Table of Contents

K 20 m roll 100 m reel TUS1208 TUS0425 TUS0604 TUS0805 TUS1065 Model M Tubing O.D.

Table of Contents

: Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) a = 2000 m 1000 L1 a = 3000 0 20 40 60 Transfer load m (kg) 600 L2 400 Mer m 200 L2 0 20 40 60 Mer m Transfer load m (kg) 2000 a = 1000 L3 1000 a = 2000 m a = 3000 Mey a 0 20 40 60 Transfer load m (kg) Refer to page 145 for deflection data. 20 21 Courtesy of Steven

ZP

Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 04: KJH04-M5, 06: KJH06-M5 ZP3B-T2A(J/K)6-B5 ZP3B-T2A(J/K)10-B5 ZP3B-T2A(JB/K)15-B5 ZP3B-T2A(JB/K)20-B5 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet. Note 3) Fitting is ordered separately.

MGP

With Air Cushion Horizontal Mounting Ball Bushing 19 l = 50mm V = 200m/s 20 l =100mm V = 200m/s MGPL16 to 25 MGPL16 to 25 10 10 25 25 20 25 20 25 5 5 20 Load weight m (kg) Load weight m (kg) Load weight m (kg) Load weight m (kg) 20 16 16 16 16 1 20 50 76 75 100 200 1 20 50 76 75 100 200 Stroke (mm) Stroke (mm) MGPL32 to 63 MGPL32 to 63 30 30 50, 63 20 20 50, 63 50, 63 Load weight m (kg)

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

D-P5DWL BQP1-050 40 to 100 7-6-7 8 Series CQ2 Clean Series Copper-free (For CRT manufacturing process) 20 CQ2B Bore size Stroke D(C)(M) 10 CQ2B Bore size Stroke D(M) 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 12, 16, 20, 25, 32, 40, 50, 63 Copper-free Clean Series 10-Relief type 11-Vacuum type The type which is applicable for using inside the clean room graded Class 100 by making an actuators

CRB2/CRBU2/CRB1

(An additionally machined port will have an aluminum surface since it will be left unfinished.) 2-d Body (B) (mm) (mm) Size d Size Q M N 10 3.4 10 M3 8.5 9.5 15 3.4 15 M3 11 10 Body (A) 20 4.5 20 M5 14 13 Q N A port B port (Standard) (Altered) A port 30 30 B port 5.5 M5 15.5 14 40 40 M5 21 20 5.5 M 63 Series CRBU2 Symbol: C3 Symbol: C4 Change the position of the screws for tightening the

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

Series CY1L Size: 6, 10, 15, 20, 25, 32, 40 To ensure a permanent path Stable operation is possible, even with an eccentric load, by using ball bushings. When smoother operation is required, even with an eccentric load. Series CY1H Size: 10, 15, 20, 25, 32 The use of a linear guide facilitates a large load, large moment and high precision.

Proposals for Energy Saving

or m x 10).]

Hydraulic

x 100l x 115l 115 50 (M) 100 50 (M) M5 x 55l x 140l 140 75 (M) 55 CHKDB25 5 (M) x 60l x 165l 165 100 (M) 60 10 (M) x 65l M12 x 75l 75 CHKDB63 5 (M) 65 15 (M) x 70l x 80l 80 10 (M) 70 20 (M) x 75l x 85l 85 15 (M) 75 25 (M) 10.4 x 80l x 90l 90 20 (M) 80 30 (M) x 85l x 95l 95 25 (M) 85 35 (M) x 90l x 100l 100 30 (M) 90 40 (M) 16 x 95l x 105l 105 35 (M) 95 45 (M) x 100l x 110l 110 40 (M) 100

5

A water resistant type cylinder is recommended for use in an environment which requires water resistance. Lead wire length symbols: 0.5 mNil (Example) M9NW 3 m L (Example) M9NWL 1 m M (Example) M9NWM 5 m Z (Example) M9NWZ Solid state auto switches marked with are produced upon receipt of order.

smcmaintenancepartslist

Pressure Control Equipment Industrial Filters Port size Port size FN1 FN4 Symbol 10 20 Rc1 Rc2 Applicable model Specifications FN1 FN1101 FN1102 FN1112 FN4102 65 x 250L 65 x 500L Model Element dimension Material Construction Stainless steel 304 Element Cylindrical type 5 m, 20 m Step type 5 m Cylindrical type 5 m, 20 m Step type 5 m Cylindrical type 5 m, 20 m Nominal filtration rating Differential

