SMC Pneumatic Clean Series

The number of sampling locations NL = (A) 0.5 Evaluation method using a simple sampling Number of sampling w Unidirectional airflow: at least two locations Smaller value between NL=A/2.32 and NL=A x 64/(10M) 0.5 locations At least one location 2 litters or a sufficient volume of air that a minimum of 20 particles could be counted if the particle concentration were at the class limit.

This is a legacy product.

A large digital display provides a clear view of the current and set values.

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, HRS - NO SIZE RATING, OTHERS, HRS THERMO-CHILLERS, 2X, HRS - NO SIZE RATING, 88.1849 lb

Battery-less

35 40 to 50% 160 140 Lead 2.5: LEY16EC 120 Lead 5: LEY16EB LEY32E A 24 to 30 50 to 70% B/C 21 to 30 Force [N] 100 Lead 10: LEY16EA 80 LEY40E A 24 to 30 50 to 65% B/C 21 to 30 60 40 Min. 20% 0 20 10 0 20 30 40 50 60 70 Pushing force set value [%] Max. 65% Model LEY16mE LEY25mE LEY32mE LEY40mE Lead A B C A B C A B C A B C Ambient

Integrated Controller

Lead 20: EQY25H 100 Min. 25% Max. 50% 10 20 30 40 50 90 70 80 60 0 Model EQY16 EQY25 EQY32 Lead A B C H A B C H A B C Work load [kg] 1 1.5 3 1 2.5 5 10 2 4.5 9 18 Pushing force set value [%] Ambient temperature Pushing force set value [%] Duty ratio [%] Continuous pushing time [min] 40C or less 50 or less 100 Pushing force 45% 50% 70% 42 Battery-less Absolute (Step Motor 24 VDC) Easy to

Vacuum

Thread dia. 6 8 10113 10 a o a a M4 x 0.7 16 a a o a o o a M5 x 0.8 20 o a a a o a M6 x 1.0 25 a a o o o MB x 1.25 32 o o a o o M'l0 x 1 .25 zcDuKc T.

Vacuum

Thread dia. 6 8 10113 10 a o a a M4 x 0.7 16 a a o a o o a M5 x 0.8 20 o a a a o a M6 x 1.0 25 a a o o o MB x 1.25 32 o o a o o M'l0 x 1 .25 zcDuKc T.

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Stations mTr rt t*. lT' 20 | 20 stations lpllrih llnlr Jrb dI vJ3000-21-1A A,B port Type 46 & 546 (for 5 port base mounted type) Appllcable valves NVJ30400-O NVJ30430-O Itdi.

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Stations mTr rt t*. lT' 20 | 20 stations lpllrih llnlr Jrb dI vJ3000-21-1A A,B port Type 46 & 546 (for 5 port base mounted type) Appllcable valves NVJ30400-O NVJ30430-O Itdi.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

Stations mTr rt t*. lT' 20 | 20 stations lpllrih llnlr Jrb dI vJ3000-21-1A A,B port Type 46 & 546 (for 5 port base mounted type) Appllcable valves NVJ30400-O NVJ30430-O Itdi.

AC Servo Motor Driver (Pulse input type/Positioning type)

(RES) A.10 Undervoltage A.12 Memory error 1 (RAM) A.13 Clock error A.15 Memory error 2 (EEP-ROM) A.16 Encoder initial communication error1 A.17 Board error A.19 Memory error 3 (Flash-ROM) A.1A Motor combination error A.1C Software combination error A.1E Encoder initial communication error 2 A.1F Encoder initial communication error 3 A.20 Encoder normal communication error 1 A.21 Encoder normal

Cylinder

l (mm) A A' s i s .D I E I F GA I GsJ H I I Bore Size J MM NN 6 7 9 14 14 3 10.5 8 6 6 17 10 10 12 15 17 5 13 I 8 6 I 7 20 L .. 6 M3x O.5 MlO xlO 7 3.4 1.6 24 16 32 97 ; ~ 4.5 Hi ' 28 1S 10 5.5 1 2.3 36 22 49 ~ 7 I M4X O.7 M12X1 .. 0 15 12 14 20 1 19 6 15.5 I 10 6 I 7 24 9 I M5X O.8 MI4 X tO - Series CJP 2-M5xo.B z H s A F GA G8 A A' jI ~: 1=r=if1+ :' -,LitL*'ft ? .. =.'

XL

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

High Vacuum Angle Valve, XL Series

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

A?large digital display provides a clear view of the current and set values.? The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS?

A?large digital display provides a clear view of the current and set values.? The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS?

A?large digital display provides a clear view of the current and set values.? The dustproof filter is integrated with the grill of the front panel allowing mounting and removal of the HRS?

Direct Solenoid

Eody Asdnbly-l/a. NF IF p.rt!. Inctuda body .nd (2) tocktno ths. sprir|oSt AXT0r&4 Spnig-spool rotlm xmosl0 of!!L-!!9qtq 4RP568414 5'Oool A s|erD Aas,y Galket-aolnold cov.r xTot1{l 1 spac.r AXT!1&5 1 cavr asldnbly-a"c. 3ol6nold. cnmB|3 ol cov.r, recsd no}tocking oplralor, and {4) dot, 12, Cdor a!.mt,y-A,C. tol.|lold, wltioul manual oprrtor, and Nith oorator mounllng hol. pl!

FKM (Fluoro rubber) is used for the fluid-contact rubber materials, allowing use even in ozone environments.Manifolds for VKF300 body ported valves , Stations: 1 to 20, Common SUP/Common EXH, Common SUP/Individual EXH, Optional bracket on Common EXH type, MFLD, VKF334, BASE MT,SIDE PT, VALVE, VV3K* MANIFOLD VK 3-PORT, NJ, VV3K* BASE MT 1/8, .88880 lb