"0" [---] 0 30ms GND <> [F 7] [inP] [F 7] [F 1][F 2] -32No.PF-OMJ0005CN-I <> PFM710n_11.6H_10.4() ON/OFFONn_1 OFF(n_1)(H_1) 1.2.6 L/min 0.2 L/min 2.1.8 L/min 0.4 L/min 3.3.2 L/min 1.8 L/min ON 1.6 OFF 1.6+0.4=2.0 OFF ON PFM710n_1-1.0H_10.4() ON/OFFON()(n_1) OFF ()(n_1)(H_1) 3.3.2 L/min 1.8 L/min 1.2.6 L/min 0.2 L/min 2.1.8 L/min 0.4 L/min ( 30ms GND 2.6 ON 2.6+(-1.0)=1.6 OFF 2.6
plug connector (L): SYJ5120-L-M5(-F) M plug connector (M): SYJ5120-M-M5(-F) DIN terminal (D): SYJ5120-D-M5(-F) M8 connector (W0): SYJ5120-W0-M5(-F) Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 82.1 Max. 10 60.9 28.1 [35.1] 53.4 12.7 42.1 32.6 M8 x 1 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 73 [75.2] (2.3) 63.2 [65.4] 83 72.1 3 58.2 3 64.7 3 3 42.2 19.5 19.5 19.5
port size 1/8 1/4 01 02 Specifications Model Measured fluids Detection type Flow rate measurement and setting range Minimum setting unit PFA710-m-m PFA750-m-m Dry air, N2 Heater type 1 to 10l/min (0.04 to 0.35SCFM) 0.1l/min (0.004SCFM) 5 to 50l/min (0.18 to 1.77SCFM) 0.5l/min (0.02SCFM) l/min, CFM x 10-2 Instantaneous flow rate Cumulative flow rate Display units l, ft3 x 10-1 0 to 0.5MPa
(for F, L, S & T1 kits) VVQ5000 3A 1 VVQ5000 2A 1 Electrical entry Electrical entry T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) T1, F, L, T, S kits F kit (connector side) C kit (plug lead type) L F Note1) L F Note1) C C Option Option Nil W Note 2) Standard IP65 enclosure Exhaust cleaner mounting Rc1 Exhaust cleaner mounting Rc1 1/2 Direct exhaust with silencer box Standard
920 1700 Flow rate (l/min (ANR)) Effective area (mm2) 1.6 3.5 7 14 26 Note 1) Flow rate values are measured at 0.5 MPa and 20C.
Valve model Port size VCS21 VCS20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCS30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCS31 VCS30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCS30-12-04 VCS41 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCS Direct Operated
34.7 [41.7] M5 x 0.8 (A, B port) 2-1.8 (For monifold mounting) (Light/surge voltage suppressor) 28 [35] + 22.1 54.4 [56.6] 2 13.5 12.6 15 R P R (Bracket) 15 11 10 1.2 (PE port) 22.1 7 7 15 M5 x 0.8 (P, R port) L plug connector (L) : SYJ3120-L-M3 (-F) M plug connector (M): SYJ3120-M-M3 (-F) M8 connector (W0): SYJ3120-W0-M3 (-F) (2) Approx. 300 (Lead wire length) 28 [35] 12.6 32.5 M8 x 1 15
override 34.7 [41.7] M5 x 0.8 (A, B port) 2-1.8 (For manifold mounting) (Light/Surge voltage suppressor) 28 [35] + 22.1 54.4 [56.6] 2 13.5 12.6 15 R P R (Bracket) 15 11 10 1.2 (PE port) 22.1 7 7 15 M5 x 0.8 (P, R port) M8 connector (WO): SYJ3120-WO-M3 (-F) L plug connector (L) : SYJ3120-L-M3 (-F) M plug connector (M): SYJ3120-M-M3 (-F) (2) Approx. 300 (Lead wire length) 28 [35] 12.6 32.5
D-F7NWV l-ffis". l 1 1 I l R d t l a / f l lEljJl l,." i w,,te I I i. +-| I T f I i L t > . O L4J==L=!1" Black D-F79F D-F7LF D-F7NTL o oiagnoslic ouipui OUT 2 o Series NCDQT Auta-Switch / Operating Range D-A72.
