2/3 Port Valve

2 2-Rc 3 4 2-Rc1 Model J L K M N O P Q R S T U V M5 X 0.8 Depth 5.5 20 24 24 29 36 48 51 25 30 35 38 30 40 50 56 37 43 50.5 58.5 75 100 126 141 88 118 148 163 34 44.5 60.5 66.5 10.5 16 19.5 15.5 62 6 X 8 7 X 0 9 X 2 9 X 2 202.5 232 267 286.5 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B M6 X 1 Depth 6 70 92 109 M8 X 1.25 Depth 6 M8 X 1.25 Depth 6 4.2-34 2 Port Valve for Steam

42

TURN COM VQ4000 VQ5000 LOCK Caution Terminal block marking Model A COM B T Do not apply excessive torque when turning the locking type manual override. (0.1 Nm or less) VQ 4 5 10 0 1 A side COM VQ 4 5 20 0 1 A side COM B side VQ 4 5 3 4 5 6 0 0 1 A side COM B side Note 1) There is no polarity. It can also be used as COM.

MGG

GC SB + Stroke B ZZ + Stroke A + Stroke B SA + Stroke A 63 SZ + Stroke B Front mounting flange C port A, B port B port A 20 C port A port A ' View A-A' GC SB + Stroke B ZZ + Stroke A + Stroke B SA + Stroke A 41 Made to Order Specifications Series MGG Auto Switch Rail Mounting 8 MGG XC13 Bearing type Mounting type Stroke Auto switch type Auto switch symbol Bore size Auto switch rail mounting

CLA

W .TOea TT XIUS ' Z ZZ l ~/ t ~ ~ 20 27 Y. 42 11 20 45 153 8 15 !

Aluminum High Vacuum Angle Valve

XLS-16XLS16-20-G, C, T, D XLS-16-P XLS16-20-PG XLS-25XLS25-20-G, C, T, D XLS-25-P XLS25-20-PG Description Construction No. w y r e-1 e-2 Coil assembly Core assembly Armature assembly O-ring O-ring XLS25-30-1 XLS25-30-2 AS568-018V AS568-030V XLS16-30-1 XLS16-30-2 AS568-018V AS568-025V 465 b

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

R port 1/8 P port 1/8 Stations P, R port thread type A port size 02 : 20 2 Stations : 20 Stations A A M5 01 M5 x 0.8 1/8 Nil Rc G NPT NPTF CE-compliant F N T A port M5 x 0.8, 1/8 Nil Q CE-compliant Note) For more than 9 stations, supply air to both sides of P port and exhaust air from both sides of R port.

RSQ

ML2B I C J G5-S D T W E CV U 4-N through 8-O counterbore MVGQ 20 (22) 10 (11) V CC H + Stroke A + 2 stroke B + Stroke M 0.2 E RB Built-in One-touch fittings (20 to 50) Tubing O.D.

New

B B DIN terminal Conduit terminal F Q Cable 0.24 to 0.47 D S G1/2 1.34 Qp0.08 F (1.73) 1.24 0.99 T C C R R E G1/2 E 2 x P Port size A 2 x P Port size A B1 Sp0.08 B B1 B Conduit Faston type Q F D Q F 0.44 z11 G1/2 0.90 R C C R E E 2 x P Port size A 2 x P Port size B1 A B1 B B Terminal part Faston connector (inch) 250 Series Electrical entry Size Port size Grommet (with surge P A B B1 C D E

MNB

If driving a load such as a relay that generates a surge voltage, use a switch with a built-in contact protection circuit or use a contact protection box.

IIIIIII

4 1 l b s ( 6 k g ) P T 20" O T 30' T T 50' P T 20" O T 30' T T 50" 'Length from center to center of r o i l e r : 1 5 I n ( 3 8 l m m ) 'Length lrom cenler to end ol vane = 5 56 in (141 2mm) A B c D E F G H 0.57 14,6) 2.64 (621 1.86 ',47.2)1.45 136.8) 1 3 0 (33) 0.59 (1 5) 1.03 (26.2\ 1 0 0 r25.4', Millimeters in Parentheses A B c D E F G H 5.56 141.2 0.57 14.61 0.25 (6.4) 2 . 1 5 '54.7)

Air Fittings & Tubing

53 34.5 22 MS Note1) D1: max. diameter SKQ12, #18 to #25 Tl 2.1-20 Series KQ2 Extended male elbow: KQ2W A (1) (2) Tube O.D.

