High Vacuum Angle Valve

For details about quantity and type, refer to Maintenance Parts in the Specific Product Precautions 4 on page 24.

REC

Stroke Against Lateral Load D RS H A 17 24 27 29 0.7 W W W 500 82 103 116 127 0.3 RZQ Bushing (Bearing) fR U 62 79 89 97 0.5 Lateral load applied to rod end (fR) N 100 MI W S 52 66 75 81 0.7 50 CEP1 33 43 49 53 0.3 23 31 36 39 T 0.5 10 CE1 5 18 25 29 31 0.7 REC40 REC32 REC25 REC20 CE2 Rod side flange style: F Head side flange style: G 182 167 148 118 0.3 Foot style : L 1 L ML2B 140 128 114

4/5 Port Air Operated Valve Series SYJA3000

For mounting) A B 1 11 1 5 A B 1 24 A B 1 2-2.6 10 R P (For manifold mounting) 19 4 2 37.5 47 42 15 54 54 Manual override 24.5 23 20 11.5 3 2-2.6 (For mounting) 11 Manual override 2-1.8 (Bleed port) 46.5 1/8 33.5 M5 x 0.8 (Piping port) (Piping port) With fiflter (80 mesh) 21.5 R1 P 8.5 6 6 2-1.8 (Bleed port) 17 17 15 R2 21 With fiflter (80 mesh) 24 32 45.5 3 position closed center/exhaust

Air Pilot Operated Series NVSA

No base (lncludes subplate gasket and hold dolvn bolts,) ,{vsA 4 0 24 0l = Mounted on Indlvidual SubDlate 1/4" NPTF Side Ports (5) 51 = Mounted on lndlvldual Subplate 1/4" NPIF Slde Pons (5);10-32 Pllot Ports (4) 02 = Mounted on Indivldual Subplate 3/8" NPTF Side Pons (5) 52 = Mounted on Individual Subplate 38' NPTF Side Ports (5); '10-32 Pilot Ports (4) 03 = Mounted on Indlvidual Subplate

2/3 Port Valve

L 108 117 130 135 N 93 102 N 79.5 87.5 1 4 3 8 , 50 63 80 90 35 35 40 40 52 60 68 73 25.5 33 41 44 11 14 18 21 6 7 7 7 89 97 112 117 25 25 28 28 67 75 87 92 40 52 65 70 7.5 8.5 9 9 22 28 36 42 5.5 6.5 6.5 6.5 24 33 42 47 1.6 2.3 2.6 2.6 26 30 38 43 14 17 22 22 23 23 25.5 25.5 28 35 43 45 1 2 3 4 1 101.5 115.5 106.5 120.5 4.1-82 VXZ22/23 Conduit: C FN.C.E Normally closed EN.O.F Normally open

Slider Type Ball Screw Drive/11-LEFS Series

VDC) Servo motor (24 VDC) Step motor (Servo/24 VDC) Max. number of step data 64 points 14 points Power supply voltage 24 VDC Reference page Page 560 Page 560 Page 600 Page 576 Page 590 515 11-LEFS Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication Specifications Step Motor (Servo/24 VDC) Model 11-LEFS16 11-LEFS25 11-LEFS32 11-LEFS40 Stroke [mm] Note 1) 50 to 500

CE2

20 10 17 9 32 80.5 70 46 24 28.5 162.5 11 M8 x 1.25 25 to 800 25 to 650 60 35 15 18 10 67 40 26 27 23 64 20 13 17 9 32 98.5 85 48.5 24 28.5 174 11 M10 x 1.25 13.5 25 to 750 25 to 600 70 40 17 23 14 72 52 30 32 23 78 25 15 21 11 37 117.5 102 55 26.5 36 189 13 M12 x 1.75 16.5 25 to 750 25 to 600 80 40 19 25 14 76 52 31 41 25 92 30 15 21 11 37 131.5 116 56.5 35.5 36 198 16 M12 x 1.75 16.5 Without

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

For details about auto switches with pre-wire connector, refer to page 8-30-52. 8-29-24 25 Dual Rod Cylinder: Double Rod Type Series CXSW Specifications 6 10 15 20 25 32 Bore size (mm) Air (Non-lube) Fluid 1.05 MPa Proof pressure 0.7 MPa Maximum operating pressure 0.15 MPa 0.1 MPa Minimum operating pressure 10 to 60C (No freezing) Ambient and fluid temperature 50 to 500 mm/s Piston speed

Ionizer

NPN output Ionizer Brown: DC1 (+) Blue: DC1 () +24 V: Ionizer driving power supply 0 V: 24 VDC 10% FG Input/Output signal circuit Red: DC2 (+) Black: DC2 () +24 V: Input/Output signal power supply 0 V: 24 VDC 10% +24 V PLC OUTPUT INPUT +24 V Light green: IN1 Isolation circuit (Photocoupler) or +24 V Internal circuit Gray: IN2 Isolation circuit (Photocoupler) or INPUT OUTPUT Pink: OUT1 Isolation

