CJ5-S

ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-14-3 4 Stainless Steel Cylinder Series CJ5-S 10, 16 How to Order Bore size Standard stroke (mm) 10 16 10 16 10 mm 16 mm 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes by the 1 mm interval are available without using spacers for stroke adjustment.

MVGQ

ML2B C J G5-S Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

10-9 1.3 x 10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 Note 1) Values at ambient temperatures, excluding gas permeation.

MY1

10 1.

MXF

A2 10 11 12 17 Model A1 6 10 10 11 MXF8 MXF12 MXF16 MXF20 A3 6 10 10 11 A4 21 23 28 34 A5 21 23 28 34 A6 10 11 12 17 Graph (2) Allowable Moment Coefficient: Note) Note) MXF8 MXF12 MXF16 MXF20 1.0 Allowable Moment Coefficient: Note) 16 mm for MXF8-10 only. 0.7 Stroke (mm) Table (4) Maximum Allowable Moment: Mmax (Nm) 0.5 0.4 Model 10 0.56 100 18.27 75 7.96 13.70 50 3.34 5.69 9.14 30 0.98

RSH/RS1H

20 30 40 10 20 30 40 0 0 0.6 CE1 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 CE2 Graph (3) Graph (4) Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 ML2B 0.2 0.1 C J G5-S 80 80 1000 2000 3000 4000 0 5000 Lateral load F [N] 32 CV 70 70 MVGQ 60 60 CC 50 50 32 RB 40 40 30 30 J 20 20 20 D20 10 10 -X 200 0 10 20 30 40 10 20 30 40 Transfer speed [m/min] = 0 Transfer

RSH/RS1H

20 30 40 10 20 30 40 0 0 0.6 CE1 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 CE2 Graph (3) Graph (4) Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 ML2B 0.2 0.1 C J G5-S 80 80 1000 2000 3000 4000 0 5000 Lateral load F [N] 32 CV 70 70 MVGQ 60 60 CC 50 50 32 RB 40 40 30 30 J 20 20 20 D20 10 10 -X 200 0 10 20 30 40 10 20 30 40 Transfer speed [m/min] = 0 Transfer

Magnetically Coupled Rodless Cylinder

B Counter bore depth C 2-P (Piping port) T Y HP L 0 -0.1 4-J x E TC X F WP D GW QW PW 7 GP 4-LD 2 x 4-MM Thread depth M Switch rail W K Plug HS Q + Stroke G G HR CR Z + Stroke CY3R25, 32, 40 CY3R15, 20 (mm) Model CY3R15 CY3R20 CY3R25 CY3R32 CY3R40 J x E M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 A 10.5 9 8.5 10.5 10 HC 31 38 43 54 66 HP 17 24 23.5 29 36 HR 30 36 41 51

Basic Type/Direct Mount Type

Q N F I NA F N CC 0.1 + CY3B6 to 15 CY3B50, 63 (mm) B 17 25 35 36 46 60 70 86 100 0.007 0.043 30 32 CC 32 38 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 E 4 1.5 2 2 2 2 3 8 8 F 8 9 10 13 13 16 16 2 2 G 5 5 5.5 7.5 7.5 8 11 14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 K 5 4 11 8 10 15 16 25 26 N 9.5 11 11 18 18.5 20 26 25 25 Q NN S 62 63 83 106 111

10

J dimension is different from the value which is subtracted stroke from G dimension. 9 Wide Type Parallel Style Air Gripper MHL2 Series Dimensions MHL2-20DmZ 10 10 Closed J 2 x M6 x 1 thread depth 7 (Mounting thread) D 11 View K (Fingers closed) The above figure shows the MHL2-20D1Z/20D2Z.

energy saving effect

IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 V V (400 V as standard, 200 V as an option) HRSH090 Inverter type 0.1 5 to 40 V Indoor use (Only 200 V as an option) (400 V as standard, 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (Only 200 V as an option.

