Aluminum High Vacuum Angle Valve

Heater assembly quantity 200/40 200/50 400/100 600/150 800/220 1200/350 100V H4 100C Heater assembly quantity used Heater power W (Nominal value) In-rush/Power consumption (Option symbolOperating voltage) 800/40 800/50 1600/100 2400/150 3200/220 4800/350 200V 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs. 3 pcs. 4 pcs.

New

1 10 102 1.

Cylinder with Lock

65 + 30 (n 2) (n = 2, 4, 6, 8)*1 75 + 30 (n 2) (n = 2, 4, 6, 8)*1 80 + 30 (n 2) (n = 2, 4, 6, 8)*1 85 + 30 (n 2) (n = 2, 4, 6, 8)*1 n (Same surface) 90 + 100 (n 2) (n = 2, 4, 6, 8)*1 95 + 100 (n 2) (n = 2, 4, 6, 8)*1 100 + 100 (n 2) (n = 2, 4, 6, 8)*1 105 + 100 (n 2) (n = 2, 4, 6, 8)*1 110 + 100 (n 2) (n = 2, 4, 6, 8)*1 1 60 65 75 80 85 2 (Different surfaces) 70 75 80 85 2 (Same

Tamper Proof and Flat Head Screw

Applicable cylinder bore size (mm) Metric sizes (mm) Inch sizes (inches) Cylinder side port size Elbow type Model AS121F AS221F AS321F AS421F 3/16 1/4 5/16 3.2 4 6 8 10 12 6 to 20 20 to 40 40 to 63 63 to 100 1/8 5/32 3/8 1/2 M5 1/8, 1/4 1/4, 3/8 1/2 Universal type AS131F AS231F AS331F AS431F 6 to 20 20 to 40 40 to 63 63 to 100 M5 1/8, 1/4 1/4, 3/8 1/2 Speed controller with One-touch fitting

2/3 Port Valve

Flange M L K J I H G F E D C B A 310.5 326 350 303.5 319 343 300.5 316 340 256.5 272 296 244 259.5 283.5 12 12 14 36 42 54 100 105 120 20 24 24 134 146 162.5 135 140 155 210.5 226 250 130 150 180 1 8 1 4 1 4 32 40 50 VNB5-32F VNB6-40F VNB7-50F 4.2-17 VNB Construction Principles of Operation (The vacuum pilot style is excluded) 1 4 1 4 VNB0 , 1 1 (N.C.)

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Cable length (L)[m] 1 3 5 8 A B C (30.7) (16.6) (23.7) Connector A1 (12.7) (10.2) (5.6) (10.5) 1.5 3 5 8 (7.0) Connector C (14.2) (6.7) (5.7) Connector A2 3 2 1 (Terminal no.) 1 3 2 4 1 4 10 (13.5) AB 1 3 15 1 2 (18) 20 AB 15 16 (30.7) (11) L Produced upon receipt of order (14.7) (10) Connector D Connector B With lock and sensor Connector A1 terminal no. 1 2 3 Connector C terminal no. 1 2

VZS

For VZS2000 New: BG-VZS2000-1 (Ditch groove): Set of gasket 1 pc. and mounting screw 2 pcs. Old: BG-VZS2000 (Plate gasket): Set of gasket 1 pc. and mounting screw 2 pcs. For VZS3000 New: BG-VZS3000-1 (Groove gasket): Set of gasket 1 pc. and mounting screw 3 pcs.

Possible to transfer a workpiece at low-speed.

1 !9 !2 @1 @3 e u o t @2 !8 @0 @0 @3 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 q w r y !5 !6 i w i !

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1]I!