Mechanical Valves Series NVM, NVFM, NVZNI

4 1 l b s ( 6 k g ) P T 20" O T 30' T T 50' P T 20" O T 30' T T 50" 'Length from center to center of r o i l e r : 1 5 I n ( 3 8 l m m ) 'Length lrom cenler to end ol vane = 5 56 in (141 2mm) A B c D E F G H 0.57 14,6) 2.64 (621 1.86 ',47.2)1.45 136.8) 1 3 0 (33) 0.59 (1 5) 1.03 (26.2\ 1 0 0 r25.4', Millimeters in Parentheses A B c D E F G H 5.56 141.2 0.57 14.61 0.25 (6.4) 2 . 1 5 '54.7

NCQ8

1 r t !2 !

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

3 -X 20#1 Data Slide bearing Long stroke View A-A @9 Component Parts Material Material Note Note No. Description No.

MNB

F FT FE T ZZ + 2 strokes VA N FX FZ Ee11 30 35 40 45 45 55 Effective thread length (mm) Width across flats A 22 30 35 35 40 40 B1 17 22 27 27 32 41 H1 6 8 11 11 13 16 B2 46 52 65 75 95 114 BN BP 1/8 1/8 1/4 1/4 1/4 1/4 C 32.5 38 46.5 56.5 72 89 D 12 16 20 20 25 30 F 13 13 14 14 20 20 Fd 25 31 38.5 39.5 45.5 54 FD 7 9 9 9 12 14 FE 3 3 2 2 4 4 FT 10 10 12 12 16 16 FX 72 83 100 115 126 150

MNB

D-P5DWL Hs Hs Auto switch Auto switch Ht Ht A A 32 B B L 9-6-20 21 Series MNB Cylinder with Lock Double Acting, Single Rod Proper Auto Switch Mounting Position D-F5W D-J59W D-F5 D-J5 D-F5BAL D-F59F D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W, D-Y7WV D-Y7BAL D-A3 D-A44 D-G39 D-K39 D-A5 D-A6 D-A59W D-F5NTL D-P5DWL Bore size (mm) A B A B A B A B A B A B A B 32 1 3.5 1.5 4 0 0.5 9.5 12 4.5 7 2 4.5 0

CG5-S

Mineral oil A C A A A A 18 Sodium hypochlorite (2%, Room temperature) A C A D D B 19 Sodium chloride A A A A B 20 Carbon dioxide A A A A A A 21 Natural gas A A A A A A 22 Boric acid A B A D A B 23 Unless noted otherwise, the solution concentration is in a saturated state.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

A (Part no.: ZS-46-A1) 20 20 45 30 2 5.2 30 34.6 19 5.2 14.7 47 9.6 The bracket configuration allows for mounting in four orientations.

VQ7-6/7-8

position single : VQ7-8-FG-D-SC single (Reverse pressure): VQ7-8-YZ-D-SC 3 position closed center : VQ7-8-FHG-D-SC exhaust center : VQ7-8-FJG-D-SC pressure center: VQ7-8-FIG-D-SC 175.5 180.5 175.5 82.5 93 98 93 82.5 56(71) 56(71) 56(71) 56(71) 16(20)(B port) 16(20)(A port) 16(20)(B port) 16(20)(A port) Manual override Manual override A B PB A B PB 62(72) 75(86) 62(72) 75(86) 38 50 B A 38

TABLE OF CONTENTS

ALL-STAINLESS CONSTRUCTION SINTERED STAINLESS MUFFLER ELEMENT COMPACT DESIGN LOW PROFILE 1/8 & 1/4 NPT SIZES LOW NOISE LEVEL i.e., Exhaust noise of 3WNC Valve at 100 psi and 200 CPM reduced from 99dBA to 75dBA (measured at 3 feet from Muffler) CAN BE USED AS BREATHER VENT FILTER INLINE F520-A F540-A F560-A F5100-A F620-A F640-A F660-A F6100-A 20 40 60 100 20 40 60 100 BRASS NPT FILTER