Vacuum Unit

Note Example Symbol Type E J K L P W Nil Without option V V V V B With DIN rail mounting bracket4 V V V V ZK2C10R5NC1A-08 ZK2C07R5NC1A-08 D With common release pressure supply (PD) port V V V 5 V Cannot be selected ZZK204A-A1P-B when r is N L Manifold individual supply specification V V V 5 V Individual supply port 1 2 3 Stations D side U side 3 When more than one option is selected

NCM

Weight Unit: g Auto Switch Internal Circuit D-M9NW(V) D-M9NW(V) D-M9PW(V) D-M9BW(V) Auto switch part no.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VQZ3000 VFS VS 0.7 0.9 VS7 Bore size (mm) Cylinder speed (mm/s) Base mounted (With sub-plate) Cv Series CJ2 Series CM2 Series CA1 6 10 16 20 25 32 40 40 50 63 80 100 150 300 VQZ1000 Body width 10 450 0.3 V V V 600 750 150 300 VQZ2000 Body width 15 0.6 450 V 600 V V 750 150 300 VQZ3000 Body width 18 0.9 450 V V V V V 600 750 Cylinder speed marked with can be controlled by speed controller

Air Cylinder Series CM2

PNP) 2-wire 4-wire (NPN) 5 V, 12 V 12 V IC circuit Relay, PLC Terminal conduit Yes 24 V Diagnostic indication (2-color) 5 V, 12 V IC circuit Grommet 12 V 5 V, 12 V IC circuit With diagnostic output (2-color) 3-wire (Equiv.

VQZ1000/2000/3000

AN110-01 AN200-02 AN200-02 AN110-01 For a silencer to be mounted in a single valve unit, refer to page 2-7-5.

2/3 Port Valve for Various

Apparent power (VA) Volt-ampere is the product of voltage (V) and current (A). Power dissipation (W): For AC , W = V/A cos. For DC, W = V/A (Note) cos shows power factor. LVD LVQ 2. Surge voltage The surge voltage is a high voltage generated momentarily when cutting the power supply. LQ 3.

AIR COMBINATION

ATTACHMENTS / ACCESSORIES OPTIONS PART NUMBER Attachments / Accessories (Options) part number Section Model Descriptio For AC10*-A For AC20*-A For AC25*-A For AC30*-A For AC40*-A For AC40*-06-A Note1) Pressure gauge Standard G27-10-01 G36-10-01 G46-10-01 Round type G27-10-01 Note2) G36-4-01 G46-4-01 0.2 MPa setting Round type Standard G36-10-01-L G46-10-01-L Option G36-4-01-L G46-4-01-L

Valve Single Unit

(g) n: Stations W = 30n + 50 W = 37n + 63 W = 61n + 101 W = 79n + 127 W = 100n + 151 Note) For more than 10 stations, supply pressure to P port on both sides and exhaust from EA and EB port on both sides.

VDW

1 o w !0 !1 e r w e u r u t t y q y q Component Parts Description Material No.

VQ4000

DIN type 5 pins Number Description Function Description Function 2 SW+ Number 1 Sensor power supply + Open 2 3 4 For solenoid valve +24 V 1 SV24V N.C. 2 1 VQC 3 For solenoid valve 0 V 2 SV0V SW 3 Sensor power supply Protective ground 3 PE SIGNAL 4 Sensor input signal 4 1 5 5 SQ For input block + 24 V, For input unit and SI unit + 24 V 4 SW24V PE 5 Protective

modular-press-e

Straight type V Elbow type Fitting size One-touch fittings for regulator Straight V 2.5 3 6.5 Elbow W 6 6.5 6 Elbow X 11 11 11.5 Elbow Y 35.5 36 38.5 4, 5/32 6 1/4 8, 5/16 W X Y Note) The O-ring is attached.

Modular F.R.L. Pressure Control Equipment

Straight type V Elbow type Fitting size One-touch fittings for regulator Straight V 2.5 3 6.5 Elbow W 6 6.5 6 Elbow X 11 11 11.5 Elbow Y 35.5 36 38.5 4, 5/32 6 1/4 8, 5/16 W X Y Note) The O-ring is attached.

ARM10/11

t y w F.R.L.

ARM10/11

t y w F.R.L.

VQ20/30

Power wave form of power-saving type (Rated voltage at 24 VDC) Applied voltage 24 V Applicable cable Cord O.D.: 3.5 to 7 (Reference) 0.5 mm2 2-core and 3-core wire equivalent to JIS C 3306. 0 V 10 to 20 ms 2.9 W Ground nut Tightening torque 1.65 to 2.5 Nm Washer Power-saving Tightening screw Tightening torque 0.3 to 0.4 Nm 0.6 W 0 W AC circuit Grommet (Rubber) Housing Lead wire color DIN

Clean Room Rodless Cylinder Series CYP ø15, ø32

Auto switch model Electrical entry direction Lead wire length (mm) Load voltage Type Electrical entry Indicator light Wiring (Output) Special function Applicable load 5 (Z) AC DC 0.5 (Nil) 3 (L) Perpendicular In-line Z76 5 V IC circuit 3-wire Yes Reed switch Z73 12 V 100 V Grommet Relay, PLC 24 V 2-wire Z80 5 V, 12 V 100 V or less No IC circuit Y69A Y59A 3-wire (NPN) IC circuit 5 V, 12

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Auto switch model Electrical entry direction Lead wire length (mm) Load voltage Type Electrical entry Indicator light Wiring (Output) Special function Applicable load 5 (Z) AC DC 0.5 (Nil) 3 (L) Perpendicular In-line Z76 5 V IC circuit 3-wire Yes Reed switch Z73 12 V 100 V Grommet Relay, PLC 24 V 2-wire Z80 5 V, 12 V 100 V or less No IC circuit Y59A Y69A 3-wire (NPN) IC circuit 5 V, 12

•

Approximate response time uptc the tIme of W: Lift force (kgf) P: Vacuum pressure(mmHg) S: Pad area (c m2) adsorption will be worked out by following the equation below. Calculation of suction flow rate OCalculation 01 Ejector/ average suction flow rate. 01 = ( ~ ~'3) 0 max.

AIR COMBINATION

ATTACHMENTS / ACCESSORIES OPTIONS PART NUMBER Attachments / Accessories (Options) part number Section Model For AC10*-A For AC20*-B For AC25*-B For AC30*-B For AC40*-B For AC40*-06-B For AC50*-B For AC55*-B For AC60*-B Descriptio Round type Standard G27-10-R1 G36-10-01 G46-10-01 Note1) Pressure gauge G27-10-R1 G36-4-01 G46-4-01 0.2 MPa setting Round type Standard G36-10-01-L G46-10-01-L

ASR

AS 0 0.1 0.15 0.2 0.25 0.3 Return stroke pressure (MPa) ASP ASN v v w w a a o o l l v v l l F F e e AQ ASV u u r r e e s s v v s s a a e e l l v v r r P P e e AK ASS ASR ASF Working stroke Working stroke Return stroke Return stroke Pressure valve Flow valve 15-16-1 Cuts air consumption by operating the return stroke at a reduced pressure.