Industrial Filters

560 935 1290 100 150 40 (1 1/2B) 50 (2B) 65 (2 1/2B) 40 (1 1/2B) 25 (1B) 620 9 750 20 175 73 445 318.5 240 560 1195 1550 100 150 40 (1 1/2B) 50 (2B) 65 (2 1/2B) 40 (1 1/2B) 25 (1B) 620 9 1000 20 200 92 445 318.5 240 560 1460 1815 100 150 65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40 (1 1/2B) 720 18 500 24 260 103 560 400 270 710 1045 1445 100 150 65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Metal seal Rubber seal (1) Without (1) (1) With Function (1) With (w/o light) Symbol Specification DC (1.0W) AC Note 1) DIN style is applicable to VQ2000, 3000.

Series AP500

) Connections 1/2, 3/4 inch face seal, 1/2, 3/4 inch tube weld 3.

MHZ

0.5 1 MHZ2-25, MHZL2-25 0.5 0.4 0.5 1 0.5 1 MRHQ MHZ2-32 0.5 0.4 0.5 1 0.5 1 MHZ2-40 0.5 0.4 0.5 1 0.5 1 Misc.

MHZ

0.5 1 MHZ2-25, MHZL2-25 0.5 0.4 0.5 1 0.5 1 MRHQ MHZ2-32 0.5 0.4 0.5 1 0.5 1 MHZ2-40 0.5 0.4 0.5 1 0.5 1 Misc.

CXWM/CXWL

Table (2) Housing Mounting Style with Auto Switch (CDBXW -) Component Parts for Mounting Switches and No. of Component Parts M L 10 16 20 25 32 Assembly model no. for mounting switch Component parts Material CDBXW 10MM L CDBXW 16MM L CDBXW 20MM L CDBXW 25MM L CDBXW 32MM L 1 1 1 1 Magnet mounting block ass'y Aluminum alloy 1 1 1 1 1 Aluminum alloy Switch mounting rail 2 Spacer Mounting block

MY2

X416 1 2 1 1 1 1 1 Stroke adjusting unit Combination description Holder mounting bracket X417 1 1 1 1 2 1 1 Nil W Z L H LZ HZ Nil W L H L, H, LS, HS X416 on one side X416 on both sides (one on each side) X416 on one side, X417 on the other side X416 on L unit side X416 on H unit side X416 on L unit side, X417 on the other side X416 on H unit side, X417 on the other side X417 on one side

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

M5 thread 1 (P) N.C.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

port External pilot specifications (1) NM N1 N3 N7 N9 N11 M5 01 02 Symbol Mixed M5 threads 1/8 thread 1/4 thread 1/8" 5/32" 1/4" 5/16" 3/8" Applicable tubing O.D.

IDX-OM-U021

. 1-1 1.2 . 1-2 1.2.1 C . 1-2 1.2.2 G . 1-2 1.2.3 K . 1-2 1.2.4 P . 1-2 1.2.5 R . 1-2 1.2.6 V . 1-2 1.2.7 . 1-2 1.3. . 1-3 2.1 . 2-1 2.2 . 2-2 2.2.1 . 2-2 2.2.2 . 2-3 2.2.3 . 2-4 2.2.4 . 2-5 2.2.5 . 2-5 2.2.6 . 2-6 2.2.7 . 2-7 2.3 . 2-9 1 3 / 3.1 . 3-1 3.2 . 3-1 3.3 . 3-2 3.4 . 3-2 3.5 . 3-2 3.6 . 3-3 3.7 . 3-4 4 4.1 . 4-1 4.2 . 4-1 4.2.1 () . 4-1 4.2.2 . 4-

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Rc(PT) 1/8 SY C4 (for 4) C6 (for 6) C8 (for 8) Rc(PT)1/8 Rc(PT) 1/4 Side VV3QZ25-lll VQZ2l5 VQZ200 2 to 20 2 stations:126 Additional station:38 SYJ VK C6 (for 6) C8 (for 8) C10 (for 10) Rc(PT)1/4 1(P)port Rc(PT)3/8 3(R)port Rc(PT)1/4 Side VV3QZ35-lll VQZ3l5 VQZ300 2 to 20 2 stations:209 Additional station:60 VZ VT Note 1) Threaded port style.