Vacuum

Conductive silicone (black w/mark) tl In$fllinhffimffi Pb""","t"'t W,,Umtmf*, t Uentical IyF Uacuum Entny: tll|ithout Bulfen Specif ications Verticaltype Male thread l Female tfrread ,a2:..-',iz g: .', ,T:;l6a NIsx0.8,Nr6x1 M 4 x 0 7 , M 5 x 0 . 8 [ 4 5 x 0 . 8 , M 6 x 1 M5x0.8,1V16x l,1/g s20 s32 M 6 x l , M B x 1 M5 x 0.8,N46 x 1.M8 x 1.25,1/s s40 o50 M 6 x 1 , [ , 1 8 x 1 M G x 1 , M 8

Series VQ Base Mounted Metal Seal/Rubber Seal

When part nos. written collectively are complicated, specify by using a manifold specification form. 2 position double G L LO M MO Grommet (Except for AC) 3 position closed center L plug connector with lead wire 3 position exhaust center 3 position pressure center (VQ1000 only) L plug connector without connector M plug connector with lead wire Body M connector without connector Plug

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

driving size EVS1-01 (Size: 01) EVS1-02 (Size: 02) 100 80 1000 l/min (ANR) 400 l/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Lightweight Size 01 (3 position): 0.26 kg Size 02 (3 position): 0.18 kg 3-11-11 12 ISO Standard Solenoid Valve Size 1,2/Single Unit Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 Courtesy

Sine Cylinder Series REC

M 3 m L 5 m Z None N Solid state auto switches marked with are produced upon receipt of order.

Sine Cylinder Series REC

M 3 m L 5 m Z None N Solid state auto switches marked with are produced upon receipt of order.

F

B O L S NAS 3 000 A R E A C O D E Japan, Asia, Australia, UK N Canada, USA P O R T T H R E A D P A N E L M O U N T V E R S I O N R(PT) N NPT B O D Y S I Z E P O R T S I Z E 1 M3, M5 2 1/8, 1/4 Standard 3 3/8 Standard 4 1/2 Standard M3 M3x0.5 M5 M5x0.8 01 1/8 (10-32Nom) 02 1/4 03 3/8 04 1/2 T E C H N I C A L SPECIFICATIONS D I M E N S I O N S S E R I E S (N)AS4000 D I M E N S I O N S S E R

SFOD-OMT0005CN

<> (01-144) D RESET SVON <> <>(M24V) (01-145) RESET SVON D <> <> <> RESET SVON (01-146) D <> -65- <> <>(C24V) RESET SVON (01-147) D <> <> <> (01-148) RESET SVON D <> <> (01-149) D RESET SVON <> () Communicati on error. (01-150) D RESET SVON <> (01-192) E <> <> <> ON(SVONON) (01-193) E <>ON(SVON ON) <> Output current limit is exceeded set value (

Table of Contents

Flat Ribbon Cable Assembly D-sub Connector Cable Assembly 10P 16P 20P Pins Cable length (L) 1.5 m 15P AXT100-FC10-1 AXT100-FC16-1 AXT100-FC20-1 Pins Cable length (L) 1.5 m 3 m AXT100-FC10-2 AXT100-FC16-2 AXT100-FC20-2 AXT100-DS15-1 5 m AXT100-FC10-3 AXT100-FC16-3 AXT100-FC20-3 3 m AXT100-DS15-2 17.2 24.8 30 5 m AXT100-DS15-3 Connector width (W) For other commercial connectors, use a type

CYPSeries

5 CYP32 (Nm) M1 M2 M1 0.3 3 M2 0.6 4 M3 0.3 3 Model CYP15 CYP32 m m Static moment Moment generated by the work piece weight even when the cylinder is stopped M Pich moment M1 = m x g x (L + B) x 103 M Yaw moment M3 = m x g x (L + A) x 103 M Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance

CYPSeries

5 CYP32 (Nm) M1 M2 M1 0.3 3 M2 0.6 4 M3 0.3 3 Model CYP15 CYP32 m m Static moment Moment generated by the work piece weight even when the cylinder is stopped M Pich moment M1 = m x g x (L + B) x 103 M Yaw moment M3 = m x g x (L + A) x 103 M Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance

CYP

5 CYP32 (Nm) M1 M2 Model CYP15 CYP32 M1 0.3 3 M2 0.6 4 M3 0.3 3 m m Static moment Moment generated by the work piece weight even when the cylinder is stopped Pich moment M1 = m x g x (L + B) x 103 Yaw moment M3 = m x g x (L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

