TABLE OF CONTENTS

ORIFICE SIZE Gas Liquid Inlet Exhaust AC DC AC DC Model ELW51 2 Way Normally Open ELW51G8XCCP ELW51H8XCCP (G or L) ELW51J8XCCP (G or L) ELW51V8XCCP (G or L) ELW51K8XCCP (G or L) 300 270 135 70 55 200 120 50 35 30 300 120 40 30 25 200 65 30 20 15 G 132 DE-ENERGIZED ENERGIZED H 364 J 116 V 564 K 332 600 250 150 100 85 50 15 200 80 50 25 20 600 250 150 100 85 50 15 200 80 50 25 20 Model ELW52

C95Series

d80 . %100 0 . 3 ~ "32 0. 1 8 "SO 0.58 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, SOD, 600 Allowable rotating torque "40 0.33 " 100 0.69 . ft Ibs max . . : 63 25,50,75,1 00,125,1 50 ,175,200, %50,.063 0.47 250, 300.350,400,450,500, 600 sr 25, so, 75. 100, 125. 150, 175 ,200,250, 300,350, 400, 450, 500, 600, 700 Nole 1) AbsOfbabte kinshc energy by cushIOn mechanIsm IS

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

. + + H: Lead wire length 600 mm D: Push-turn locking slotted type LN: Without lead wire LO: Without connector MO: Without connector W: With connector cable Note 1) + -+ LN, MN type: With 2 sockets. Refer to page 642 for the lead wire length of L and M plug connectors. Refer to page 645 for the connector assembly with cover for L and M plug connectors.

Series AP500

800 100012001400 160018002000 Flow rate (slpm, N2) 0.75 (19) AP9030 600 psig (4.1 MPa) Inlet pressure: 300 2.1 250 1.7 Max. 11.2 (284.5) Delivery pressure (MPa) Delivery pressure (psig) 200 1.4 4.00 (101.6) 150 1.0 5.38 (136.7) 100 0.7 HP LP 50 0.3 0 0.0 1.13 (28.7) 0 200 400 600 800 100012001400 160018002000 Flow rate (slpm, N2) 3.5 (88.9) AP9110 150 psig (1.0 MPa) Inlet pressure: 75 psig

HRX-OM-S004

Monitoring start timer -06 0 to 600 minutes Range over detection timer 5 5 to 999 seconds AL05 High circulating return temp.

VFR

400 300 200 100 0 VF B VFR VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 800 700 600 500 400 300 200 100 0 VZS C VFS VS4 800 700 600 500 400 300 200 100 0 VQ7 D EVS VFN 800 700 600 500 400 300 200 100 0 E It is when the cylinder is extending that is meter-out

Compact Electric Actuator Series LG1

rigidity, high linear precision guide, with reduced height and space saving design Compact Electric Actuator Series LG1 LG1 LG1 Compact electric actuator use precision guide, with reduced h Compact size & reduced weight Height reduced by nearly 39% Compared with SMC products (LJ Series) Length reduced by 62mm Compared with SMC products (LJ Series) With stroke of 300mm LJ1H20 LG1H20 LG1H20 600

C95

, 125, 160, 200, 250, 320, 400, 500, 600 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 Intermediate strokes are available.

HRX-OM-M090

[] 60Hz 50Hz Fig 9.5-1 Heating capacity(HRS012--10, HRS018--10) 9.5.2 HRS012--20,HRS018--20, HRS024--20 1000 1000 Ambient Ambient temperature temperature 800 800 5 20 25 5 Heating capacity [W] 20 25 32 40 [W] 600 600 32 40 400 400 200 200 0 0 5 15 25 35 45 5 15 25 35 45 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9.5-2 Heating capacity(HRS012--20, HRS018

HRX-OM-R016

Fig. 9-4 Cooling capacity(HRS030--20-(BJMT)) 9.5 Heating capacity 9.5.1 HRS030-A-20-(BJMT) 1000 1000 Ambient Ambient temperatur temperatur 800 e e Heating capacityW 800 Heating capacityW 40 32 25 20 5 40 32 25 20 5 600 600 400 400 200 200 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature Circulating fluid temperature 50Hz 60Hz Fig. 9-5 Heating capacity(HRS030

HRX-OM-W038

Status (6): Alarm will be generated after 600 seconds that is set for "AS.23: Range over detection timer" after the circulating fluid temperature exceeds the threshold of "AS.04".

