3 Position Cylinder Series RZQ

) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

3

The tightening torque of the M3 screw must be 0.35 to 0.45 Nm. t The detection position can be changed under the conditions in step e. Auto switch y Confirm where the mounting position is, and tighten the auto switch fixing screw (M2.5) to fix the auto switch mounting nut. The tightening torque of the M2.5 screw must be 0.25 to 0.35 Nm.

Compact Cylinder with Lock Series CLQ

YU-03 J E T1 B 2-D through 2-O counter bore (mm) Bore size (mm) B D E J M O Part no. Joints 12 7 25 9 34 11.5, depth 7.5 YB-03 32, 40 K ( across flats) 12 9 32 11 42 14.5, depth 8.5 YB-05 50, 63 H (with locking) 16 11 38 13 52 18, depth 12 YB-08 80 d2 d1 19 14 50 17 62 21, depth 14 YB-10 100 L UT Weight (g) Bore size (mm) C UA RS W T1 T2 V Part no.

Compact Cylinder with Air Cushion Series RQ

YA 03 Applicable air cylinder bore size mm 03 05 32, 40 50 Bore size (mm) B D E F M T1 T2 Part no.

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

6 @3 @4 e !7 w i t q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A A' @6 #2 @8 @9 #0 !8 !9 #1 @7 !4 !

3-Position Rotary Table

MSQ Angle adjustment Range Figure 5 MSZ MSZ CRQ2X MSQX ad a ge ju Cl lt MRQ an st bo oc t r m nd en g k en tm wi in e us 10 10 se t r st on dj a ju an r on ti ot ad iti ta os ge at p ro er y nt io e b C e b n y is e ge n ad w d k an c ju lo t r C st in en g m bo st lt ju b ad M 0 ax 19 im e u ng m ra ro n ta tio Center position adjustment Table 2 R: Clockwise adjustment L: Counterclockwise

Pin Clamp Cylinders

(Unclamping side) Bore size Nil Without lock L With lock 32 32 mm Auto switch type Nil Without auto switch (Built-in magnet) C D-P3DWASC E D-P3DWASE N D-P3DWA L D-P3DWAL Z D-P3DWAZ Guide pin diameter Mounting surface position (viewed from top) For guide pin diameter, refer to Table 1 below.

SMC

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

MRQB-OM0002

E1 2 I E[J]I[kg][rad/s] Imr m[kg] rm 5.1 19 I I I I kg kg kg kg m m m m 2 2 2 2 m: m: m: m: kg kg kg kg b 20 5-2. 5.1 5.1 32 0.023[J] 40 0.028[J] 2 t [rad]t[s] E E1 2 I t E 2 I t E[J][rad]I[kg] 2 t (1) t = & (2) C C t 2 1 tdt 2 + = = & & t=0 =0C=0 t 2 1 t 2 1 2 = = & t 2 = 21 5-3.

CEP1

(DC12~24V), 1. , 2. , , , 1. 2. , , , ,, , 3. ,, , 4. , 1. ,(), 2 , 2. , , ,1.5~2 1. , ,1ISO VG32 ,, ,, 2 ,,A /B 90 4 ,0.01mm 2-1 2-2 2-2-1 () B L F 0.5m L 3m 12 12 20 20 (mm) Z 255075100 () 2-2-2 A90 D-A90 F9N D-F9N F9NW D-F9NW A93 D-A93 F9P D-F9P F9PW 2 D-F9PW A96 D-A96 F9B D-F9B F9BW D-F9BW A90V D-A90V F9NV D-F9NV F9NWV D-F9NWV A93V D-A93V F9PV D-F9PV F9PWV

SMC Pneumatic Clean Series

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

D-F6N/D-F6P/D-F6B

Supply voltage > Internal voltage drop of auto switch Minimum operating voltage of load 2) If the internal resistance of a light emitting diode causes a problem, select an auto switch without an indicator light (D-A6, A80, A80H, A90, A90V, C80, R80, 90, E80A, Z80). 17 Prior to Use Auto Switches Common Specifications 1 Refer to the Auto Switch Precautions on pages 8 to 11 before using auto

A unique guide ring on the piston rod eliminates lateral motion of the poppet, increasing seal life and reducing particle formation.Manifold type: stacking, P (IN), A (OUT) type: Common IN/Individual OUT, Valve stations: 2 to 5, Tubing size (port P):  3/8, 1/2., 3/4, Tubing size (port A):  1/4, 3/8, 1/2, 3/4, LV MANIFOLD BASE, HIGH PURITY CHEMICAL VALVE, AIR OPERATED, A90, 500 lb

A unique guide ring on the piston rod eliminates lateral motion of the poppet, increasing seal life and reducing particle formation.Manifold type: stacking, P (IN), A (OUT) type: Common IN/Individual OUT, Valve stations: 2 to 5, Tubing size (port P):  3/8, 1/2., 3/4, Tubing size (port A):  1/4, 3/8, 1/2, 3/4, LV MANIFOLD BASE, HIGH PURITY CHEMICAL VALVE, AIR OPERATED, A90, 500 lb

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 40, Stroke(mm): 500, Max.

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 20, Stroke(mm): 500, Max.

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 25, Stroke(mm): 500, Max.

Type: Rodless Cylinder, Cylinder Inner Diameter(Ø): 40, Stroke(mm): 500, Max.

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

U H with effective thread depth C 4-N through hole 8-O counter bore F F I 26 13 Connector auto switch 20 (22) D D Z M E 10 (11) Approx. U Min. bending radius of lead wire 10 Auto switch K M E J S B + Stroke L + Stroke L A + 2 strokes Note) The drawings above show type D-A7 and D-A8 reed switches. The values shown inside ( ) are for switches other than types D-A7 and D-A8.

Magnet: Built-in, Mounting: Center Trunnion, Style: Aluminum Tube, Bore Size: 100mm, Thread: Rc, Stroke: 125mm, Option: J [Nylon Tarpaulin, Cushion: Both Sides (Air-hydro has No Cushion)], Lock Operation: E [Spring Lock (Lock Exhaust)], Auto Switch: A54--Reed, DC Volt >5<24, AC Volt <200, LED, Lead Wire or Prewied Connector: -, Number: -