Made to Order

M L CXS series: 20, 25, 32 M L CXS series: 10, 15 Stroke Stroke CXS 10 M L CXS 15 M L CXS 20 M L CXS 25 M L CXS 32 M L 150 210 229 75 Model Stroke SS ZZ Z 80 135 152 50 120 175 192 70 150 205 222 80 90 145 162 60 80 100 100 155 172 110 165 182 175 257 287 125 180 197 200 282 312 120 180 199 65 125 207 237 150 232 262 110 170 189 125 185 204 110 192 222 110 180 204 120 202 232 120 190 214

REA/REB

Note 2) 15 has internal magnets in the body. 10-2-20 20 Sine Rodless Cylinder Basic Type Series REAR Construction: 20 to 40 @3 q @1 y u e t r @2 !1 !2 i o !3 @0 !8 !4 @5 RE A B REC CX CY MQQ M !5 @8 @9 !9 #0 @6 !0 @4 w @7 !7 !6 RHC MK(2) Component Parts Material No. Description No.

15

Motorless Motorless 400 500 200 LAT 0 0 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 LZ Work load [kg] Work load [kg] 2000 1000 LC3F2 800 1500 L5 [mm] L5 [mm] Bottom m Me 600 1000 Y 400 L5 500 200 0 0 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] 2000 1000 800 1500 L6 [mm] L6 [mm] 600 1000 Z L6 400 m Me 500 200 0 0 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work

Compact 5-Port Solenoid Valve

Please contact SMC for details. 1.5 m AXT100-FC26-1 AXT100-FC20-1 AXT100-FC10-1 3 m AXT100-FC26-2 AXT100-FC20-2 AXT100-FC10-2 5 m AXT100-FC26-3 AXT100-FC20-3 AXT100-FC10-3 Specified Layout COM. COM. 25 26 23 24 COM. COM. 21 22 19 20 19 20 17 18 17 18 15 16 15 16 COM.

REA/REB

/25 REAH15/20/25 REAH15/20/25 REAH15, 20 REAH15, 20 REAH25 REAH15, 20 REAH25 0.08 0.03 REAH25 Deflection (mm) Deflection (mm) Deflection (mm) Deflection (mm) 0.02 0.06 0.02 0.04 0.01 0.01 0.02 5 10 15 20 0 25 25 25 5 10 15 20 0 Moment (Nm) 5 10 15 20 0 Moment (Nm) Moment (Nm) REAHT25/32 REAHT25/32 REAHT25/32 0.05 REAHT25 REAHT25 REAHT32 REAHT32 REAHT25 0.03 Deflection (mm) Deflection (mm)

CXS

400mm/s 2 20 50 CXSM CXSL CXSM CXSL 10 Weight m (kg) Weight m (kg) 10 32 32 25 25 1 1 20 20 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Graph V = up to 800mm/s 4 Graph V = up to 600mm/s 3 6 5 3 32 2 Weight m (kg) Weight m (kg) 32 25 25 1 1 20 20 CXSM CXSL CXSM CXSL 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Graph

CQ2

D (M) 20 CQ2B Bore size Stroke D (C)(M) 12, 16, 20, 25, 32, 40, 50, 63 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 Clean series 10Relief style 11Vacuum style Copper free series The rod portion of the actuator has a double seal construction, and a relief port is provided to discharge the exhaust air directly outside of the clean room.

Thermo-chiller/Rack Mount Type

Part number Applicable model A dimension [mm] Weight [kg] HRR010-m-20-mUY 330 HRR012/018-m-10-mUY 417 HRR012/018-m-20-mY HRR024/030-m-20-mY 506 HRR050-A-20-mUY 815 HRR050-W-20-mUY 637 HRR-KS001 Approx. 7 83 mm A Adjuster foot Caster (O.D.: 63) 303 mm 372 mm 494 mm 428 mm 544 mm Mounting view (HRR012/018-A) Anti-quake bracket A Anti-quake bracket B Hexagon nut Hexagon bolt Caster adjuster-foot

SQ1000/2000

Also, when wiring is not required for a station that is to be mounted with an option such as an individual SUP spacer, enter an "X".