HRX-OM-Q026

Status (3): The circulating fluid temperature exceeds the threshold of "AS.06", but the alarm will not be generated as it has returned within the 600 sec range of the "AS.23: Range over detecting timer".

HRX-OM-X084

Start time of circulating fluid temperature monitor 600 0 to 9 TEMPOUTSTART SEC No.24 circulating fluid temperature monitor is outside of the time range 5 0 to 600 TEMPOUTOVER SEC screen No.25 screen Dust filter replacement time*2 5000 1 to 9 FLTRTIME H No.26 screen DI filter replacement time*1 5000 1 to 9 DITIME H No.27 screen Temperature control speed 0 -10 to 10 CTRLSPEED piping). 2 Can

HRX-OM-W032

Status (3): The circulating fluid temperature exceeds the threshold of "AS.06", but the alarm will not be generated as it has returned within the 600 sec range of the "AS.23: Range over detecting timer".

LEKF-OMZ0035

Slider type LEKFS series 2.1 Specification AC servo motorMotor typeS*/T*) Model LEKFS25 LEKFS32 LEKFS40 Stroke [mm] 100 to 500 100 to 500 200 to 600 Horizontal 10 20 20 30 40 45 30 50 60 Work load [kg] Note1) Vertical 4 8 15 5 10 20 7 15 30 Up to 400 1500 900 450 1500 1000 500 1500 1000 500 401 to 500 1200 720 360 1500 1000 500 1500 1000 500 501 to 600 900 540 270 1200 1000 500 1500 1000

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

600 600 15 30 76 38 103 9.0 144 3.2 27 13 31 188 9.0 35 19 183 195 127 154 45 50 70 30 12 22 74 12 80 76 18 95 160 1000 (1001 to 1200) 101 (105) 15 (23) 105 (140) 59 (64) 130 (170) 43 (48) 170 (179) 0.032 0.059 63 1200 600 600 600 18 11.5 11.5 110 40 92 49 107 166 3.2 34 16 24 206 40 23 196 212 148 162 50 59 86 40 16 28 90 16 93 92 25 171 1000 (1001 to 1400) 119 (124) 18 (28) 130 (164) 76

Cylinder with Lock Series MNB

magnet With rod boot Spring lock Grommet Grommet Mounting 3 wire 3 wire 2 wire D-F59 D-F59W D-J59W D-F5P D-F5PW D-F5BAL (2 color indicator) (2 color indicator) 2 wire 4 wire 3 wire D-J59 D-F59F D-F5NTL D-F5LF (2 color indicator) D-A53 D-A54 D-A56 D-A64 D-A67 D-A59W (2 color indicator) Single rod Series MNB 40 50 63 80 100 25 to 500 Cylinder with Lock Series MNB Tie-rod mounting type 25 to 600

Uniaxial Electric Actuator Series LJ1

600 600 L2 M2 400 400 400 L2 mm L2 mm L2 mm Rolling Yawing W 200 200 200 L2 M2 0 10 20 30 0 20 40 60 0 2 4 6 8 10 Work load (W) kg Work load (W) kg Work load (W) kg W 3000 2000 2000 a=1000 a=1000 a=1000 2000 L3 mm L3 mm L3 mm L3 1000 1000 1000 a=2000 a=2000 W a=2000 a=3000 a=3000 a=3000 M3 a 0 20 40 60 0 2 4 6 8 10 0 10 20 30 Work load (W) kg Work load (W) kg Work load (W) kg 600 600 600

Guide Cylinder Series MGG

, 1000 200, 250, 300 63 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100 MGGL Ball bushing 80 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200 100 350, 400, 450, 500, 600, 700, 800, 900, 1000, 1100, 1200, 1300 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

18.5 13.5 13.5 9 9 50.4 40.7 [42] 111.6 92.4 [95] [ ] for AC Other dimensions are the same as the grommet type. [ ] for AC Other dimensions are the same as the grommet type. 25 Series SYJ3000 Valve Drawings 2 Position Single (mm) 10 10 G H Grommet (G), (H) : SYJ3140-M5 5 10 33.5 Manual override 22 4 23.2 (Mounting holes) B A 11 2.5 17.5 A B 53.6(GZ:54.6) [54.6] G : About 300 H : About 600