Rubber seal 5 Port Solenoid Valve Series SYJ5000

B B B B 43.9 24 24 44 23 A A A A A 10.5 0.5 (DIN 1.7) 33 10.4 15.9 ( DIN 17.1) 1/4 (P, R port) 1/4 (P, R port) (Pitch) P = 17 24.5 (Station n) (Station 1) (Station n) (Station 1) Built-in speed controller (Light/surge voltage suppressor) (Light/surge voltage suppressor) 56.5 Max. 13.5 61.6 [68.6] 61.6 [68.6] + + + + + + 46.2 46.2 A A A A 33 24.5 25 B B B B 1 6 8.5 8.5 (Pitch) P = 16 33 (Pitch

Rubber seal 5 Port Solenoid Valve Series SYJ7000

B B B B R P R 18.5 18 59.9 (4.9) 19 21.9 31.4 A A A A A (DIN: 15.2) 1/4 (P, R port) 13.9 (Pitch) P = 19 29 (Station n) (Station 1) (Light/surge voltage suppressor) + + + 74 [81] 58.6 A A 42 29.5 8.5 B B 8 (Pitch) P = 19 25 One-touch fitting (A, B port) Applicable tubing O.D.: 6, 1/4" 8, 5/16" L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector (W0) 107.5 100 74 [81] M8

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

SQ2000 20 ms or less Cylinder Speed Chart Pressure: 0.5 MPa/Load factor: 50% Flow Characteristics Note) Series CJ2 6 10 16 20 25 32 40 Series CM2 Bore size (mm) Base mounted Average speed (mm/s) Metal seal Rubber seal C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 800 700 600 500 400 300 200 100 0 Perpendicular, Upward actuation Horizontal actuation SQ1000 0.63 0.11 0.14 0.80 0.20 0.19 800 700

VZS

Single solenoid type A side solenoid Black: A Red: COM Double, 3 position type A side solenoid Black: A Red: COM Valve B side solenoid White: B Red: COM Lead wire color Lead Wire Color Single solenoid type A side solenoid Black: A Red: COM Double, 3 position type A side solenoid Black: A Red: COM Valve (1) B side solenoid White: B Red: COM Lead wire color Lead wire length: 0.6 m 3-7-4 5 Series

Free Mount Cylinder

D-A9V D-M9V D-F9WV A 22 (20) 5 (7) W B ( ): Denotes the values of D-M9V, D-F9WV.

CXS

A A a B B s j C f g t C0.5 C0.2 C0.2 b d e 45 45 Section A-A p k C0.5 45 C n h i l (d) C0.5 q m O Section B-B r (l) View C (mm) +0.2 0 l i o j k m n p q r s t b e g a c d f h Model 0 0.2 0.05 0.15 + 0.1 0 +0.2 0 3.5 +0.013 +0.001 CXS 6 2.75 M2.5 x 0.45 4.5 3.5 4.75 C0.5 2.8 0.5 4 3.5 3 3.5 16 0.1 M3 x 0.5 4 1 5.5 6 +0.2 0 0.05 0.15 0 0.2 + 0.1 0 +0.2 0 5 +0.016 +0.001 CXS10 4 M3 x 0.5 8 5

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

A B A B A B A B A B A B A B A B A B A B 40 10 8 6 4 4 1 5.5 3.5 3.5 0.5 0.5 0 1 0 7 4 2.5 0 4.5 1.5 12 9 50 10 8 6 4 3.5 1.5 5.5 3.5 3 1 0 0 0.5 0 6.5 4.5 2 0 4 2 11.5 9.5 63 12.5 11.5 8.5 7.5 6 5 8 7 5.5 4.5 2.5 1.5 3 2 9 8 4.5 3.5 6.5 5.5 14 13 80 16 14 12 10 9.5 7.5 11.5 9.5 9 7 6 4 6.5 4.5 12.5 10.5 8 6 10 8 17.5 15.5 100 17.5 16.5 13.5 12.5 11 10 13 12 10.5 9.5 7.5 6.5 8 7 14 13 9.5

MXQ

B side traveling parallelism to A side Refer to Graph (1).

