ZR

Rc 1/8 IN port Rc 1/8 Out port 1 1 Bracket C Bracket C Note) 1 Dimensions for mounting bracket C Bracket C part no. : P3270155 13-3-20 20 Series ZR Large Size Vacuum Module: Ejector System ZX ZR ZM ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY ZQ ZF

CE2

For detailed specifications, refer to page 10-20-1. 50 7 63 9 80 9.5 100 10.5 CV D-Z7/Z80 D-A3/A44 D-A3C, D-A44C D-A5/A6 D-B5/B64 D-A59W D-B59W D-Y5/Y6 D-Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL D-F5/J5 D-F5W/J59W D-F5BAL/F5NTL D-F59F D-G5/K59 D-G5W/K59W D-G5NTL/G5BAL D-G59F D-G39/K39 D-G39C, D-K39C MVGQ Electrical entry (Fetching direction) D-A53/A56 D-A64/A67 D-B64 D-Z80 D-F59/F5P/J59 D-F59W/F5PW/J59W

Brake mechanism added

I Type Single Knuckle Joint Rod End Nut (Standard) 30 30 d d NDH10 NDH10 MM MM RR1 RR1 45 45 30 D D d E1 E1 C C NDH10 MM L1 A1 U1 L1 A1 U1 RR1 45 30 d H NX B H NX B NDH10 A A D E1 C MM RR1 45 Material: Free cutting sulfur steel (mm) Material: Rolled steel (mm) L1 A1 U1 D Part no. Applicable bore size A A1 E1 L1 MM R1 U1 NDH10 NX Part no.

Smooth Cylinder/Low Speed Cylinder

Cylinder model C D Mounting bolt part no. Cylinder model C D Mounting bolt part no.

AC Servo Motor Driver (CC-Link Type)

A B C A B C A B C Lead 12 6 3 12 6 3 20 10 5 16 8 4 Point table No.1 Initial value Recommended value Home position return acceleration time constant (msec) *5 0 600 300 150 600 300 150 1000 500 250 800 400 200 Different from the initial value. *5.

5 Port Solenoid Valve Series SV

Stroke mm 70% 30% AS3201F -02-12 400 200 70% 50% 10% 0 800 MB 80 600 Stroke mm AS5000-02 AS420-02 400 200 0 AN300 -KM12 T1209 800 MB 100 600 Stroke mm AS5000-02 AS420-02 400 200 0 800 CS1 125 600 Stroke mm AS5000-02 AS420-02 400 200 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details

SMC Basic Pneumatics

A S A N E X A M P L E : A C C O R D I N G T O I S O , T H E R E I S N O D I F F E R E N C E I N S Y M B O L B E T W E E N A C O N V E N T I O N A L D O U B L E A C T I N G C Y L I N D E R A N D A T W I N B O D C Y L I N D E R , A L T H O U G H S O M E M A N U F A C T U R E R S H A V E I N T R O D U C E D T H E I R O W N S Y M B O L S F O F C L A R I F I C A T I O N .

SQ1000/2000

Also, indicate the option symbol "-K" for mixed wiring. w How to order applicable valves A B C A B C A B C A B C A B C SQ 1 1 4 1 C6 5 L A B C D E F G H I Series SQ1000 Switching type Electrical entry A E 1 2 3 4 5 A B C L type plug connector with lead wire L 2 position single 2 position double (latching/double solenoid) 3 position closed center 3 position exhaust center 3 position pressure

Support Guide/11-LEFG Series

[mm] Model L A B n D E 11-LEFG40-S-150 354 157 328 4 150 11-LEFG40-S-200 404 207 378 6 2 300 11-LEFG40-S-250 454 257 428 11-LEFG40-S-300 504 307 478 11-LEFG40-S-350 554 357 528 8 3 450 11-LEFG40-S-400 604 407 578 11-LEFG40-S-450 654 457 628 11-LEFG40-S-500 704 507 678 10 4 600 11-LEFG40-S-550 754 557 728 11-LEFG40-S-600 804 607 778 Model L A B n D E 11-LEFG40-S-650 854 657 828 12 5 750

LEKF-OMZ0035

Size Order no. 25 LE-D-6-2 14 32 LE-D-6-3 40 LE-D-6-4 -12- 3. Product Outline 3.1 System construction Refer to the Driver operation manual for system construction. 4.Elictric actuators / Common precautions 4.1 Wiring/Cables Warning 1. Adjustment, installation, inspection, or wiring changes should be conducted after the power supply to this product has been turned off.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

G: 300 H: 600 P=17 L2 4.5 L1 VK Manual override 12.5 (Pitch) Depress and turn to operate and lock override.

Electric Actuator / Slider Type 《 AC Servo Motor 》

Check the product for the following points before operation. a) Damage to power supply line and signal line. b) Looseness of the connector to each power line and signal line. c) Looseness of the actuator /cylinder and driver /driver mounting. d) Abnormal operation. e) Emergency stop of the total system. 3.

0.4

W Note) VQC 4/5 Note) VQ2000 only VQZ D side U side Manual override Nil B C D 1 2 3 Stations 4-position dual port (N.C. +N.C.) 4-position dual port (N.O. +N.O.) 4-position dual port (N.C. +N.O.)

Air-hydro Unit

VNA VNA 2 1 2 1 2 1 VNA VNA D-X Technical Data 1177

Table of Contents

conforming to MIL-C-24308.

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

CG5-S

Applicable bore size (mm) D B1 C d H1 (mm) Part no.

HRX-OM-X071

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C 3.3 Installation HRR Series 3-20 HRX-OM-X071 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

CJ5-S

Applicable bore size (mm) D B1 C d H1 Part no.

CJ5-S

Applicable bore size (mm) D B1 C d H1 Part no.