MXS Series Air Slide Table

L A93L Note) Refer to P. 177 to 179 for further information of auto switch. PLC: Programmable Logic Controller Specifications Specifications are same as the standard type.

CY1F

Centralized piping on right L R R L R L Slide table actuation direction Centralized piping on left R L L R R L Slide table actuation direction 4. Never disassemble the magnetic component parts (external slider, internal slider) of the actuator (cylinder). If will cause decline of the holding force, etc. 2.

ZSE F/ISE

22 L For positive pressure ZSE60 A2 M F L 22 For compound pressure Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Piping specifications Option A2 B2 URJ 1/4, Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 8-16-8

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

m P 0.1 x m + m P D 1.6 x D 5.0 x D 5.0 x m m mv P Pv m > mv P > Pv Determination of allowable load mass & pressure Inclined operation (Refer to page 8-16-8

V

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

I

Proof 65 3 Wire Output PNP 25 3 Wire Output NPN 26 3 Wire Analog Output P I P I N G S P E C I F I C AT I O N S 01 Direct Piping 1/8 PT T1 NPTF 1/8 H O W T O O R D E R P O S I T I V E P R E S S U R E S W I T C H S E R I E S ISE4 ISE4 B D W I R I N G S P E C I F I C AT I O N S O P E R AT I N G P R E S S U R E L Grommet Entry 3m Lead 0.6m -0.1 ~ 1MPa L -10 ~ 100KPa DIN R A I L M O U N T I N

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

L Rubber stopper screw Switch rail Mounting tap L Stud fastening: After a temporary tightening, tighten an additional 1/4 turn. Metal stopper screw L Shock absorber 8-9-16

Rotary Cylinder Series MRQ Size: 32, 40 1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com F1 = x A1 x P (1) F2 = x A2 x P (2) A1 = D2 (3) 4 A2 = (D2 d2) (4) 4 F1 = Cylinder force generated on the extending side (N) F2 = Cylinder force generated on the retracting side (N) = Load rate A1 = Piston area

SMC Electronic Switch Series Variations

Operating humidity range P.3.14-3 Vacuum breaking pressure Full scale Operating indicator light P.3.14-5 P.3.14-4 Voltage resistance Full span Operating pressure range Operating temperature range Operating voltage G W Orifice Gas contact part Wind comparator mode P.3.14-5 P.3.14-3 P Grommet Panel mounting H Z Peak indication part P.3.14-4 PNP output Hysteresis Zero out (Zero

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

1

C0.5 file chamfer C WA DA F L X L R sphere F X X L R sphere TP H1 L T W1 L T L W1 L L 6-17-10 6-17-11 10 Simple Specials -XA1 to XA38: Change of Rod End Shape These changes are dealt with Simple Specials System.

lPSMt

Steel) Pressure Gauge For OUT 1, OUT 2 pressure range 0-150 psi, 1/8 NPT G43-P10-N01 or KSlOB-AD11 (St.

lPSMt

Steel) Pressure Gauge For OUT 1, OUT 2 pressure range 0-150 psi, 1/8 NPT G43-P10-N01 or KSlOB-AD11 (St.

•

L RR,IU1 E, A, L, t MM NX Part no A2 NDHIO boreSlzc Dl!:;;I~ '!I!

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

= m 12 a2 = m1 +m2 3 a12 3 a22 12 4a12 + b2 = m1 CRBU2 12 4a22 + b2 + m2 CRB1 7.

LECP6_C

LED() /P.18 5.CN1: PLC /P.24 6.3 / / CN1 CN5 / DC24V /P.16 4. /P.27 6.4 I/O /P.48 12. ONOFF /P.11 3. /P.48 12. / CN1 CN5 / DC24V /P.16 4. /P.27 6.4 I/O /P.14 3.4 63 - /P.28 7. (CN1: /P.11 3. EMG ) SV1.00 INP ON INP OFF (INP PLC ) /P.24 6.3 / /P.11 3.

17

(1) Common G 60 80 100 Applicable cylinder MY1B25 MY1B32 MY1B40 G H JJ L P LD Part no.

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: P [Units Selection Function (Initial Value psi)], Under New Measurement Act Selection Function not Permitted for use in Japan, Piping Specification: N01 (NPT1/8), Connector Type: S (M12 Connector Type), Bracket: None, Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)

Output Specification: IO-Link/Switch: 1 Output, PNP or NPN, Unit Specification: P [Units Selection Function (Initial Value psi)], Under New Measurement Act Selection Function not Permitted for use in Japan, Piping Specification: N01 (NPT1/8), Lead Wire: W (Lead Wire w/Connector, 5-core, 2m Lead Wire w/Waterproof Cover)