CRQ2 Applicable shaft types: S, W E3 = LL LL E1 = Key L1 = X = L3 = (mm) (mm) Key dimensions 4 x 4 x 20 4 x 4 x 20 5 x 5 x 25 LL 3 4 5 Size 20 30 40 X 8 to 18 10 to 20 L1 {10 (18 X)} to (X 2) {10 (20 X)} to (X 2) Size 10 15 L3max X-2 X-2 11-8-15 16 Series CRQ2 (Size: 10, 15, 20, 30, 40) Simple Specials: -XA31 to -XA46: Shaft Pattern Sequencing II Shaft shape pattern is dealt with simple
ZSM PF2 IF Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Data Special fitting types are used in semiconductor production equipment (Metal gasket seal fittings) Leak rate: 1 x 10 10 Pa.m3/s ZSE/ISE60(F)-A2 ZSE/ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (Metal gasket seal fittings
Circulating Fluid Typical Physical Property Values Ethylene Glycol Solution 20% Temperature [C] Density [kg/m3] Specific heat C [J/(kgK)] 10 1.03 x 103 3.93 x 103 20 1.03 x 103 3.95 x 103 30 1.02 x 103 3.97 x 103 40 1.02 x 103 3.98 x 103 50 1.01 x 103 4.00 x 103 60 1.01 x 103 4.02 x 103 Water Density g: 1 x 10 3 [kg/m 3] Specific heat C: 4.2 x 10 3 [J/(kg K)] 6 Thermo-con/ Rack Mount Type
Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com F1 = x A1 x P (1) F2 = x A2 x P (2) A1 = D2 (3) 4 A2 = (D2 d2) (4) 4 F1 = Cylinder force generated on the extending side (N) F2 = Cylinder force generated on the retracting side (N) = Load rate A1 = Piston area
tubing O.D. d L2 L3 M1 L2 L3 M1 TMH ASD AS D2 D2 L1 L1 AS-FE KE L4 AS-FG L4 AS-FP H (Hexagon width across flats) H (Hexagon width across flats) AS-FM AS-FM D3 D3 AS-D L5 A1 L5 A1 A2 D1 D1 AS-T A2 ASP T ASN T AQ ASV Inch Size AK L4 L5 (1) A1 (2) A2 (2) M1 Max.
D2 L1 L1 L4 L4 H H (Hexagon width across flats) (Hexagon width across flats) AS D3 D3 ASP L5 A1 L5 A1 A2 D1 D1 ASN A2 AQ T ASV T AK ASS Inch Size ASR L4 L5 A1 A2 M1 Max.
H (width across flats) D3 D3 L5 A1 L5 A1 A2 D1 D1 A2 T T Inch sizes L4 L5 A1 A2 M1 Max.
Wall LEF x y LEJ LEJ x z LEL x 2. Bottom 4. Vertical LEM z y x y z LEY Example LES 1. Operating conditions Model: LEJS Size: 40 Mounting orientation: Horizontal Acceleration [mm/s2]: 5000 Work load [kg]: 20 Work load center position [mm]: Xc = 0, Yc = 50, Zc = 200 2. Select the graph on page 127, top and left side first row. LEPY LEPS 3. Lx = 220 mm, Ly = 210 mm, Lz = 430 mm 4.
A1 D1 L5 D1 AS-D A2 AS-T T ASP T ASN AQ Metric Size ASV L4 (1) L5 (1) A1 (2) A2 (2) M1 Weight (g) Max.
Axis 1: Target position X Axis 2: Target position Y Axis 3: Rotation center position X Axis 4: Rotation center position Y CIR-R*1 u With Axis 1 assigned to the X-axis and Axis 2 to the Y-axis, it moves in the counter-clockwise direction by circular interpolation.
A1 D1 L5 D1 A2 T T Metric size L4 L5 A1 A2 M1 Max.
. 1 2 3 Circuit Cable color U V W Red White Black Connector A2 terminal no.
Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations
0.8, R threads after installation. 15-9-55 14 Series ASD-FG Dimensions: Inch Size ASD230FG ASD330FG/430FG ASD530FG/630FG Applicable tubing O.D. d Applicable tubing O.D. d L2 L3 M1 L2 L3 M1 D2 D2 L1 L1 L4 L4 H H (Hexagon width across flats) (Hexagon width across flats) D3 D3 L5 A1 A2 A1 D1 L5 D1 A2 T T Inch Size L4 L5 A1 A2 M1 Max.
Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations
A part z1 m1 = 20 x 3 x 4 x 2.7 x 10-6 = 6.48 x 10-4 (kg) Weight calculation m1 = a x b x c x Relative density IZ1 Inertial moment around Z1 axis IZ1 = {m1 (a2 + b2) / 12} x 10-6 = {6.48 x 10-4 x (202 + 32)/12} x 10-6 = 2.21 x 10-8 (kg.m2) = 2.21 x 10-8 + 6.48 x 10-4 x 16.42 x 10-6 = 0.20 x 10-6 (kg.m2) IA Inertial moment around Z axis IA =IZ1 + m1r12 x 10-6 z f2 z2 B part r2 = 23.5(mm)
2 12 x 2 16 x 2 20 x 2 25 x 2 11 or equivalent 17 or equivalent 22.6 or equivalent 28.3 or equivalent 35 or equivalent Port Size M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc (PT) 18 Rc (PT) 18 Fluid Air Action Double Acting Op.
BS* X X X BT* X X X X B* X X X X X *End lock and shock absorber options are not available for MXS6 Note 1) When buffer is used in conjunction with extension stroke adjust, stroke adjustment will limit stroke of buffer. Applicable auto switch lead wire length(m) Load voltage Auto switch part No.
Conductive silicone (black w/mark) tl In$fllinhffimffi Pb""","t"'t W,,Umtmf*, t Uentical IyF Uacuum Entny: tll|ithout Bulfen Specif ications Verticaltype Male thread l Female tfrread ,a2:..-',iz g: .', ,T:;l6a NIsx0.8,Nr6x1 M 4 x 0 7 , M 5 x 0 . 8 [ 4 5 x 0 . 8 , M 6 x 1 M5x0.8,1V16x l,1/g s20 s32 M 6 x l , M B x 1 M5 x 0.8,N46 x 1.M8 x 1.25,1/s s40 o50 M 6 x 1 , [ , 1 8 x 1 M G x 1 , M 8
Conductive silicone (black w/mark) tl In$fllinhffimffi Pb""","t"'t W,,Umtmf*, t Uentical IyF Uacuum Entny: tll|ithout Bulfen Specif ications Verticaltype Male thread l Female tfrread ,a2:..-',iz g: .', ,T:;l6a NIsx0.8,Nr6x1 M 4 x 0 7 , M 5 x 0 . 8 [ 4 5 x 0 . 8 , M 6 x 1 M5x0.8,1V16x l,1/g s20 s32 M 6 x l , M B x 1 M5 x 0.8,N46 x 1.M8 x 1.25,1/s s40 o50 M 6 x 1 , [ , 1 8 x 1 M G x 1 , M 8