KJ

K Screw for bracket Panel mounting bracket (Standard) Type E snap ring M Plate Operation on the panel front permits mounting. Holes for mounting bolts are not necessary. (Mountable panel thickness is 5 mm maximum.)

LEF-OM006xx

LEFB32 (mm) (300) 500 (600) (700) 800 (900) 1000 (300) 500 (600)(700) 800 (900) 1000 (1200) (1500) (1800) (2000) (300) 500 (600) (700) 800 (900) 1000 (1200) (1500) (1800) (2000) (kg) 1.19 1.45 1.58 1.71 1.84 1.97 2.10 2.39 2.85 3.08 3.31 3.54 3.77 4.00 4.46 5.15 5.84 6.30 4.12 4.80 5.14 5.48 5.82 6.16 6.50 7.18 8.20 9.22 9.90 (kg) 0.12 0.19 0.35 1( ) 2{-}5m 5m 10% 3() 452000Hz 1 () 4 5

Table of Contents

Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Average speed Series (mm/s) VQC 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SQ VQ0149-C4 VQ0 VQ4 800 700 600 500 400 300 200

VXP21/22/23

Normally open Normally closed Model Grommet Electrical entry Conduit Conduit terminal Bracket H F E D C B f M L K J A e 57 62 67 b 39 45.5 49.5 Q 39 39 41.5 Q 23 23 25.5 N 61 (68) 69 (76) 79 (89) d 47 52 57 a 34 51 58 N 69 (76) 77 (84) 87 (97) N 61 69 79 c 65 78 86 Q R 57 74 81 VXP2142 , 30 30 35 20 20 23 34 43 47 29 37 43 28 35 40 3 8 8 63 80 90 59 59 62 104 (116) 118 (136) 133 (150) 26

ZQ

) 258-9200-www.stevenengineering.com L2 L1 ZL Release flow adjusting screw ZY 8 P PE Exhaust part 2-3.5 ZQ 62.8 (Body mounting hole Note 1)) 3 75 Suction filter ZF With L type plug connector ZP Vacuum pressure switch PE P EXH ZCU AMJ S R U N L H L H S R U N L H L H S R U N L H L H S R U N L H L H k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS Misc. (72.4)

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com E depth EK Q + Stroke Z + Stroke A G Stroke adjustment screw Note 3) (inner cover) Plug Plug [P (port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com I J K L M N O Model ZH18DS-12-12-12 ZH18DL-12-12-12 ZH20DS-12-16-16 ZH20DL-12-16-16 12 12 16 16 15.8 35.5 50 17 10 15.8 35.5 50 10 17.2 38.5 54.3 12 17.2 38.5 54.3 12 12 12 16 16 17 21.7 21.7 One-touch and screw-in connection Applicable tubing diameter N Applicable tubing diameter E S type: White color L type: Black color

XL

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

CJP

M15 x 1.5 4 10 20 23.5 17 15 27 30.5 24 5 14.5 19 11.5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 15 19 4.5 M22 x 1.5 5 10 20.5 25 17.5 15 27 31.5 24 Note) E and F should be machined in a concentric manner.

VCL

(mm) A B C D E F G H J L Port size Bracket part no.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

1 u Material Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 Note CRJ Aluminum alloy Body A Light gray color Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !

Magnet: None, Mounting: D (Double Clevis), Style: Aluminum Tube, Bore Size: 100mm, Thread: Rc, Stroke: 150mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)]

Magnet: None, Mounting: D (Double Clevis), Style: Aluminum Tube, Bore Size: 100mm, Thread: Rc, Stroke: 200mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)]

Magnet: None, Mounting: D (Double Clevis), Style: Aluminum Tube, Bore Size: 100mm, Thread: Rc, Stroke: 500mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)]

Magnet: None, Mounting: D (Double Clevis), Style: Aluminum Tube, Bore Size: 100mm, Thread: Rc, Stroke: 700mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)]

Magnet: None, Mounting: D (Double Clevis), Style: Aluminum Tube, Bore Size: 100mm, Thread: Rc, Stroke: 150mm, Option: N [w/o Rod Boot, w/o Cushion (Not Valid for Air-hydro), Lock Operation: E [Spring Lock (Lock Exhaust)]

Magnet: None, Mounting: D (Double Clevis), Style: Aluminum Tube, Bore Size: 100mm, Thread: Rc, Stroke: 175mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)]

Magnet: None, Mounting: D (Double Clevis), Style: Aluminum Tube, Bore Size: 100mm, Thread: Rc, Stroke: 250mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)]

Magnet: None, Mounting: D (Double Clevis), Style: Aluminum Tube, Bore Size: 100mm, Thread: Rc, Stroke: 400mm, Option: N [w/o Rod Boot, w/o Cushion (Not Valid for Air-hydro), Lock Operation: E [Spring Lock (Lock Exhaust)]

Magnet: None, Mounting: D (Double Clevis), Style: Aluminum Tube, Bore Size: 100mm, Thread: Rc, Stroke: 600mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: E [Spring Lock (Lock Exhaust)]