AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Vibration resistance: No malfunction occurred in a test ranging between 45 to 2000 Hz. Test was performed in both an axial direction and a perpendicular direction to the lead screw. (Test was performed with the actuator in the initial state.)

HRX-OM-Q026

Circulating fluid1 2 Clean water, 15 to 40% ethylene glycol aqueous solution Operating temperature range1 oC 5 to 35 Cooling capacity3 kW 10.5 15.7 20.5 25 28 Heating capacity4 kW 2.5 3 5.5 7.5 7.5 Temperature stability5 oC 0.1 Rated flow rate (Outlet) L/min 45 (0.43 MPa) 45 (0.45 MPa) 125 (0.5 MPa) Pump capacity Maximum flow rate L/min 120 130 180 Maximum lifting height m 50 80 Settable

MXS Series Air Slide Table

Model F 50 50 50 60 35 60 70 75 80 FF 40 40 40 50 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 KA NA 2 2 2 2 2 2 4 4 4 M 92 92 92 102 115 156 197 255 295 HA 45 45 45 55 35 70 70 76 80 ZZ 108 108 108 118 131 172 213 271 311 N 4 4 4 4 6 6 6 8 8 G 22 22 22 22 20 26 32 40 30 H 45 45 45 55 35 35 35 38 40 NN 2 2 2 2 3 4 5 6 7 I 12 12 12 12 12 33 50 67 82 J 47 47 47 57 70 90 114 155 180 K 35

MXS

Model F 50 50 50 60 35 60 70 75 80 Z 90.5 90.5 90.5 100.5 113.5 154.5 195.5 253.5 293.5 K 35 45 55 65 75 100 125 150 175 J 47 47 47 57 70 90 114 155 180 I 12 12 12 12 12 33 50 67 82 NN 2 2 2 2 3 4 5 6 7 H 45 45 45 55 35 35 35 38 40 G 22 22 22 22 20 26 32 40 30 N 4 4 4 4 6 6 6 8 8 HA 45 45 45 55 35 70 70 76 80 ZZ 108 108 108 118 131 172 213 271 311 NA 2 2 2 2 2 2 4 4 4 FF 40 40 40 50 35 60

7

45 60 60 Material: Cast iron Unit: mm Material: Cast iron Part no.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

(n 2) 2 (n = 4, 8, 12, 16) Note 2) 95 + 45 (n 4) 2 100 + 45 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 105 + 45 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 110 + 45 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 2 (Different surfaces, same surface), 1 15 85 95 100 D-P3DWA n (n = 2, 4, 6, 8) Note 1) 15 + 50 (n 2) 2 (n = 4, 8, 12, 16) Note 2) 85 + 50 (n 4) 2 95 + 50 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 100 + 50

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

CJ216 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 Air cushion is not available for 21-/22-.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

H 39 45 55 60 UU 134 158 190 220 U 114 136 165 190 N 15 17 20 25 Model U 105 124 153 174 Model H 30 33 43 44 N 15 17 20 25 H 39 45 55 60 U 114 136 165 190 UU 150 177 215 250 Model UU 125 146 178 204 H 30 33 43 44 N 15 17 20 25 U 105 124 153 174 Model CDRA1FW50 CDRA1FW63 CDRA1FW80 CDRA1FW100 CDRA1FX50 CDRA1FX63 CDRA1FX80 CDRA1FX100 CDRA1FY50 CDRA1FY63 CDRA1FY80 CDRA1FY100 CDRA1FZ50 CDRA1FZ63

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

H 39 45 55 60 UU 134 158 190 220 N 15 17 20 25 U 114 136 165 190 Model U 105 124 153 174 Model H 30 33 43 44 N 15 17 20 25 U 114 136 165 190 UU 150 177 215 250 Model UU 125 146 178 204 N 15 17 20 25 U 105 124 153 174 H 39 45 55 60 H 30 33 43 44 Model CDRA1FW50 CDRA1FW63 CDRA1FW80 CDRA1FW100 CDRA1FX50 CDRA1FX63 CDRA1FX80 CDRA1FX100 CDRA1FY50 CDRA1FY63 CDRA1FY80 CDRA1FY100 CDRA1FZ50 CDRA1FZ63

Compact

Bore size [mm] Stroke C D Mounting bolt part no. 5 35 CQ-M3 x 35 L 10 40 CQ-M3 x 40 L 15 45 CQ-M3 x 45 L 20 50 CQ-M3 x 50 L 25 55 CQ-M3 x 55 L 30 60 CQ-M3 x 60 L Material: Chromium molybdenum steel Surface treatment: Zinc chromated 12 5.6 5 35 CQ-M3 x 35 L 10 40 CQ-M3 x 40 L 15 45 CQ-M3 x 45 L 20 50 CQ-M3 x 50 L 25 55 CQ-M3 x 55 L 30 60 CQ-M3 x 60 L 16 4.6 5 40 CQ-M3 x 40 L 10 45 CQ-M3 x

