MB

valve Bore size (mm) Stroke range Z ZZ CDH10 CX +0.3 +0.1 CZ CDH10 L RR U 2032 40 50 63 80 100 14 14 20 20 30 30 10 10 14 14 22 22 28 28 40 40 60 60 125 50 28 30 25 32 267 295 64 to 500 to 500 to 600 to 600 to 800 to 800 23 23 30 30 42 42 10.5 11 15 15 23 23 13 13 17 17 26 26 154 158 182 182 228 228 164.5 169 197 197 251 251 Data U CX to 1000 L CZ Z + Stroke RR Without Air Cushion Center

Compact Hydraulic Cylinder

64.5 74.5 U 28 35 38.5 44.5 51 61 71 U 31 38 41.5 47.5 54 64 74 U 27 34 37.5 43.5 50 60 70 20 32 40 50 63 80 100 257 CHQB/CHQWB Series Minimum Auto Switch Mounting Stroke (mm) D-A9 D-A9V D-A7 D-A80 D-A7H D-A80H D-A73C D-A80C D-M9WV D-M9AV D-F7W D-F7WV D-J79W D-F7BAV D-M9W D-M9A D-F7BAL D-F7NT D-F79F D-M9 D-M9V D-F7V D-J79C Auto switch mounting number D-F7 D-J79 D-A79W 1 pc. 5 5 10(5) 10

240

How to Order LEPS 10 K 50 1 1 R 6N q w e r t y u i o !

VM

I 10 I G H F E X H .

High Vacuum Angle Valve

Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

(-Q) 10-SS3YJ3-42(-Q) 10-SS3YJ3-S42(-Q) Applicable base Sub-plate 10-SS3YJ3-41(-Q) 10-SS3YJ3-S41(-Q) 10-SS3YJ3-42(-Q) 10-SS3YJ3-S42(-Q) Applicable base 10-SS3YJ3-20(-Q) Manifold base Manifold base Manifold base Note) Add suffix -Q for the CE-compliant product.

Compact Type

Bore size/Stroke (mm) Bore size 6 10 15 20 25 32 Standard strokes 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switches/Refer to page 15 for detailed auto switch specifications.

MB1

Compact and light weight The height and width of the covers has been reduced by nearly 10%, and in an addition, die casting of the covers has reduced the weight by 10 to 25% compared to the CA1 series. Improved mounting accuracy High precision has been achieved in the cylinder unit and the mounting brackets.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

side U side U side D side U side D side 107.8 106 Station Nos.

I

ZS-22-A H O W T O O R D E R P O S I T I V E P R E S S U R E S W I T C H S E R I E S ISE4 H O W T O O R D E R V A C U U M P R E S S U R E S W I T C H S E R I E S ZSE4 PANEL MOUNTING KIT ZS-22-A ZSE4B ISE4 B O P E R AT I N G P R E S S U R E O P T I O N S -0.1 ~ 1MPa L -10 ~ 100KPa Non-Backlit (Standard) B Backlit LCD O P T I O N S P I P I N G S P E C I F I C AT I O N S Non-Backlit (Standard

CHKD/CHKG

11 depth 6.5 63 1/4 19.5 10 40 65 55 10 22.4 19 M16 x 2 20 7 52 9 14 depth 8.6 71 1/4 20.5 10 50 71 60 11 28 24 M20 x 2.5 24 8 58 11 17.5 depth 10.8 81 1/4 22 10 63 80 67 13 35.5 30 M27 x 3 33 9 69 13 20 depth 13 97 1/4 25.5 10 80 95 78 17 45 41 M30 x 3.5 36 14 86 15 23 depth 15.2 117 3/8 30 15 100 122 96 26 56 50 M39 x 4 45 21 106 17 26 depth 17.5 142 3/8 36 15 Note 1) Body dimensions are

Basic Type/Direct Mount Type

0 i q o u y !7 r !9 w !4 CY3B10, 15 !4 !8 !7 !6 !5 !0 i o q u y t r !2 w !1 The above drawing is 15. (3 magnets are used in 10.) CY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 CY3B50, 63 !4 !8 !6 !5 !0 !7 i o q u y t !3 r !2 w !1 Component Parts Replacement Parts/Seal Kit Bore size (mm) 6 10 15 20 25 32 40 50 63 Kit no.

CG5-S

(mm) Applicable fitting size 6 8 10 4 8 10 12 10 12 12 16 16 KGE10-02 R 1/4 Model 10 -03 R 3/8 KGR04-06 KGE12-03 R 3/8 12 4 -08 -04 R 1/2 -10 KGE16-03 R 3/8 16 KGR06-04 -04 R 1/2 -08 6 Tube Cap KGC -10 -12 KGR08-10 Applicable tubing O.D.

CYV

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

CM2

Bore size (mm) 0 0.033 20 41 8 13 8 10 9 18 62 24 30 9 14 15.5 13 5 28 5 M8 x 1.25 15 24 M20 x 1.5 1/8 133 142 20 0 0.033 25 45 8 13 10 10 9 22 62 30 30 9 14 19.5 17 6 33.5 5.5 M10 x 1.25 15 30 M26 x 1.5 137 146 1/8 26 0 0.033 32 45 8 13 12 10 9 22 64 30 30 9 14 19.5 17 6 37.5 5.5 M10 x 1.25 15 34.5 M26 x 1.5 139 148 1/8 26 0 0.039 40 50 11 16 14 15 10 24 88 38 39 11 18 21 22 8 46.5 7 M14

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

Note 3) An optional specification for special wiring is available to increase the maximum number of stations. Refer to page 2-3-54 for details. Note 4) Except valves. For valve weight, refer to page 2-3-10.

NCQ8

Do not use in an environment with oil or chemicals. Consult with SMC if an auto switch will be used in an environment laden with coolant, cleaning solvent, various oils or chemicals.

Speed Controller with Indicator

06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

MNB

Never use in an atmosphere of explosive gases. 6. Do not use in an environment where there is excessive impact shock. The structure of auto switches is not intended to prevent explosion. Never use in an atmosphere with an explosive gas since this may cause a serious explosion. 2. Do not use in an area where a magnetic field is generated.

Serial Transmission System Series EX250 Series EX500

For 3 stations For remote I/O A1W DeviceNet PROFIBUS-DP CC-Link 16 For 16 stations A2W 0 Without SI unit Stations Ports 1, 3, 5 position Symbol 02 Stations 2 stations Note U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 16 stations) Note 1) Double wiring specifications 08 02 8 stations 2 stations Note 2) Supply/Exhaust block assembly specification Specified