 50 st Over 50 st 12 12 39 0 8 43 4 16 6 55 D16 16 43 0 10 49 6 22 8 65 20 20 0 14.5 12 10 57 47 61.5 27 10 74 -X 20Data 10-16-7 8 Valve Mounted

SZ3000

150 18 7 185.5 175 160.5 12.5 8 198 187.5 171 13.5 2 148 137.5 118.5 15 3 160.5 150 129 16 4 173 162.5 139.5 17 5 185.5 175 150 18 6 185.5 175 160.5 12.5 7 198 187.5 171 13.5 8 210.5 200 181.5 14.5 L1 L2 L3 L4 L1 L2 L3 L4 26 Cassette Type Manifold Series SZ3000 Dimensions/SZ3000: Serial Transmission Type SS5Z3-60S DB Stations Scale: 37% [With external pilot] 2-One-touch fitting (X,PE ports