CXS

Symmetric mounting Working principle A + A A Series CXS 6, 10, 15, 20, 25, 32 Reverse mounting Piston seal A A A R H R H 1. When the piston is retracting, air is exhausted through both A and A until piston seal H passes air passage A. 2. After piston seal H has passed air passage A, air is exhausted only through A.

CXS

Working principle A + A A Series CXS 6, 10, 15, 20, 25, 32 Reverse mounting Piston seal A A A R H R H 1. When the piston is retracting, air is exhausted through both A and A until piston seal H passes air passage A. 2. After piston seal H has passed air passage A, air is exhausted only through A.

JIS Standard Hydraulic Cylinder

Note 3) When tightening an auto switch mounting screw (M2.5), use a watchmakers screwdriver with a grip diameter of 5 to 6 mm. Also, set the tightening torque to be 0.05 to 0.15 Nm. As a guide, turn 90 from the position where it comes to feel tight.

MXS Series Air Slide Table

M6 X 1 thread 10 deep 7 2.5 (With stroke adjuster at extension end) 38 38 92 56 70 FF 24.5 F 31 6H9 6 deep +0.030 0 N -1 x F 2 6H9 6 deep +0.030 0 30 2-M8 X 1.25 thread 15 deep 15 M 0.5 55 62 Z ZZ (NN-1) x H G H 34 16 34 16 A B 11 12 6.6 12 38 2 7 A B 6H9 6 deep +0.030 0 NN-M8 x 1.25 thread 16 deep 6H9 6 deep +0.030 0 HA GA Cross section AA Cross section BB (mm) Model F 50 50 50 60 35 60

MQQ

(Except clevis style) B L F G C (1) MK(2) 20 15, 30, 45, 60, 75, 100 25 15, 30, 45, 60, 75, 100 RS Q G Dealing with the stroke by the 1 mm interval is available by installing a spacer with the standard stroke cylinder. RS H A Function D (2) Nil HNote) Standard type High speed/High frequency type (Without fixed orifice) RZQ Note) Except 6 mm bore size.

MQQ

RE A B MQML D B 10 15 REC CX Action Anti-lateral load, low friction cylinder CY D Double acting Type Cylinder stroke MQQ M L Anti-lateral load type (Built-in ball bushing) Bore size (mm) Standard stroke (mm) 6 15, 30, 45, 60 RHC Mounting style 10 15, 30, 45, 60, 75, 100 16 15, 30, 45, 60, 75, 100 Basic style Foot style Rod side flange style Head side flange style (Except 6) Single clevis

VZS

50/60 Hz 2 200 VAC, 50/60 Hz Applicable model 3 110 VAC, 50/60 Hz Applicable model Body type Plug-in type Symbol Electrical entry 4 220 VAC, 50/60 Hz 1 2 position single Plug-in F Note) A Single/ Double A side 5 24 VDC 2 2 position double 6 12 VDC G Grommet Grommet, With surge voltage suppressor 3 3 position closed center B Double B side 9 Other Option 4 3 position exhaust center GS

ISO Cylinder

B A B A B A B 8 6.5 6.5 2 2 3 3 A B A B A B A B A B 8 5 5 4 4 3.5 3.5 10 6.5 (7) 6.5 (7) 2 (2.5) 2 (2.5) 3 (3.5) 3 (3.5) 10 5 (5.5) 5 (5.5) 4 (4.5) 4 (4.5) 3.5 (4) 3.5 (4) 12 7.5 (8.5) 7.5 (8.5) 3 (4) 3 (4) 4 (5) 4 (5) 12 6 (7) 6 (7) 5 (6) 5 (6) 4.5 (5.5) 4.5 (5.5) 13.5 (10.5) [7.5] 12 (9) [6] 9.5 (6.5) [3.5] 11 (8) [5] 10.5 (7.5) [4.5] 8 (5) [2] 9.5 (6.5) [3.5] 9 (6) [3

Thermo-chiller/Rack Mount Type

Required ventilation rate [m3/min] Model Heat radiation amount [kW] Differential temp. of 3C between inside Differential temp. of 6C between inside and outside of installation area HRR010-A Approx. 2 40 20 HRR012-A Approx. 2 40 20 HRR018-A Approx. 4 70 40 HRR024-A Approx. 5 90 50 HRR030-A Approx. 6 100 60 HRR050-A Approx. 10 140 70 and outside of installation area Voltage dV dt = Voltage

Rotary Actuator

4, @5, @6, #3, $6 are included as a set. u, o, !0, !4, @5, @6, #3, #6 are included as a set. u, o, !0, !4, @5, @6, #3 are included as a set. Corresponding parts Note) When ordering replacement parts, write 1 for one set of the parts per actuator. A grease pack (10 g) is included. If an additional grease pack is needed, order with the following part number.

Compressed Air Preparation Filter

AD27-6-A With bowl guard AD27-6C-A AD37m-6-A AD47m-6-A Normally open (N.O.) With bowl guard AD38m-6-A AD48m-6-A Automatic (Auto drain) Manual With drain cock C2SF-2-A C3SF-2-A C4SF-2-A With level gauge C3LF-8-A C4LF-8-A With drain guide (without valve function) C2SFm-2J-A C3SFm-2J-A C4SFm-2J-A With level gauge C3LFm-8J-A C4LFm-8J-A Metal Normally closed (N.C.)