SYJ300/500/700

D: Push-turn locking slotted type E: Push-turn locking lever type (With gasket and screws) Body option Nil: Individual pilot exhaust type Electrical entry Grommet L plug connector 24, 12, 6, 5, 3 VDC/100, 110, 200, 220 VAC 24, 12 VDC/ 100, 110, 200, 220 VAC 24, 12, 6, 5, 3 VDC M plug connector DIN terminal M8 connector R port P, E port M: Common exhaust for the pilot and main valve MN: Without

REC

31 36 39 0.7 11 17 19 21 0.3 ML2B 7 11 13 13 G 0.5 ML1C 1 10 50 100 200 300400 Max. speed u (mm/s) (Initial cushioning speed) 4 7 9 9 0.7 500 REA Front trunnion: U Rear trunnion: T 32 42 48 52 0.3 Clevis: C, D C 22 30 35 37 0.5 REC Graph w Applicable max. stroke against lateral load* D 17 24 27 29 0.7 RHC W W W 500 82 103 116 127 0.3 Bushing (Bearing) MTS fR 62 79 89 97 U 0.5 Lateral load

Rotary Table/

Auto Switch Internal Circuits Auto Switch Weights Unit: g D-F8N D-F8N D-F8P D-F8B Model DC (+) Brown 0.5 7 7 7 Lead wire length (m) 3 32 32 32 Main switch circuit Main switch circuit Main switch circuit OUT Black 5 52 52 52 DC () Blue Auto Switch Dimensions D-F8N, D-F8P, D-F8B D-F8P Mounting thread M2.5 x 4l Slotted set screw DC (+) Brown 4.3 Indicator light 2 2.7 OUT Black 10 2.8 4.6 DC

RQ

31 24 55 24 31 64 72 22 32 79 Knuckle pin and snap ring are included.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

DC Dimensions page 24 (manifold) 18 19 Low Power Consumption Type Series VX21/22/23 For Water, Air Solenoid Coil Electricity Specifications Electric Circuit Diagram Power saving circuit Applied voltage 24 V With power saving circuit (There is the polarity.

V

83.1 75.6 81.1 73.6 52.8 45.3 30.7 26.7 19 21 39 ASV410F-01-10S 10 R(PT)1/8 12 23.3 18.5 24 85.2 77.7 83.2 75.7 52.8 45.3 30.7 26.7 21 23 41 T H R E A D ASV410F-02-08S 8 R(PT)1/4 14 19.3 15.2 24 83.1 75.6 81.1 73.6 52.8 45.3 34.7 28.7 19 21 47 ASV410F-02-10S 10 R(PT)1/4 14 23.3 18.5 24 85.2 77.7 83.2 75.7 52.8 45.3 34.7 28.7 21 23 49 PT* Remove (N) when ordering N NPT ASV410F-03-08S 8 R(

MK

D-A7lH, A80H D-A73C, A80C D-F7l, J79 D-F7lV, J79C D-A79W D-F9l D-F9lV D-F9lWV D-F9lW D-F9BAL D-P5DW D-A9l D-A9lV D-A7, A8 Model B 6.5 7 6 8.5 11.5 14.5 A 28.5 29 33 24 28.5 28.5 B 7 7.5 6.5 9 12 15 B 4 4.5 3.5 6 9 12 B 11 11.5 10.5 13 16 19 B 4.5 7.5 10.5 B 5 7.5 10.5 13.5 B 9 11.5 14.5 17.5 A 34.5 25.5 30 30 B 8 10.5 13.5 16.5 A 19.5 24 24 A 28 28.5 32.5 23.5 28 28 A 25.5 26 30 21

VCW

(mm) Electrical entry P Port size A B C D E F H K L M N Model Grommet: G Conduit: C DIN terminal: D Conduit terminal: T Q R Q R Q R S Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 45 44 43 58 40.5 46.5 99 43 66 83 1/8 VCW21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 46 44 44 58 41.5 46.5 99 44 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 56.5 46 54.5 60 52 48.5 101 54.5 68 99 1/4

2–4

Wiring type 2-wire Output type Applicable load 24 VDC relay, PLC Power supply voltage Current consumption Load voltage 24 VDC (10 to 28 VDC) Load current 5 to 30 mA Internal voltage drop 5 V or less Leakage current 1 mA or less at 24 VDC Caution Actuated position . Red LED lights up Optimum operating position .

HRX-OM-M090

PV SV 52. Select contact output signal 2 function from the table below with [] key or [] key, and confirm by pressing SEL.

CLK1

24 24 C7 C7 Press-fit spring pin 13 Press-fit spring pin 3 x 22l 3 x 22l 13 30 +0.3 0 26 41.2 26 12 18 48 36 36 48 CL1K32-17-R5004 CL1K32-18-R5004 For 40, 50, 63 For 40, 50, 63 +0.027 0 Shaft: 12d9 0.050 0.093 12H8 19 Press-fit spring pin 3 x 38l 19 Hole: 12H8 +0.027 0 Press-fit spring pin 3 x 38l 17 30 30 17 20 20 2-M6 thread depth 11 2-M6 thread depth 11 15 15 35 18 15 2-M6 thread depth