Ionizer Nozzle type IZN10 Series IZS

Bar length (mm) IZN10-G-100-X216 IZN10-G-200-X216 IZN10-G-300-X216 IZN10-G-400-X216 IZN10-G-500-X216 IZN10-G-600-X216 100 Part no. IZN10-G-X198 Part no.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators Clean series 10 11 Relief type Vacuum suction type 10 C D B M 2 B 20 100 H N M9BW C 21 C D B M 2 B 20 100 H N M9BW C Nil Built-in magnet Number of auto switches Cylinder stroke (mm) No Nil S n 2 pcs. 1 pc. "n" pcs.

Process Pump

Symbol C[dm3/(sbar)] b Cv N.C.

5 Port Solenoid Valve SY Series

rate: 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation SY3140-01 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5140-02 800 700 600 500 400 300 200 100 0 SY7140-03 800 700 600 500 400 300 200 100 0 SY9140-04 Cylinder is in extending.

Table of Contents

C. Normally closed IN OUT N. O.

V

Max Vacuum Pressure* 0.5 0.7 1.0 1.3 mmHg (Torr) 5 12 24 40 Max Suction S Type 660 (100) 8 20 34 70 Flow Rate L Type 360 (400) / / / / L Type 400 (400) 10 20 34 68 Air Consumption S Type 660 (100) 10 20 34 68 L Type 360 (400) H O W T O O R D E R ZH V A C U U M E J E C T O R *Vacuum pressure is quoted as mmHg below atmospheric (Torr Absolute) 1 Torr = 0.0197PSI D ZH D I M E N S I O N S M

SMC Pneumatic Clean Series

Line A IDG5 Fitting: Oil-free one-touch fitting Piping: Urethane tuing Oil-free: Wetted parts oil-free AME AMF Oil-free regulator Oil-free solenoid valve SUP Oil-free needle valve Line A Line B Example of clean air equipment Line B Line C Fittings: Clean one-touch fittings Piping : Polyolefine tubing Clean: Oil-free, Assembled in clean room Line C Clean precision regulator Stainless steel

VM

Only when output 1 and 2 are in the ON state, and C turns ON, will output 3 turn ON. If either A or B is turned OFF , output 3 will not be turned ON, even if C is turned ON.

Modular F.R.L. Units

AD27-A With bowl guard AD27-C-A AD37-A AD47-A Normally open (N.O.)

42

C kit (Plug lead type) 6.

Title not found

Connector C (Terminal no.)

Electric Slide Table / High Precision Type 《 AC servo motor 》

200 400 200 400 200 Pushing speed [mm/s] *2 35 or less 30 or less Actuator specifications Max. acceleration/deceleration[mm/s2] 5000 Positioning repeatability [mm] 0.01 Lost motion [mm] *3 0.1 or less Lead [mm] (including pulley ratio) 12 6 20 10 16 8 Impact/Vibration resistance [m/s2] *4 50/20 Ball screw Ball screw(In-line) Actuation type Belt[1.25:1] Ball screw Ball screwBelt(parallel)

VQ7-6/7-8

Thread type Rc Nil Control equipment Symbol A Nil AP M MP F G C E NPTF T G F Air filter with auto-drain Air filter with manual drain Regulator Air release valve Pressure switch Blanking plate (Air release valve) Note) It is not applicable to O n e t o u c h fittings.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Standard Strokes [mm] Bore size [mm] Standard stroke [mm] 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Note) Intermediate strokes not listed above are produced upon receipt of order.

HRX-OM-X084

TEMP READY function setting example [1] Circulating fluid temperature at start of operation: about 20 C [2] Circulating fluid setting temperature: 15 C [3] "TEMP READY Bandwidth (Upper Limit)": Set to "2.0 C". [4] "TEMP READY Bandwidth (Lower Limit)": Set to "-2.0 C". [5] "TEMP READY stabilization time": set to "60 sec". [6] "TEMP READY monitoring start time": set to "30 sec". [7] "Time

Air-hydro Unit

800 400 30 Capacity of converter (cm3) 300 CC CC 25 600 500 400 100 CRA1H100-180 200 20 CRA1H100-90 300 300 100 CRA1H80-180 200 200 150 CRA1H80-90 50 CRA1H63-180 100 100 80 CRA1H63-90 CRA1H50-180 60 50 40 50 CRA1H50-90 30 Selected model of rotary actuator 160 100 63 40 20 100 200 300 400 500 600 700 800 Nominal size of converter (mm) Cylinder stroke (mm) How to read the graph (ex: when using

CE

bore size (mm) D C d H B C D Part no.

CE

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 30 d Applicable bore size (mm) D C d D C B H Part no.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Bore (mm) Standard stroke (mm) Nylon tarpaulin 60C 110C Neo plain cloth 25, 50, 75, 100, 125, 150, 175, 200, 250, MG 40 Maximum ambient temperature for the rod boot itself. 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, MGP 50, 63 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, MGQ 80, 100 300, 350, 400, 450, 500, 600, 700 MGG Minimum stroke of

Power Valve: Economy Valve Series VEX5

Cylinder Speed Chart Bore size Series CS1/CS2 Pressure 0.5 MPa, Load factor 50% Cylinder stroke 300 mm Average velocity (mm/s) System 125 140 160 180 200 250 300 1000 Vertically upward movement Horizontal movement 900 800 700 600 500 400 300 200 100 0 A 800 900 1000 700 600 500 400 300 200 100 0 B 900 1000 800 700 600 500 400 300 200 100 0 C 800 900 1000 700 600 500 400 300 200 100 0 D 800