CL

9 @0 @1 @2 @3 Hexagon socket head cap screw Spring washer Chromium molybdenum steel Steel wire Hexagon socket head cap screw Spring washer Bumper A Bumper B Wear ring Wear ring Hexagon socket head plug Element Piston seal Piston gasket Brake piston seal Rod seal A Rod seal B Middle cover gasket A Middle cover gasket B Cam gasket Mounting nut Rod end nut Chromium molybdenum steel Steel wire

C76

A B A B A B A B A 32 8 (6) 7 (5) 8.5 (6.5) 14.5 (11.5) 9 (7) 8 (6) 7 (5) 6 (4) 6 (5) 12 (9) 40 10 (11) 12 (9) 7.5 (5.5) 12.5 (9.5) 15 (12) 13 (10) 13 (10) 11 (8) 5 (3) 11 (7) Aim at this number ( ) For air cushion type Auto Switch Mounting Height (mm) D-F7/J79 D-F7W D-J79W D-F7BAL D-F79F D-C7/C80 D-H7 D-H7W D-H7BAL D-H7NF D-A7 D-A80 D-A7H D-A80H D-C73C D-C80C D-A73C D-A80C D-H7C D-A79W D-J79C

C76

A B A 32 6 7 7 8 40 11 13 12 14 Aim at this number.

Brake mechanism added

A B A B A B A B A B A B A B A B 40 50 63 80 100 6 4 3.5 1.5 0 0.5 6.5 2 4 11.5 10 0 0 4.5 0 2 9.5 8 ML2B 3.5 1.5 0 0.5 6.5 2 4 11.5 10 0 0 4.5 0 2 9.5 8 8.5 7.5 6 5 2.5 3 9 4.5 6.5 14 12.5 1.5 2 8 3.5 5.5 13 11.5 12 10 9.5 7.5 6 6.5 4.5 8 10 17.5 16 4 4.5 12.5 6 8 15.5 14 13.5 12.5 11 10 7.5 8 14 9.5 11.5 19 17.5 6.5 7 13 8.5 10.5 18 16.5 D-A9 and D-A9V cannot be mounted on 50.

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

MXS

MGC MGF CY1 q B MY1 Normally ON w * Adjust the switch position according to load and speed.

MXS Series Air Slide Table

7 2 38 12 6.6 11 12 A B 34 16 34 16 H Cross section AA Cross section BB (NN-1) X H G (mm) Note) Refer to "Dimensions" of MXS25 on P. 64 for one with shock absorber as symmetric.

CL

9 @0 @1 @2 @3 Hexagon socket head cap screw Spring washer Chromium molybdenum steel Steel wire Hexagon socket head cap screw Spring washer Bumper A Bumper B Wear ring Wear ring Hexagon socket head plug Element Piston seal Piston gasket Brake piston seal Rod seal A Rod seal B Middle cover gasket A Middle cover gasket B Cam gasket Mounting nut Rod end nut Chromium molybdenum steel Steel wire

MXW

Nil B Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

MVGQ

9 to @2 20Solenoid valve with adapter assembly SYJ3 3-M VZ5 4 -M VF3 4 -M VZ3 4 -M A B A B A B A B @3 Data Note 1) Seal kit includes !9 to @2. Order the seal kit, based on each bore size.

I

B: Wall mount, DIN rail Mass A: Approx 90g.

CE2

RE A B Mounting bracket nut Unit holding tie-rod Bore size (mm) Nut Width across flats REC Socket Width across flats Socket JIS B 4636 2 point angle socket 10 10 40 JIS B 1181 Class 3 M8 x 1.25 JIS B 4636 CX 13 2 point angle socket 13 JIS B 4636 2 point angle socket 13 50 13 CY JIS B 4636 2 point angle socket 13 JIS B 4636 JIS B 1181 Class 3 M10 x 1.25 63 17 13 2 point angle socket 17 MQQ