LEC-OM02904

(2) a FVD5.5-4 YNT-1210S (1)b 8-4NS YHT-8S c FVD14-6 YF-1E-4 YNE-38 DH-112DH-122 d FVD22-6 DH-113DH-123 (1)e 38-6 YPT-60-21 TD-112TD-124 YF-1E-4 YET-60-1 (1)f R60-8 YPT-60-21 TD-113TD-125 YF-1E-4 YET-60-1 g FVD2-4 YNT-1614 h FVD2-M3 j FVD5.5-6 YNT-1210S k FVD5.5-8 l FVD8-6 DH-111DH-121 m FVD14-8 YF-1E-4 YNE-38 DH-112DH-122 n FVD22-8 DH-113DH-123 (1)p R38-8 YPT-60-21 TD-112TD-124 YF-1E

MQQ

OA effective depth RA Y Q F 2 x 4-OB Depth of counter bore RB E J I 4-N through M 0.2 D W B + Stroke K L M 0.2 A + Stroke E (mm) Bore size (mm) Stroke range (mm) A B F H C D E Y OA I J K L M N OB Q RA W RB 10 to 40 M3 x 0.5 M4 x 0.7 69.5 61.5 6 6 29 9 38 5 8 20 10 3.5 6.5 39.5 7 5 4 10 to 60 M4 x 0.7 M6 x 1.0 80.5 70.5 8 8 36 11.5 47 7 10 25.5 16 5.4 9 48.5 10 5 7 10 to 60 M5 x 0.8 M6

Cylinder with Lock

D-Z7m D-Z8m D-M9m D-M9mV D-M9mW D-M9mWV D-M9mA D-M9mAV D-A9m D-A9mV D-F5m D-J59 D-F59F D-F5NT D-A5m D-A6m D-A59W D-G39 D-K39 D-A3m D-A44 D-P3DWA D-P4DW Bore size A B A B A B A B A B A B A B A B A B A B 32 10 8 6 4 6.5 4.5 11.5 9.5 0 0 4 2 0 0 3.5 1.5 5.5 3.5 3 1 40 9 9 5 5 5.5 5.5 10.5 10.5 0 0 3 3 0 0 2.5 2.5 4.5 4.5 2 2 50 10 9 6 5 6.5 5.5 11.5 10.5 0 0 4 3 0 0 3.5 2.5 5.5 4.5 3 2 63 10

CM2

B 5(3) 5(3) 6(4) 11 A 6(4) 6(4) 7(5) 12 B 0(0) 0(0) 0.5(0) 5.5 A 0.5(0) 0.5(0) 1.5(0) 6.5 B 3(1) 3(1) 4(2) 9 A 4(2) 4(2) 5(3) 10 Hs 69.5 72 75.5 79.5 B 6(4) 6(4) 7(5) 12 Hs 60 62.5 66 70 A 7(5) 7(5) 8(6) 13 Hs 25 27.5 31 35 B 0(0) 0(0) 1(0) 6 Hs 22.5 25 28.5 32.5 A 1(0) 1(0) 2(0) 7 B A B 1.5(0) 1.5(0) 4.5(2.5) 3.5(1.5) 2.5(0.5) 4.5(2.5) 3.5(1.5) 2.5(0.5) 5.5(3.5) 10.5 4.5(2.5) 9.5 3.5(1.5

Stability of suction position,

A A A A A Seal washer 31 40 31 34.5 7 38 32.5 10 5 35 32 23.3 6 Width across flats 6 44 40 29.4 6 54 50 37 6 Width across flats 6 Width across flats 6 A-A A-A A-A 22 22 22 19 19 19 34.6 61.1 86.1 25 9.5 9.5 9.5 Weights [g] Weights [g] Weights [g] Pad material Model N/U/CL S F Pad material Model N/U/CL S F Pad material Model N/U/CL S F ZP3E-Y32BMl-AL14 60.4 59.9 64.0 ZP3E-Y40BMl-AL14 64.4

Fluoropolymer Piping Equipment

Class Class No. 1 1 2 2 2 2 2 2 3 3 3 3 3 3 3 3 3 3 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1 2 1 2 C 3 4 F 1 2 3 4 5 6 7 E 9 10 1 2 3 4 5 6 F 9 1 2 3 4 5 7 8 9 1 2 3 4 5 6 1/8" A A B C D E F A B C D E F A B C D E F G A B C D E F G H A B C D E F 1 2 2 2 2 2 2 3 3 3 3 3 3 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1/8" 1/8" 1/8" Branch tee female Run tee male Run tee female 1/4" A A 1/4

Prevents Micro-Bubbles

6 4-R3 6 6 PAX 4-R3 4-R3 (Max. 91) 325 PB (Max. 91) 191 87 60 87 60 112 112 17-5-37 35 Series LV Fitting Assembly Procedure Assemble fittings following the procedure shown below.

AC

AWD ITV VBA VE VY G AL Model Port size B J A F G H I C D E 100 100 60 60 73 73 230 230 431(481) 437(487) 59 63 166 162 117 117 3-M5 X 0.8 X 6 3-M5 X 0.8 X 6 AL800-12 to 14-1 AL900-20-1 11/4 / 11/2 2 ( ) With float switch 1.17-10

REA/REB

4 64 134 7 148 34 26 60 40 93 15 90 8 17 Series REAR Proper Auto Switch Mounting Position for Stroke End Detection Auto Switch Operation Range (mm) D-Y5 D-Y7 Auto switch model Bore size (mm) D-A9 D-F9 D-Z7 D-Z8 D-Y7W 7 13 10 A B 5 8 15 4 6 20 9 25 7 9 32 6 11 40 6 Note 1) Switches cannot be mounted in some cases.