CV/MVGQ

If a cover is rotated when installing a cylinder or screwing a fitting into the port, it is likely to damage the junction part with cover. 75 + 55 (n 2) 20 + 50 ( n 2) (n = 2, 4, 6) 20 75 2 D-B59W 15 Caution Weight (kg) 1.

Aluminum High Vacuum Angle Valve

V M A C U U M type plug connector (AC power supply) not attached for M of sizes 16 and 25.

Air Cylinder

CS1 CS2 Direct Mount Type (CG1R, CG1KR) (mm) D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-H7lW D-H7NF D-H7BA D-H7l D-H7C Auto switch model D-C7l D-C80 D-C73C D-C80C D-G59F D-G5NT D-B5l D-B64 D-B59W D-A9l D-A9lV Bore size A B A B A B A B A B A B A B 20 12 24 8 20 7.5 19.5 8.5 20.5 4 16 2.5 14.5 5.5 17.5 25 11.5 24.5 7.5 20.5 7 20 8 21 3.5 16.5 2 15 5 18 32 13 25 9 21 8.5 20.5 9.5 21.5 5 17

Floating Joint

nominal thread size 40-150 M40 x 1.5 45-150 M45 x 1.5 Basic Type: JA JA180 200--X530 Center of sphere M M U U D Width across flats F 60 B E H G P A R Dimensions (mm) DMaximum operating tensile and compressive force (N) Center of sphere R Maximum screw-in depth P Allowable eccentricity U Applicable bore size Model M A B D E F G H Weight (kg) Nominal size Pitch -X 180 JA180-40-150-X530 40

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

B C PF2M701/02/05 /10/50/11/21(-L) PF2M725(-L) Voltage output (1 to 5 V) 1 V 1.04 V 1.05 V 5 V Current output (4 to 20 mA) 4 mA 4.16 mA 4.19 mA 20 mA *1 The analog output current from the connected equipment should be 20 A or less when selecting 0 to 10 V.

Vacuum

Thread dia. 6 8 10113 10 a o a a M4 x 0.7 16 a a o a o o a M5 x 0.8 20 o a a a o a M6 x 1.0 25 a a o o o MB x 1.25 32 o o a o o M'l0 x 1 .25 zcDuKc T.

Vacuum

Thread dia. 6 8 10113 10 a o a a M4 x 0.7 16 a a o a o o a M5 x 0.8 20 o a a a o a M6 x 1.0 25 a a o o o MB x 1.25 32 o o a o o M'l0 x 1 .25 zcDuKc T.

MY1

) 11 7.5 MY1C (Cam follower guide type) B A (mm) 16 20 Mounting position A 70 90 B 90 110 Operating range l Note) 11 7.5 MY1H (High precision guide type) B A (mm) 10 16 20 Mounting position A 27 35 20 B 133 165 90 Operating range l Note) 6.5 8.5 11 8-11-102 98 Auto Switch Series MY1 Proper Auto Switch Mounting Position (Detection at stroke end) D-Z7, D-Z80 Note) The operating range is a guide

2 Phase Stepper Motor/Without Motor Brake Series LXS

36: T-slot pitch U N x P 20 5 N C (5.1) 10 5.8 4 5.5 36 10.5 6.5 10.2 6.5 1 3 39 28 3.3 T-slot A Body mounting reference plane +0.030 0 depth 4 C +0.030 0 depth 4 L-M6 4H9 Work piece mounting reference plane 6.5 Refer to Cross section C-C.

VQC

A Station 1 1 SOL. A Station 2 14 SOL. A Station 3 2 1 SOL. A Station 4 14 15 2 SOL. A 15 3 3 4 5 6 7 8 Station 5 16 17 18 19 20 SOL. B 16 SOL. A 4 Station 6 SOL. B 17 SOL.

MGG

7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 A' For ball bushing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.

CRB2/CRBU2/CRB1

15, 20, 30, 40 XC3 XC4 XC5 XC6 XC7 A combination of up to two XAs are available.

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

3 -X 20#1 Data Slide bearing Long stroke View A-A @9 Component Parts Material Material Note Note No. Description No.

Air Cylinder NCA1 Series

Stainless steel w/ composite tube Item No from CHART 1 to reference Par t required M O U N T I N G S T Y L E H O W T O O R D E R S E R I E S NCA1 S E A L K I T NCA1PS B O R E S I Z E R O D T H R E A D R O D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 8 100010 120012 140014 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8

SYJ300/500/700

1) (Station n) 48.5 [55.5] + + + + + 48.5 [55.5] 33.1 + + + + + 20 A A 33.1 20 5.1 (Pitch) P=10.5 18.5 One-touch fitting (A port) Applicable tubing O.D.: 4, 5/32" A A 5.1 (Pitch) P=10.5 18.5 M5 x 0.8 (A port) Station n L1 L2 3 58 50 Station 20 236.5 228.5 6 89.5 81.5 8 110.5 102.5 10 131.5 123.5 Station 2 47.5 39.5 4 68.5 60.5 5 79 71 7 100 92 9 121 113 11 142 134 12 152.5 144.5 13 163 155

NCA1

Stainless steel w/ composite tube Item No from CHART 1 to reference Par t required M O U N T I N G S T Y L E H O W T O O R D E R S E R I E S NCA1 S E A L K I T NCA1PS B O R E S I Z E R O D T H R E A D R O D S T R O K E 150 1.5 200 2 250 2.5 325 3.25 400 4 500 5 600 6 800 8 100010 120012 140014 7/16-20 7/16-20 7/16-20 3/4-16 3/4-16 3/4-16 1-14 1-14 1 1/4-12 1 1/2-12 1 7/8-12 5/8 5/8 5/8

Table of Contents

Mep a = 1000 2000 L1 (mm) Pitching m : Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) a = 2000 m 1000 L1 a = 3000 0 10 20 30 Transfer load m (kg) 600 L2 400 L2 (mm) L3 (mm) Mer m Rolling Yawing 200 L2 0 10 20 30 Mer m Transfer load m (kg) 2000 a = 1000 L3 1000 a = 2000 m a = 3000 Mey a 0 10 20 30 Transfer load m (

Environment

PB H thread depth C Vent hole Note 3) J PC EV Z T M U D K Note 2) L R 4 x O1 thread depth R W A + Stroke B + Stroke S EH M 6 x MO thread depth MR XA H9 depth XA MH Section XX details MA ML + Stroke MC MD Section XX XB XA H9 XA [mm] Incremental encoder Absolute encoder B C D EH EV Without lock With lock Without lock With lock A W Z A W Z A W Z A W Z Size Stroke range [mm] 25 15 to 100 238

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

8 @2 @0 @3 @5 @8 @7 o u !7 t CY3R15/20 CY3R15 Component Parts No. Description No.

MGP

: m (kg) 30 16 20 10 When selecting a model with a longer l dimension, be sure to choose a bore size which is sufficiently large. 4 5 3 Caution 2 Handling precautions Note 1) When using as a stopper, select a model with a stroke of 25mm or less. 1 5 10 20 30 40 50 Note 2) Model MGPL (ball bushing) cannot be used as a stopper.