D-F7NWV l-ffis". l 1 1 I l R d t l a / f l lEljJl l,." i w,,te I I i. +-| I T f I i L t > . O L4J==L=!1" Black D-F79F D-F7LF D-F7NTL oiagnoslic ouipui OUT 2 o o Series NCDQT Auta-Switch / Operating Range D-A72.
Note 3) Refer to page 6 for DIN rail weight. 1 Cassette Type Manifold Series SY3000/5000/7000 How to Order Valves SY 3 1 60 5 L C6 Series 3 5 7 Symbol M5 C4 C6 01 C4 C6 C8 02 C8 C10 SY3000 SY5000 SY7000 A, B port size Port size M5 x 0.8 4 One-touch fitting 6 One-touch fitting Rc(PT)1/8 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting Rc(PT)1/4 8 One-touch fitting 10 One-touch
mountable number 3 port valve mountable number 00 02 04 00 02 04 No 2 port valves used 2 pcs.
L-bracket Description ITV20ll ITV30ll Flat bracket 100 P3020114 25 15 L-bracket INI-398-0-6 7 R3.5 (10) 30 2.3 40 52 (7) 36 50 50 36 7 m36 84 4-5.5 4-7 36 7 70 60 20 12 4-5.5 1.6 1.12-2 Electro-Pneumatic Regulator Series ITV2000/3000 Working Principles When the input signal rises, the air supply solenoid valve (1) turns ON, and the exhaust solenoid valve (2) turns OFF.
Valve model Port size VCS21 VCS20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCS30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCS31 VCS30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCS30-12-04 VCS41 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCS Direct Operated
10 12 12 12 12 12 16 7 7 7 9 6.5 5.5 5.5 +0.058 0 +0.070 0 +0.070 0 M4 6.5 10 10 5.5 9 9 5.5 7 10 M5 AD-CHN-40 M5 Y-shaped double knuckle joint Bracket pin 20: Y-02 25: Y-03 32: Y-04C 40: YHN-04 Material: Carbon steel Material: Rolled steel plate Material: Cast iron RR1 2-D drill through RR1 C1 Chamfer Cf7 NDH10 NDH10 MM C1 Chamfer E1 E1 B NZ NZ NX A NX U1 A1 A1 U1 L1 L1 Part no.
Y: 4.5 to 7 D: 6 to 8 VT VP 50 37.5 2(A) 2(A) 11 VG (A port) Rc 1/4 VP Stations L L1 L2 Formula 2 83.5 68.5 3 111 96 5 166 151 7 221 206 9 276 261 4 6 8 10 : With light/surge voltage suppressor ( ): Dimensions for external pilot L1 = 27.5 x n + 28.5 138.5 193.5 248.5 303.5 S070 L2 = 27.5 x n + 13.5 123.5 178.5 233.5 288.5 Individual exhaust: VV3P3-42Stations 3-02 VQ (R port) Rc 1/4 VKF 18.5
connectors, so switching from the F kit (D-sub connector) to the S kit (serial transmission) can be done simply by changing the kit section. 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 6 7 8 9 10 (Refer to the connector wiring diagram.)
Description Side cover Bearing retainer Bumper End cover A End cover B Inner cover Motor cover R Motor cover L Auto switch Magnet Brake Material Note 100W Ball screw/Slide screw 1 2 3 4 5 6 7 8 9 10 11 No.
36 44 M4 10 10 13 13 10 10 12 12 12 12 12 16 7 7 7 9 6.5 5.5 5.5 +0.058 0 +0.070 0 +0.070 0 M4 6.5 10 10 5.5 9 9 5.5 7 10 M5 M5 Y-type double knuckle joint Bracket pin Material: Carbon steel 20: Y-02 25: Y-03 Material: Rolled steel 32: Y-04A 40: Y-04B Material: Cast iron 2-D drill through RR1 C1 Chamfer RR1 C NDH10 NDH10 MM C1 Chamfer A B E1 E1 NX NZ NZ NX U1 A1 A1 U1 L1 L1 Part no.
min 7/7 For option -T-MT :7/10 Tank capacity L Approx. 5 Port size Rc1/2 Stainless steel, Copper brazing (Heat exchanger)15, Bronze15 Brass15, SIC,Aluminum oxide ceramic, Carbon, PP, PE, POM, FKM, Wetted material EPDM, PVC Temperature range oC 5 to 40 5 to 40 outlet system Facility water Pressure range MPa 0.3 to 0.5 0.3 to 0.5 Required flow13 L/min 8 12 1 Facility water pressure differential