Vacuum

Panel mounl adapter H i s h-p reci s io n D i s *"l?

Valve Single Unit

Series SX3000/5000/7000 Body Ported Valve Single Unit How to Order 5 L N SX 5 1 20 01 Series Bracket 3 SX3000 5 SX5000 Nil: Without bracket F1: With foot bracket 7 SX7000 Type of actuation 2 position single 1 2 position double F2: With side bracket 2 Manual override Nil: Non-locking push type 3 position closed center 3 Thread type Nil Rc 3 position exhaust center G F D: Push-turn locking

F

E R S E R I E S (N)AS1000-4000 S Y M B O L S NAS 3 000 A R E A C O D E Japan, Asia, Australia, UK N Canada, USA P O R T T H R E A D P A N E L M O U N T V E R S I O N R(PT) N NPT B O D Y S I Z E P O R T S I Z E 1 M3, M5 2 1/8, 1/4 Standard 3 3/8 Standard 4 1/2 Standard M3 M3x0.5 M5 M5x0.8 01 1/8 (10-32Nom) 02 1/4 03 3/8 04 1/2 T E C H N I C A L SPECIFICATIONS D I M E N S I O N S S E R I E

Manifold Specifications

VV5ZS2 01 06 51F 1 D Thread type VK Series VZS2000 Manifold Standard Nil NPT Rc N T F VZ Plug-in type Stacking type manifold base with D-sub connector Option NPTF G Port size VF Rc 1 8 01 U side Connector mounting direction VFR Embedded type One-touch fitting Applicable tubing O.D.: 4 C4 Connector mounting position Symbol Applicable stations C6 Embedded type One-touch fitting Applicable tubing

CYP

L R S Piping port position Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model.

CYPSeries

L R S Piping port position Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model.

CYPSeries

L R S Piping port position Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model.

AIR COMBINATION

ATTACHMENTS / ACCESSORIES OPTIONS PART NUMBER Attachments / Accessories (Options) part number Section Model Descriptio For AC10*-A For AC20*-A For AC25*-A For AC30*-A For AC40*-A For AC40*-06-A Note1) Pressure gauge Standard G27-10-01 G36-10-01 G46-10-01 Round type G27-10-01 Note2) G36-4-01 G46-4-01 0.2 MPa setting Round type Standard G36-10-01-L G46-10-01-L Option G36-4-01-L G46-4-01-L

JXCx-OMY0004

Current limit is exceeded (01-148) Over load D RESET SVON Make sure there are no obstructions that interfere with the actuator movement. Also, make sure that the load, speed, acceleration and deceleration are within the range of the actuator.

VDW

Enter together in order, counting from station 1 on the D side.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

-L) 98 17 2.8 depth 6.2 2.5 depth 5 PF2M711/721S-F2(-L) 106 21 2.8 depth 6.2 2.5 depth 5 PF2M7mW-m1/2(-L) A D 58 48 18 OUT1 OUT2 10.2 DC() DC(+) 1.4 46.9 (Max. 53.9) 38.5 (30.9) 3 C 18 2 x 3.4 Width across flats B 2 x Port size Port size: 1, 2 OUT IN 68 [mm] 28 Model A C B D P PF2M705/710/725/750W -01(-L) 86.2 11 14 18.2 2.8 depth 8.4 PF2M705/710/725/750W -N1(-L) 86.2 12 14 18.2 2.8 depth

Table of Contents

Negative common specifications L dimension How to order negative COM manifold 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L dimension L kit: 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. VV5Q13 L 08 N N 1 D L dimension 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

Manifold Specifications

VK Rc 1/8 Applicable solenoid valve How to Order Type 41 VZ VV5Z5 05 41 1 01 G L M D VZ54VF 4(A), 2(B) Port size P, R port thread type Applicable blanking plate assembly DXT199-22-1A Applicable individual EXH spacer assembly DXT199-29-2A Applicable individual SUP spacer assembly DXT199-35-1A Applicable interface regulator ARBZ5000-00-P Stations VFR 1(P) port Rc 1/4 02 2 stations 01 Rc1 8

E-P HYREG

size Port size Rc Option Applicable pilot valve (4) Mounting Port 1(P), 2(A) Port 3(R) 00 M5 00 M5 01 00 01 02 00 02 03 04 M5 01 02 02 03 04 04 06 10 10 12 14 20 Without sub-plate M5 Without sub-plate M5 D B 1 8 Without sub-plate Symbol Base mounted 2 1 8 1 4 Internal pilot VY1D0 (5) Without sub-plate 1 4 4 3 8 1 2 A (3) (3) M5 3(R) 1 8 2(A) 1(P) 1 (3) (3) 1 4 1 4 3 3 8 External pilot 1

Direct Solenoid

D ENSIONS A B c D E F 2.66 (67.5) 2.42 (61.5) (14) 0.28 17', 0.16 (4) 1.42 (36) ,ltrF-l rD C Solsnoid DIN "Electricrl Connector" 'AC" Vottage only ml--l l "*---l-l I .f;T.

HRX-OM-W002

70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential item Ammonium ion [mg/L] 0.1 or less 1.0 or less Residual chlorine [mg/L] 0.3 or less 0.3 or less Free carbon dioxide [mg/L] 4.0 or less 4.0 or less

Speed Controller: Standard Type Series AS In-line Type

-D Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

JXCx-OMT0005CN

DRV C RESET <> 66 - <>12 1 [] A [a ] (01-103) [] C RESET 2 [SW] A [a ] <> <> (01-144) D RESET SVON <> <> <>(M24V) (01-145) D RESET SVON <> <> <> (01-146) D RESET SVON <> 67 - <> <>(DC24V) D RESET SVON (01-147) <> <> <> (01-148) D RESET SVON <> <> (01-149) D RESET SVON <> <> Communicati on error. (01-150) D RESET SVON <> (01-192) E <> <> <> ON(SVON ON)

AIR COMBINATION

ATTACHMENTS / ACCESSORIES OPTIONS PART NUMBER Attachments / Accessories (Options) part number Section Model For AC10*-A For AC20*-B For AC25*-B For AC30*-B For AC40*-B For AC40*-06-B For AC50*-B For AC55*-B For AC60*-B Descriptio Round type Standard G27-10-R1 G36-10-01 G46-10-01 Note1) Pressure gauge G27-10-R1 G36-4-01 G46-4-01 0.2 MPa setting Round type Standard G36-10-01-L G46-10-01-L

AS-FG/ASD-FG

Dimensions Metric size Inch size Model d Weight g D1 D2 L1 L2 L3 Model d Weight g D1 D2 L1 L2 L3 Max. Min. M1 Max. Min.