Fluoropolymer Piping Equipment

x 8 8 x 6 10 x 8 10 x 8 10 x 8 8 x 6 10 x 8 8 x 6 12 x 10 12 x 10 12 x 10 12 x 10 12 x 10 12 x 10 12 x 10 12 x 10 12 x 10 6 x 4 3 x 2 19 x 16 19 x 16 19 x 16 19 x 16 19 x 16 19 x 16 19 x 16 10 x 8 19 x 16 19 x 16 19 x 16 19 x 16 19 x 16 19 x 16 12 x 10 25 x 22 25 x 22 25 x 22 25 x 22 25 x 22 25 x 22 25 x 22 12 x 10 25 x 22 25 x 22 25 x 22 25 x 22 25 x 22 25 x 22 25 x 22 25 x 22 19 x 16 19

Thermo-chiller

Laser output power 3 [kW], conversion efficiency 30% The oscillators power consumption is, 3 [kW] 0.3 = 10 [kW] The cooling capacity required for the oscillator is, 10 [kW] 3 [kW] = 7 [kW] Considering a safety factor of 20%, 7 [kW] x 1.2 = 8.4 [kW] W Efficiency Q = P = In this example, using an efficiency of 0.7: 5.1 0.7 = = 7.3 [kW] Q: Heat generation amount Cooling capacity = Considering

HRS100/150

Select the proper size of cable according to an actual condition.

Transfer

G A G 2 x PA (Hexagon socket head taper plug) F I B + Stroke 2 x PA (Port for operating cylinder) J J J J D D II 2 x MB, Depth LB II 2 x PB (Hexagon socket head taper plug) 2 x PB (Hexagon socket head taper plug) JJ 28 32 36 A 110 140 170 B 220 280 340 C 206 264 322 D 42 51 59 E 138 168 204 G 30 37 45 H 73 88 106 I 76.5 91 110 J 40 46.5 55 K 46 58 68 L 45.5 54 64 M 30.9 32.4 41.5 N 16 15

Thermo-chiller

] Circulating fluid Circulating fluid Compressor Compressor Circulating fluid Circulating fluid Compressor Compressor User's equipment HRS Existing model HRS Existing model 30 40 0 10 20 Elapsed time [Minute] This is just an example diagram.

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AR20K io 60K Flor / drreclion: Bigh 10 leli AR10 to 60.

SMC Pneumatic Clean Series

14 C 130 121 119 114 ZZ 14 10 8 6 KA 78 79 77 77 S 16 12 10 8 D 25 18 14 12 E 2 2 2 2 F 40 32 25 20 30 22 22 18 23 0<23> 0 0 10 0 0 0 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M14 x 1.5 M6 x 1 depth 12 12 12 1/4 1/4 3/8 1/2 58 58 27 27 32 41 14<12> 14<12> 10 10 10 10 23 20 20 20 11 11 58 72 20<17> 20<17> 16 16 71 71 13 16 89 110 7 7 10 10 55 69 80 100 10 10 10 10 32 38 50 60 150 150 182 182 18

10

Symbol O.D. thread size Stroke 0805 1006 1410 8 mm 5 mm 2 pcs. 1 pc. 10 mm 6 mm 3 pcs. 1 pc. 14 mm 10 mm 1 pc.

NCA1

1/2 1 1/2 3 1/2 14 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 13/16 14 3 2 1/4-12 3 1/2 3.75 1/2 1 1/2 3 13/16 14 3 1/2 2 1/2-12 3 1/2 4.25 1/2 1 1/2 3 13/16 BORE E EE(NPT) EB F G 8 8 1/2 3/4 11/16 3/4 2 10 10 5/8 1 13/16 3/4 2 1/4 12 12 3/4 1 13/16 3/4 2 1/4 14 14 3/4 1 1/4 15/16 3/4 2 3/4 BORE J K TE ADD STROKE LB P 8 1 1/2 9/16 7.57 5 7/8 3 1/4 10 2 11/16 9.40 7 1/8 4 1/8 12 2 11/16 11.10 7 5/