(L + A) x 103 Roll moment M2 = m x g x (L + B) x 103 (mm) Model CYP15 CYP32 A 16.5 27.0 B 25.5 48.0 L B L B L A M1, 2, 3 : Moment [Nm] m : Load mass [kg] L : Distance to load center of gravity [mm] A, B : Distance to guide shaft [mm] g : Gravitational acceleration [9.8 m/s2] M2 M1 M3 m x g m x g Guide shaft mounting surface Guide central axis m x g Cylinder central axis Dynamic Moment Moment

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VZA4221-01 VZA4321-01 VZA4421-01 VZA4141-1-01 VZA4141-1-02 VZA4141-2-01 VZA4141-2-02 VZA4241-1-01 VZA4241-1-02 VZA4241-2-01 VZA4241-2-02 VZA4341-1-01 VZA4341-1-02 VZA4341-2-01 VZA4341-2-01 VZA4441-1-01 VZA4441-1-02 VZA4441-2-01 VZA4441-2-02 Single Double Closed center Exhaust center 0.44 0.44 0.44 0.44 0.25 0.25 0.25 0.25 1.7 1.7 1.7 1.7 0.49 0.49 0.47 0.47 0.14 0.14 0.15 0.15 2.0 2.0 1.9

Direct Solenoid

't;"iii:l:lr:'ir'i' .l l:r':].l:'.:ri:]"r''irr':''i ' r.i' 'r "i "" ' r' ,.it:.i:ur,,r':.,'l:.,t:i:rr'].i:,i::.!t'.:.,i,l.:a,,l'.::ra,'.i,," " . r' i l ,,,.:,:].::.i::.::rl::]rr:,;,:::t,:,,,t,.i:.i:t.:fi:l':,rill..ia,it,"l'-'.:l:...:', ,'l.it:la:::lt]i:ri:t,:i;:i.:i:.,'i:r':::l'.'rt:ail.:r'.,t'...':.':r:'ir . ,,,lri:,,j:li:.l'..i.,i',i.].'..i'1.'rt...i.i.1,.j,.: j..i riir',: .,,, I . .

REC

Example) If P=0.6MPa, a max. stroke =the respective 0.6 stroke in the graph X 0.5 Figure q 49 45 39 30 0.7 Front flange: F Rear flange: G 259 237 211 168 0.3 Foot: L L 199 183 162 129 0.5 W W W F 168 154 136 109 0.7 Load factor h 119 110 97 76 0.3 m 90 83 73 56 0.5 G 74 68 60 46 0.7 1) h=0.7 or less m 2) h=0.5 or less m 3) h=0.9 or less 1) In the case where cylinder is used for static action

Gun Type Ionizer

Static Neutralization Characteristics e Pressure Flow Rate Characteristics IZS40/41/42 IZT40/41(-L)/ 42(-L)/43(-L) IZN10E IZF IZG10 ZVB IZD10/IZE11 IZH10 Antistatic Equipment IZG10-mm-01/IZG10-mm-02 Mode setting switch: Continuous blow 500 450 400 Flow rate [L/min (ANR)] 350 Flow setting: Max.

HRX-OM-Q026

less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ionic silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Should not be Should not be Referential detected any detected any item Ammonium ion [mg/L] 0.1 or less 1.0 or less Residual chlorine [mg/L] 0.3 or less 0.3 or less Free carbon dioxide [mg/L]

Modular Type Regulator Series AR

5000 10 Flow rate L/min (ANR) Flow rate L/min (ANR) Orange mark AR30 Rc 3/8 AR60 Rc 1 0.6 0.6 0.5 0.5 2.

Flow Control Equipment

-01 AS22l0M-02 0.8 Supply pressure 0.5MPa Supply pressure 0.5MPa Supply pressure 0.5MPa 50 10 20 0.15 0.3 Effective area (mm2) Air flow (l/min(ANR)) Air flow (l/min(ANR)) Air flow (l/min(ANR)) 40 Effective area (mm2) Effective area (mm2) 0.6 0.1 0.2 30 0.4 5 10 20 0.05 0.1 0.2 10 0 Number of needle rotation (Turns) 5 10 0 0 0 0 0 Number of needle rotation (Turns) 5 10 Number of needle rotation

HRX-OM-M090

[mg/L] 70 or less 200 or less Calcium hardness [mg/L] 50 or less 150 or less Ion silica [mg/L] 30 or less 50 or less Iron [mg/L] 0.3 or less 1.0 or less Copper [mg/L] 0.1 or less 0.3 or less Sulfide ion [mg/L] Not detected Not detected Referential Ammonium ion [mg/L] 0.1 or less 1.0 or less item Residual chlorine [mg/L] 0.3 or less 0.3 or less Separation carbonic acid [mg/L] 4.0 or less