240

Dimensions [mm] Model L1 L2 A B C D E F G LEPY6-25 125.6 135.6 15 21 23 28 15 28 36 LEPY6-50 156.6 166.6 22 45 30 52 22 52 60 LEPY6-75 188.6 198.6 29 70 37 77 29 77 85 381 LEPY Series Step Motor (Servo/24 VDC) Dimensions LEPY10 D E C B 2 x M5 x 0.8 x 9 2 x 4.3 through 4 22 14 +0.025 0 3H9 ( ) depth 3 +0.025 0 3H9 ( ) depth 3 Note 4) 28 Motor cable mounting direction: R (Entry on the right

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 2 Series XMA, XYA Stainless steel High Vacuum Angle/In-line Valve Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68

CXWM/CXWL

mounting screw 2 2 2 2 2 Block mounting screw Chrome steel/Nickel plated 2 2 2 2 Chrome steel/Nickel plated Screw for mounting rail 2 2 2 2 2 Chrome steel/Nickel plated Switch mounting screw 2 2 2 2 2 Carbon steel/Nickel plated Hexagon nut 2 2 2 Hexagon socket head plug Chrome steel/Nickel plated Note 1) mark indicates strokes.

Compact Cylinder

D Bore size (mm) A Piping port (1) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) (2) 20 25 B D 32 View from piston rod end 40 (2) (2) (2) (2) (2) (2) C 50 63 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Operating Range

CXT

Stroke (mm) Series Variations Bearing type Slide bearing Ball bushing bearing Bore size (mm) 15 25 50 75 100 125 150 175 200 250 300 CXTM12 CXTL12 12 CXTM16 CXTL16 16 CXTM20 CXTL20 20 CXTM25 CXTL25 25 CXTM32 CXTL32 32 CXTM40 CXTL40 40 Standard stroke Long stroke 8-27-1 2 Platform Cylinder Series CXT 12, 16, 20, 25, 32, 40 How to Order CXT S F9BW B 100 20 M Number of auto switches Nil 2 pcs

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

thread depth C 2-M5 x 0.8 2 x 4-OB 2 x 4-OA effective depth RA Y Q F Depth of counterbore RB I 4-N through 4-N through M0.2 D E K B + Stroke L M0.2 A + Stroke E 25, 30, 40 H effective thread depth C 2 x 4-OA effective depth RA 2-Rc1/8 (NPT1/8, G1/8) 2 x 4-OB Y Q F Depth of counterbore RB E J I M0.2 D W K B + Stroke L A + Stroke M0.2 E (mm) Bore size (mm) Stroke range (mm) Note) F A H B C

Rotary Cylinder Series MRQ Size: 32, 40 1

Find the moment of inertia IB for the rotation of shaft (B). 2. Next, IB is entered to find IA the moment of inertia for the rotation of shaft (A) as a + b 2 2 A = ( ) b a 2 B = m 12 No. of teeth = b 11-10-3 4 Technical Data 3: Theoretical Output 5.

CE

2 r e y @4 @8 @0 !0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

CE

How to Order CEP1 B 50 12 F9BW Number of auto switches Nil 2 pcs. Mounting style B L F 12 mm equivalent S 1 pc.

CLK1

D-G5NTL 75 + 50 (n-2) 15 75 30.5 38 43 50 A B 0 (1) 0.5 2 2 D-A3 D-G3, D-K3 100 + 100 (n-2) 35 + 30 (n-2) 35 100 D-B5, D-B6 33.5 23.5 25 25 Approx. Hs 25.5 (28.5) 38 43.5 50.5 D-A4 35 + 30 (n-2) 50 + 50 (n-2) 35 55 A B 0 2 3.5 3.5 D-G5NTL 27 25 26.5 26.5 Approx. Hs 33.5 38 43.5 50.5 A B 0 1.5 1.5 D-A3 D-G3, D-K3 23 24.5 24.5 Approx.

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

(B contact) 2 pcs.

Stroke Reading Cylinder and Counter

Note 2) The foot shows the weight for one set (2 pcs.). Rod End Nut Dimensions Material 12, 20: Steel (2 pcs. are attached as standard.) 30 d D C H B (mm) d D C B H Part no.

MX-OMP0051

NPN PNP PLC PLC PLC PLC AND(),OR() NPN AND () NPN AND () NPN OR 2 ON , 2 AND 2 OR 2 AND ON 2 ON , 2 OR OFF ON ,= *2 = 24V 4V *2 = 16V :24V,4V OFF ,= *2 * = 1mA *2 *3K = 6V :3K,1mA 3 3-1 ,,, ,,, 3-2 18 3-3 1 2 3 4 5 6 7 8 MXQ6(B),8(B,C),12(B,C) 9 Assy MXQ6A,8A,12A, MXQ16(A,B),20(A,B),25(A) 10 (MXQ6(B)) (MXQ8(A,B,C),12(A,B,C)) (MXQ8(A,B,C),12(A,B,C)) 11 (MXQ16(

Clamp Cylinder with Lock Series CLK1

D-G5NTL 75 + 50 (n-2) 15 75 30.5 38 43 50 A B 0 (1) 0.5 2 2 D-A3 D-G3, D-K3 100 + 100 (n-2) 35 + 30 (n-2) 35 100 D-B5, D-B6 33.5 23.5 25 25 Approx. Hs 25.5 (28.5) 38 43.5 50.5 D-A4 35 + 30 (n-2) 50 + 50 (n-2) 35 55 A B 0 2 3.5 3.5 D-G5NTL 27 25 26.5 26.5 Approx. Hs 33.5 38 43.5 50.5 A B 0 1.5 1.5 D-A3 D-G3, D-K3 23 24.5 24.5 Approx.

MXF

Body tapped Stroke (mm) Model Reed switch D-A9, D-A9V 10 20 30 50 75 100 MXF8 8 Solid state switch D-M9, D-M9V MXF12 12 2-color indication solid state switch D-F9W, D-F9WV MXF16 16 MXF20 20 8-6-1 2 Low Profile Slide Table Series MXF 8, 12, 16, 20 How to Order MXF 12 50 M9N S Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

MTS

A B Hs A B Hs Hv Hv Hv Hv 12/16/20 12/16/20 Hs Hs 25/32/40 25/32/40 Proper Auto Switch Mounting Position Solid state switch Bore size (mm) 2-color indication solid state switch Reed switch D-A9 D-A9V D-M9 D-M9V D-F9W D-F9WV A B C A B Hs Hv A B A B Hs Hv A B C A B Hs Hv C 15.5 15 20 20 15 19.5 19.5 19.5 19.5 46 46 46 46 18 13 15.5 35.5 42 31.5 42 31.5 12 17 17 22 22 17 21 21 21 21 47.5 47.5

MK

2 !3 25, 25: 2 Qty.

CJ2X/CUX/CQSX/CQ2X/CM2X

Low Speed Cylinder Double Acting, Single Rod Series CQSX 12, 16, 20, 25 How to Order CQSX D B 20 30 Without auto switch 30 F9BW B 20 CDQSX D With auto switch Number of auto switches Built-in magnet 2 pcs. 1 pc. n pcs.

CJ2X/CUX/CQSX/CQ2X/CM2X

2 pcs. 1 pc. n pcs.

VFS

2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D side) assembly !2 AXT625-3A-20 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D) !2, Metal joint q, w, Gasket B r, Guard !