CA2

8 501 to 800 81 50 up to 600 20 to 600 35 32 70 27 52 20 40 9.0 12 50 110 17 M8 x 1.25 70 90 11 601 to 1000 MB1 63 101 up to 600 20 to 600 35 32 85 27 64 20 40 11.5 15 59 130 17 M10 x 1.25 86 105 11 601 to 1000 80 119 up to 750 20 to 750 40 37 102 32 78 25 52 13.5 18 76 160 21 M12 x 1.75 102 130 13 751 to 1000 CA2 100 133 751 to 1000 up to 750 20 to 750 40 37 116 41 92 30 52 13.5 18 92 180

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

1 Compact Cylinder Series CQ2 12, 16, 20, 25, 32, 40, 50, 63, 80, 100, 125, 140, 160, 180, 200 With a short overall length, the space-saving cylinder helps to make various jigs and equipment more compact.

Ionizer

Without bracket With bracket Note) Nil Bracket Alphabetical Index Length Measuring/ Counter High-voltage unit full length Nil Without sensor Autobalance sensor [Body-mounting type] B Emitter material E 180 mm 220 mm 180 220 Note) Four end brackets are bundled with the bracket model.

TABLE OF CONTENTS

Water Resistance Excellent Good up to Good up to Excellent up to 150 F. 180 F. 150 F. 210 F. Air Resistance Excellent Excellent Excellent Good (no oi) up to 180 F. up to 350 F. up to 180 F. up to 180 F. Abrasion Resistance Excellent Excellent Excellent Good Age Resistance Excellent Good Excellent Excellent Steam Resistance Fail Fail Fail Good (to 300 F.)

Speed Controller with Indicator

Current model Indicator window direction: 0 Indicator window direction: 180 The numerical indication can be checked without looking into the controller.

CL

Note) The manual unlocking cam will rotate approximately 180. Do not rotate the wrench flats section excessively. The lock of a fine lock series cylinder can be disengaged manually through the procedure described below. However, make sure to disengage the lock pneumatically before operating the cylinder.

7

Special electrical entry direction With bracket/Special electrical entry direction VXD2 to VXD2 3 A 6 D VXD2 to VXD2 3 A 6 D VXD2 to VXD2 7 E 9 G 90 Symbol Symbol Standard 180 90 180 90 90 A IN OUT Nil B IN OUT OUT IN IN OUT 180 180 180 180 270 90 270 90 B IN OUT IN OUT A C IN OUT IN OUT 270 270 270 270 1 Available for the VXD23 A to 26 D. 2 Bracket is attached as standard with the resin

High Vacuum Angle Valve

Heater assembly quantity 200/40 400/70 400/80 600/130 800/180 1200/300 1600/400 100V H5 120C 800/40 1600/80 1600/80 2400/130 3200/180 4800/300 6400/400 200V The inrush current of the heater flows for several ten seconds when using 100V while it flows for several seconds when using 200V. However, this inrush current decreases momentarily.

energy saving effect

Page 180 Air-cooled 200 V wCaster Adjuster-foot Kit . Page 180 Water-cooled 200 V HEA eElectric Conductivity Control Set . Page 181 Air-cooled 400 V IDH rBypass Piping Set . Page 181 Water-cooled 400 V Cooling Capacity. Page 170 tSnow Protection Hood . Page 182 Pump Capacity . Page 171 yParticle Filter Set . Page 183 Dimensions . Page 172 uWired remote controller .

Table of Contents

160, 180, 200, 250 0.7 AS800-12 1 4 35,400 1 540 38,500 586 1.4 AS900-14 1 2 52,000 1 792 47,500 724 300 3.3 AS900-20 57,800 2 880 60,800 926 3.3 Note) Flow rate values are measured at 0.5 MPa and 20C.

