ChemicalThermo-con

15 HRG HRS HRZ HRZD HRW HEC HEB HED Technical Data Related Products 2 10 HED005-HW19 HED007-HW19 10 1.5 1.5 HED003-HW19 5 0.7 0.7 0 0 0 5 10 15 20 0 5 10 15 20 Flow rate (L/min) Flow rate (L/min) Pressure Loss in FacilityWater Circuit Clear water HED003 HED005 HED007 1 0 2 3 4 gpm 1 0 2 3 4 gpm 100 kPa 100 kPa 15 psi 15 psi 80 80 12 12 Pressure loss Pressure loss 60 60 9 9 40

Servo Motor Controller (24 VDC)

(CN2 connector 3 wires and CN3 connector 9 wires [15 wires for the lock specification]).

3

, T1 = 297 5K, 0.07 bar P 0.14 bar.

Model Selection 1

bar absolute, T1 = 297 5K, 0.07 bar P 0.14 bar.

Dedicated Controller

Description RUN 15 +24V Common The positive common of the input terminal. 1, 14 HOLD 3 The terminal that performs setup operations (actuator starting preparation). 2 Starting preparation STOP 16 SET-UP ALARM RESET 4 The terminal that performs program start. RUN 15 Starting PRO-NO BIT 1 17 17 Pro-no. bit1 The terminal that designates the program to be executed.

LECA6_C

(P.16) 13.P.53 USB LAN 8 - 2.4 () (1) I/O LECA61 1 I/O *(LEC-CN5-) 1 * 1 *(LE-CA--) 1 * (LEC-T1-3G) (LEC-W2) (USB ) 2 3.4 (P14) 3 (CN1~CN5) 4.(P.16) 9 - 4 DC24V LED POWER ALARM LEDPWR LEDALM CN4 I/O 12. (P.48) 5() ()() () 6 10 - 3. 3.1.

LECP6_C

14 18 (6.3) B1 A1 5 6 17.7 14.2 A6 B6 B1 A1 10.2 2 1 B3 A3 (5.7) 15 16 11 30.7 45 - 115 I/O No.

Angle Seat Valve

, T1 = 297 5 K, 0.07 bar P 0.14 bar.

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

bar absolute, T1 = 297 5K, 0.07 bar P 0.14 bar.

Angle Seat Valve /

, 20, 25 10, 15, 20, 25, 35, 40, 50 N.C.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

material Part numbers indicating changed seal material and leakage Leakage Pa m3/s or less Note 1) Compound No. 1349-80 Symbol Nil N1 Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 2101-80 2, 3 2 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1

Direct Operated

absolute, T1 = 297 5K, 0.07 bar P 0.14 bar.

IDX-OM-X004

T2 T1 O1 O2 CV1 CV2 OUT (Dry air) 5-port solenoid valve EXH.

Pressure Range: 0~1MPa, Port Size: T1 (Single Unit Mounting NPTF 1/8), Output Specification: 55 (PNP Open Collector 1 Output), Wiring Specification: C (Connector Style Lead Wire Length 0.6m)

Pressure Range: 0~1MPa, Port Size: T1 (Single Unit Mounting NPTF 1/8), Output Specification: 55 (PNP Open Collector 1 Output), Wiring Specification: CN (w/o Connector)

Pressure Range: 0~1MPa, Port Size: T1 (Single Unit Mounting NPTF 1/8), Output Specification: 55 (PNP Open Collector 1 Output), Wiring Specification: CL (Connector Style Lead Wire Length 3.0m)

Pressure Range: 0~1MPa, Port Size: T1 (Single Unit Mounting NPTF 1/8), Output Specification: 55 (PNP Open Collector 1 Output), Wiring Specification: L (Grommet Lead Wire 3m)

Pressure Range: 0~1MPa, Port Size: T1 (Single Unit Mounting NPTF 1/8), Output Specification: 55 (PNP Open Collector 1 Output)

Pressure Range: 0~1MPa, Port Size: Single Unit Mounting NPTF 1/8, Output Specification: PNP Open Collector 1 Output, Wiring Specification: Connector Style Lead Wire Length 0.6m

Pressure Range: 0~1MPa, Port Size: Single Unit Mounting NPTF 1/8, Output Specification: PNP Open Collector 1 Output, Wiring Specification: w/o Connector