TABLE OF CONTENTS

NPT PORTS NPT PORTS WT. 0.25 350 350 1/16 1/16 .09 .09 73JJ9ZGV 73JJ9ZCV K73JJX 250 250 3/32 3/32 .22 .22 73KK9ZGV 73KK9ZCV K73KKX 175 175 1/8 1/8 .35 .35 73NN9ZGV 73NN9ZCV K73NNX 125 125 5/32 5/32 .45 .45 73OO9ZGV 73OO9ZCV K73OOX 100 100 3/16 3/16 .50 .50 73PP9ZGV 73PP9ZCV K73PPX 50 50 1/4 3/16 .78 .50 73RP9ZGV 73RP9ZCV K73RPX 3-WAY NORMALLY CLOSED GROMMET WHEN ORDERING VALVES OR REPAIR

CA2

(n 4) 2 105 + 45 (n 4) 2 n = 4, 8, 12, 16 20 + 45 (n 2) 2 n = 2, 4, 6, 8 95 + 45 (n 4) 2 n = 4, 8, 12, 16 100 + 45 (n 4) 2 n = 4, 8, 12, 16 n = 4, 8, 12, 16 2 (Different sides and same side) With 1 15 120 130 140 D-P5DWL n 140 + 65 (n 4) 2 n = 4, 8, 12, 16 15 + 65 (n 2) 2 n = 2, 4, 6, 8 120 + 65 (n 4) 2 n = 4, 8, 12, 16 130 + 65 (n 4) 2 n = 4, 8, 12, 16 6-8-14 15 Series CA2 Proper

Integrated Controller

Size Non-rotating accuracy 16 1.1 25 0.8 32 0.7 + Force Conversion Graph (Guide) EQY32 EQY16 800 700 600 500 400 300 200 100 0 160 Lead 4: EQY32C Lead 2.5: EQY16C 140 120 Lead 8: EQY32B Lead 5: EQY16B Force [N] Force [N] 100 Lead 16: EQY32A Lead 10: EQY16A 80 Lead 24: EQY32H 60 40 Min. 25% Max. 45% 20 Min. 30% Max. 70% 0 15 20 25 30 35 40 50 45 10 20 30 40 50 90 70 80 60 Pushing force set

HRX-OM-X037

9 0.5 to 45 0.5 to 45 9 0.5 to 45 0.5 to 45 9 0.5 to 45 Particle filter filtration accuracy (Accessory) m 5 5 5 5 5 5 CH1 : Rc1 (Symbol FG1,Symbol NNPT1) Circulating fluid outlet, Circulating fluid return port14 CH2 : Rc1/2 (Symbol FG1/2,Symbol NNPT1/2) Tank drain port14 CH1 : Rc3/4 (Symbol FG3/4,Symbol NNPT3/4 CH2 : Rc1/2 (Symbol FG1/2,Symbol NNPT1/2 CH1 : Stainless steel, Copper (Brazing

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

40 32 8 110 90 26 42 20 M27 x 2 27.5 5 5 x 40AW l 160 43 50 44 36 10 160 all types 120 100 30 50 22 M33 x 2 34 5 5 x 50AW 45 10 K C F B A H 0 0.2 Y-type knuckle Material: Carbon steel d (H8) M A B C D G L F E K J H N Applicable cylinder type Bore size (mm) Spring pin P Order no.

Profile Design ISO/VDMA Air Cylinder Series CP95

6.6 10 142 40 55 16 40 4.3 38 4 12 48 5 5.5 25 10 35 11 6.6 12 160 50 65 21 45 4.3 46.5 4 14 54 5 6.5 27 10 40 15 9 16 170 63 75 21 51 4.3 56.5 4 14 60 5 6.5 32 12 45 15 9 16 190 80 95 25 65 4.3 72 4 16 75 5 10 36 16 45 18 11 20 210 100 115 25 75 6.3 89 4 16 85 5 10 41 16 55 18 11 20 230 Mounting type ES Piston rod ball joint to DIN 648K Bore d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32

Air Cylinder Series MB

(n4) 2 (n4) 2 (n4) 2 (n4) 2 110 + 45 (n4) 2 (n4) 2 100 + 45 90 + 45 n = 4,8,12,16... n 85 + 45 115 + 45 n = 4,8,12,16... n = 4,8,12,16... n = 4,8,12,16... n = 4,8,12,16... n = 4,8,12,16... 140 2 (different side or same side) 1 150 120 130 D-P5DWL 140 + 65 n = 4,8,12,16...

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

CJ216 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 Air cushion is not available for 21-/22-.

0.4

Formula: L1 = 10.5n + 45, L2 = 10.5n + 167.5 (For one input block.

REC

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com stroke (mm) RHC 20 20 150 Up to 700 45 25 150 Up to 700 25 45 MK(2) 1500 32 150 Up to 1000 32 50 RS Q G 40 200 Up to 1000 40 60 Note 1) The cylinder performance may not as expected when stroke is shorter than recommended stroke even they are available