Guide Cylinder Series MGG

Allowable end load F (N) MGGL 80Stroke 2 900st (Ball bushing type) Deflection Y (mm) 800st 700st 1 600st 500st 400st 200st 300st st: Stroke (mm) 100st 0 0 20 40 60 80 100 120 140 160 180 200 220 Allowable end load F (N) MGGL 100Stroke 2 1000st (Ball bushing type) 900st Deflection Y (mm) 800st 1 700st 600st 500st 400st st: Stroke (mm) 200st 300st 100st 0 0 20 40 60 80 100 120 140 160 180

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Size M4 x 0.7 x 8 L Q'ty 1 BTBT-03, BT-04, BT-05 BT-06, BT-08, BT-12 D-A5, A6 D-F5, J5 D-Z7, Z8 D-Y5, Y6, Y7 BA4-040, BA4-063, BA4-080 BMB4-032, BMB4-050 2 Set screw M4 x 0.7 x 6 L 2 BMB5-032 BA7-040, BA7-063, BA7-080 D-A9 D-M9 BBA1 D-A5, A6 D-F5, J5 BT-16, BT-18A, BT-20 BS4-125, BS4-160 BS4-180, BS4-200 BS5-125, BS5-160 BS5-180, BS5-200 D-Z7, Z8 D-Y5, Y6, Y7 3 Set screw M4 x 0.7 x 8 L 2

MY1

(kg) m 200 190 180 170 l 160 (4000) (4000) 150 140 130 (3200) (3200) m l 120 Weight (m) Caution 110 MY1B100 MY1B100 m 100 1. If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation. Therefore, be sure to level the cylinder tube when mounting.

Floating Joint

200 180 200 Caution Maintenance Warning 1.

HRX-OM-Q026

Table 3-1 Weight of the product Weight kg Model Standard model Option A Option T HRSH250/300-AApprox. 280 [Standard model] + 24 None HRSH150/200-AApprox. 215 [Standard model] + 18 None HRSH100-AApprox. 180 [Standard model] + 18 None HRSH150/200/250-WApprox. 180 [Standard model] + 18 [Standard model] + 22 HRSH100-WApprox. 150 [Standard model] + 18 [Standard model] + 52 3.1 Transport HRSH Series

LG1H

Refer to pages starting with 181 for mounting. 80 180 280 60 160 260 Dimensions inside ( ) are for a 100 mm stroke. Positioning Time Guide Positioning time Positioning time (sec.) A: Acceleration time B: Constant velocity time C: Deceleration time D: Resting time (0.4sec.)

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Please be sure to fill in the blank referring to page 340. 180 Body Ported Series SY3000/5000/7000 60 Type Specifications Response Time Note) Based on dynamic performance test, JIS B 8375-1981.

Air-hydro Unit

800 400 30 Capacity of converter (cm3) 300 CC CC 25 600 500 400 100 CRA1H100-180 200 20 CRA1H100-90 300 300 100 CRA1H80-180 200 200 150 CRA1H80-90 50 CRA1H63-180 100 100 80 CRA1H63-90 CRA1H50-180 60 50 40 50 CRA1H50-90 30 Selected model of rotary actuator 160 100 63 40 20 100 200 300 400 500 600 700 800 Nominal size of converter (mm) Cylinder stroke (mm) How to read the graph (ex: when using

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Stations n L1 L2 3 68 59 6 116 107 8 148 139 10 180 171 4 84 75 5 100 91 7 132 123 9 164 155 11 196 187 12 212 203 13 228 219 14 244 235 15 260 251 16 276 267 17 292 283 18 308 299 19 324 315 2 stations 52 43 20 stations 340 331 532 Manifold specifications 10-SYJ5000 Type 42: Side ported / 10-SS5YJ5-42Stations -01, C6 N7 [ ]: AC Grommet (G) 01 C6 N7 (With built-in One-touch fitting) Air

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

[mm] Model L A B n C D E Without lock With lock 11-LEJS63S-300656.5 696.5 306 370 6 1 200 180 11-LEJS63S-400756.5 796.5 406 470 8 2 400 80 11-LEJS63S-500856.5 896.5 506 570 8 2 400 180 11-LEJS63S-600956.5 996.5 606 670 10 3 600 80 11-LEJS63S-7001056.5 1096.5 706 770 10 3 600 180 11-LEJS63S-8001156.5 1196.5 806 870 12 4 800 80 11-LEJS63S-9001256.5 1296.5 906 970 12 4 800 180 11-LEJS63S-10001356.5