Table of Contents

-02 AS3201F -03-10 200 400 200 100 0 0 SV400 AN300 -KM12 T1209 SV300 ANA1 -C12 T1075 800 400 MB 100 MB 80 600 300 Stroke (mm) AS5000-02 AS420-02 AS4000-03 400 200 200 100 0 0 400 800 CS1 125 MB 100 600 300 Stroke (mm) AS5000-02 AS420-02 200 400 AS4000-04 200 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800

VQZ1000/2000/3000

Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 800 700 600 500 400 300 200 100 0 VQZ2121-C6 800 700 600 500 400 300 200 100 0 VQZ3121-C6 It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being

Digital Flow Switches Series PF2A

PF2A703H--28 PF2A703H--68 PF2A706H--28 PF2A706H--68 PF2A703H--29 PF2A703H--69 PF2A706H--29 PF2A706H--69 3000 150 3000 150 6000 300 6000 300 PF2A712H--28 PF2A712H--68 PF2A712H--29 PF2A712H--69 12000 600 12000 600 13

5 Port Solenoid Valve Series SV

Stroke mm 70% 30% AS3201F -02-12 400 200 70% 50% 10% 0 800 MB 80 600 Stroke mm AS5000-02 AS420-02 400 200 0 AN300 -KM12 T1209 800 MB 100 600 Stroke mm AS5000-02 AS420-02 400 200 0 800 CS1 125 600 Stroke mm AS5000-02 AS420-02 400 200 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details

ZSE2/ISE2

: ZSE2-0R Grommet type: ZSE2-0R-15 Connector type: ZSE2-0R-15C Pressure setting trimmer Indicator light (Red) Pressure setting trimmer Indicator light (Red) H SET L H SET L 15 15 9 9 2-M2.5 x 41L Mounting thread 25 2-M2.5 x 41L Mounting thread 25 31 31 9 600 (3000) 9 600 (3000) 42 13 40 49.5 40 3 3 18 20 16 18 20 16 11 13 11 Vacuum supply port 3.3 Gasket Vacuum supply port 3.3 Gasket 16-6

Digital Flow Switch

Hysteresis*6 Variable from 0 Protection Over current protection Switch output Analog output*7 Output type Voltage output: 1 to 5 V (0 to 10 V can be selected*8), Current output: 4 to 20 mA Impedance Voltage output Output impedance: Approx. 1 k Current output Maximum load impedance: Approx. 600 Response time*9 Linked with the response time of the switch output.

3

Expanded flow range Compact, Space saving Wide range of flow measurement with one product Compared with the current PF2A, Flow ratio 78 % reduction Weight 74% reduction 100:1 Mounting space 1100 g a 240 g Compared with PFMC7202-06 and PF2A703H-10 Rated flow ratio is 10 : 1 for current PF2A. 2000 L type 55 Applicable flow range [L/min] PFMC7202 New 1 2 5 10 20 25 50 100 150 200 300 500 600

Power Valve: Economy Valve Series VEX5

900 1000 700 600 500 400 300 200 100 0 E 800 900 1000 700 600 500 400 300 200 100 0 F 800 900 1000 700 600 500 400 300 200 100 0 G When the cylinder is extended, the speed controller is metered-out, is connected with the cylinder directly, and its needle is fully open.

CE

screw (M3 x 0.5 x 10l ) Switch spacer Switch mounting nut Data 50 25 to 600 BQ-2 63 25 to 600 Please contact SMC regarding non-standard strokes.

CP95

, 125, 160, 200, 250, 320, 400, 500, 600 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 Intermediate strokes are available.

CE

mounting screw (M3 x 0.5 x 10l ) Switch spacer Switch mounting nut Data 50 25 to 600 BQ-2 63 25 to 600 Please contact SMC regarding non-standard strokes.

CP95

, 125, 160, 200, 250, 320, 400, 500, 600 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 Intermediate strokes are available.

Compact 5-Port Solenoid Valve

Made to Order Manifold Exploded View 16 20 25 CM2 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 300 mm 32 40 50 63 CA2 series Pressure: 0.5 MPa Load ratio: 50% Stroke: 500 mm 80 ZK2 Combination Manifold 100 Fittings, Replacement Parts, Tools 0 100 200 300 400 500 600 700 800 Average speed [mm/s] Manifold Options Specific Product Precautions * Values at extension of a directly coupled

Thermo-chiller/Rack Mount Type

] 35C 300 300 25C 25C 200 200 5C 5C 100 100 Facility water temperature Facility water temperature Facility water temperature Facility water temperature 0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRR012 018-A-10, HRR012 018-W-10 [50 Hz] [60 Hz] 800 800 40C 32C 40C Heating capacity [W] Heating capacity [W] 600 600 32C 400

Modular Design with Uniform Body Style

0 150 100 50 200 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] AFM40-D AFD40-D 0.02 0.02 Pressure drop [MPa] Pressure drop [MPa] P1 = 0.5 MPa P1 = 0.3 MPa P1 = 0.5 MPa P1 = 0.3 MPa P1 = 0.7 MPa P1 = 0.7 MPa 0.01 0.01 0 0 0 600 400 200 800 1000 0 100 200 500 400 300 600 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 72 AFM20-D to AFM40-D Series AFD20-D to AFD40-D Series Dimensions AFM20

Series AK1000

Inlet pressure: 60 psig (0.41 MPa) 1/2 inch Connection ) 1.50 (38.1) 50 0.34 40 0.28 2.62 (66.5) Delivery pressure (MPa) Delivery pressure (psig) 30 0.21 0.69 (17.5) 20 0.14 2.50 (63.5) 10 0.07 0.88 (22.4) 0 0.00 0 40 80 120 160 200 Flow Rate (slpm, N2) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) AK1400TA Inlet pressure: 0 psig (14 kPa) 760 0 -8 700 Delivery pressure (mm Hg abs) -21 600

Magnetically Coupled Rodless Cylinder

, 700, 800 25, 32 3000 100, 150, 200, 250, 300, 350, 400, 450 500, 600, 700, 800, 900, 1000 40 3000 Note 1) Contact SMC if the maximum stroke will be exceeded.

Modular F.R.L. Unit

600 Nominal filtration rating 0.01m (95% filtered particle size) Max. 0.1mgf/Nm (before saturated with oil: 0.01mgf/Nm or less, approx. 0.008ppm) Note 2) Outlet side oil mist concentration Element life Bowl material Drain capacity cm Weight kg Accessories Bowl guard AFD30 2 years or when the pressure drop hits 0.1MPa.

IR1000/2000/3000

0.2 0.2 0.1 0.1 0.196 0 200 400 600 800 1000 1200 1400 0 0.2 0.1 0.3 0.4 0.6 0.5 0.8 0.7 0.9 1.0 0 200 400 600 800 1000 Flow rate l/min (ANR) Relief flow rate l/min (ANR) Supply pressure P1 MPa 6 Series IR1000/2000/3000 Series IR3000 Flow rate characteristics Relief characteristics Pressure characteristics Testing methods conform to JIS B8372.

Modular F.R.L. Unit

Use a regulator or filter regulator with a back flow mechanism when mounting a 3 port valve for residual pressure release on the IN side to ensure the release of the AC25 Rc 3/8 AC55 Rc 1 0 0 200 400 600 800 Flow rate L/min (ANR) 4000 6000 8000 2000 10 0 0 Flow rate L/min (ANR) residual pressure.