5 Port Air Operated Valve Series VFA3000 1

Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (Mounting hole) (P , A, B port) 2-3 (Breathing port) (R1, R2 port) 3 4 5 3 position closed center/exhaust center/pressure center: VFA3 30-01 02-X1 (P , A, B port) (Mounting hole for manifold) (Mounting hole) (Pilot port) (Breathing port) (R1, R2 port) 5-3-12 5 4/5 Port Air Operated Valve Series VFA3000 Dimensions

V100

VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VT Flow Characteristics VP VG Port size 1 2 Flow characteristics Manifold 2 3 1, 2, 3 port VP C[dm3/(sbar)] C[dm3/(sbar)] b 0.13 0.10 0.26 0.16 b 0.26 0.16 0.13 0.10 Cv 0.0072 0.016 0.012 0.020 Cv 0.012 0.020 0.0072

VCL

(mm) A B C D E F G H J L Port size Bracket part no.

Vacuum Equipment

Pad selection 1-A Theoretical lifting force 1-B Calculation method: Pad diameter 2.

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B B For D-F8 Operating range at proper mounting position (Lm/2) Most sensitive position Operating range of single auto switch (Lm) 11-6-10

Electric Actuator/Slider Type

5 A-A t y @2 C B e @1 !0 C B r w C-C B-B !4 !2 Body Table !3 Component Parts No. Description Material Note No.

Secondary Batteries

Description Bracket*1 Symbol 650 37 kW 75 kW 850 Nil B *1 Bracket is included, (but not assembled).

Soft Start-up Valve AV2000/3000/4000/5000 1

Pressure range 0 1 2 3 4 5 Needle rotations 14-3-6 7 Soft Start-up Valve Series AV2000/3000/4000/5000 Working Principle w F.R.L. e AV r B ON OFF q t AU B-B AF 1(P) 2(A) AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com u IR y VEX AMR 3(R) B ITV IC Working description

VXD21/22/23

Then the pressure in the pressure action chamber B falls to open the main valve C. When the coil o is not energized, the pilot valve A is closed and the pressure in the pressure action chamber B rises and the main valve C closes.

ZQ

) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com b b view 4 6 2 a 5 a 5 5 Component Parts No.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

Basic Type ZX ZR (a) Full system (b) 3 port valve selection ZM ZH ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY ZQ (c) Switching on the vacuum side (d) Centralized exhaust type ZF Exhaust pipe with enough capability ZP ZCU AMJ Misc.

MXU

Auto Switch Groove Position D-A, D-A9V W D-M9, D-F9W A D-M9V, D-F9WV W Bore size (mm) Application B B A W A B stroke 6 5 to 30 3.5 0 17 6.5 13 3.5 2.5(5) 17 4.5 5 to 20 17 13 17 10 25 7.5 3.5 20 16 2.5 7.5 20 1.5 0.5 30 19 15 19 (1) 5 27 23 27 10 22 18 22 15 27 23 27 16 8 4 2 8 2 0 B A 20 22 18 22 Bore (mm) 6 10 16 25 27 23 27 (0.5) 6.9 10 30 27 23 27 8.8 14 13.9 19 Note 1) Negative figures

ISE70/75/75H

Note Bracket B and the bracket assembly make up one set.

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

Auto switch a b d c Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Proper Mounting Position (mm) A B Bore size (mm) 63 80 100 10 13 17.5 14 18.5 23.5 Proper Mounting Position (mm) a b 14 18 17 c 20 24 23 d D-A9 type D-M9 type D-F9 W type 2 6 5 8 12 11 In order that

VNC

push type 9 Other 20 (14) 3 Option 25 (16) 4 Valve size 2 to 9 1 1 1 4 32 (22) 5 1 B 1 4 Flange 32F 40A 1 1 2 40 (28) 6 1 B 1 2 Flange 40F Electrical entry/With light/surge voltage suppressor 50A Nil Air operated 2 50 (33) 7 GS Grommet with surge voltage suppressor G Grommet 2B Flange 50F E Grommet terminal 2 B 1 2 Flange 65 (45) 8 65F Valve size 1 EZ Grommet terminal with light/surge

Booster Regulator Series VBA1110 to 4200 1

) The IN air passes the check valve to pressure boosting chambers A and B.

LG1H

Refer to pages starting with 181 for mounting. 3-8H10 depth 10 30 A B Stroke Model LG1H202PC-500-F LG1H202PC-600-F LG1H202PC-700-F LG1H202PC-800-F LG1H202PC-900-F LG1H202PC-1000-F 350 450 550 650 750 850 370 470 570 670 770 870 500 600 700 800 900 1000 95 B 100 95 8-6.2 110 95 20 95 A Positioning Time Guide Positioning time Positioning time (sec.)

ZSE40/ISE40

Released Workpiece 1 Workpiece 2 Workpiece n Atmosphere A B 4 Max. A: Max. pressure value when a workpiece is adsorbed. ON = A A B 4 Min. B: Min. pressure value when a workpiece is not adsorbed. OFF = B + 16-2-21 8 Series ZSE40/ISE40 Calibration Procedures Auto Preset (In the case of confirming the supply pressure) 1. Auto preset mode 2. Preparation for auto preset 3.

AMD

Port size AMD550 AMD650 AMD850 01 B 06 10 14 B 3 4 1B 1 8 N.C. auto-drain N.O. auto-drain Drain guide Accessory 02 03 B 1 4 B 3 8 04 B 1 2 1 B 1 2 20 2B 1 4 B IN-OUT reversal direction T Element service indicator Option AMD800 to AMD1000 Self-standing type AMD801/901 Piping support type 20 01 AMD 8 20 00 AMD 8 Port size Body size Port size Body size 8 8 20 2B flange 30 3B flange 20 2B flange

AMF

P . 14-20-57 14-20-42 2 Odor Removal Filter Series AMF How to Order AMF150 to AMF850 AMF 250 03 R B Option R IN-OUT reversal direction Body size Bracket Accessory (Option) 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 B 1 4 B 3 8 04 B 1 2 06 B Nil Nil B Piping port (B dimension) 1 Standard 11 2 Standard 01 B 1 8 02 03 Thread type Nil Rc F G N