Rubber seal 5 Port Solenoid Valve Series SYJ5000

For connector cable of M8 connector, refer to page 90. 25 Series SYJ5000 Construction 2 position single 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) e w q t r q y t rw (A) 4 (B) 2 (A) 4 (B) 2 i 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) i u 3 position closed center/Exhaust center/Pressure center 3 position closed center (A) 4 (B) 2 q t rw 5 (R1) 3 (R2) 1

Modular Type Regulators Series AR

2.3 2.3 2.3 U 55 53 70 W M28 X 1 M38 X 1.5 M42 X 1.5 AA 25 31 35.5 E 57 59 68 F 26.5 31 36 Q 5.4 6.5 8.5 X 6 7 7 Y 14 19 21 Z 28.5 38.5 42.5 H -2 3.5 3.5 P 44 46 54 AR20 AR30 AR40 Accessories Panel Mounting Nut (Optional) AR20P-260S AR30P-260S AR40P-260S Mounting Bracket Kit (Optional) AR20P-270AS-X48 AR30P-270AS-X48 AR40P-270AS-X48 Model AR20 AR30 AR40 D E 2 A C F IN OUT AA H P J Q V S W

Free Mount Cylinder Series CU

switch Reed switch Relay, PLC 12 V Grommet 24 V Yes 5 V, 12 V Diagnostic indication (2-color indication) 12 V IC circuit IC circuit 3-wire A96 A96V (NPN equivalent) 5 V 12 V Yes 24 V Grommet Relay, PLC A93 A90 A93V A90V 100 V 2-wire No 100 V or less Solid state auto switches marked with are produced upon receipt of order.

VXA21/22

VX t Vaccuum pressure (Torr) The absolute pressure is expressed. 0 Torr=Absolute pressure 0.760 Torr=Atmospheric pressure (Gauge pressure 0 Kgf/cm2) (1 torr=1.33 X 102 Pa) VNl VQ Electrical Terms q Volt-ampere(VA) Volt-ampere is the product of voltage (V) and current (A). Power dissipation (W): For AC , W=V/A cos.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

(P) (R2) 3 1 5 (R1) 1 (P) 5 (R1) (R2) 3 e q w r e q w r 4 (B) 2 (A) (B) (A) 4 2 VQ4300 VQ4301 3 1 (P) (R1) (R2) 3 5 1 (P) 5 (R1) (R2) (B) (A) 4 2 4 (B) 2 (A) VQ4400 VQ4401 1 (P) (R1) (R2) 3 5 1 (P) 5 (R1) (R2) 3 (A) 4 2 (B) 4 (B) 2 (A) VQ4500 VQ4501 1 (P) 5 (R1) (R2) 3 1 (P) (R1) (R2) 3 5 Component Parts Component Parts Description Material Note Number Body Spool/Sleeve Piston Description

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Vacuum Module Series ZX

Rc 1/8 Port exhaust Silencer exhaust 11.5 27 20 PD 8 13 (33.2) Bracket B ZX1-OBB V 2 x 3.6 (Mounting hole) P (Standard accessory) Release pressure SUP port (PD) M5 (or M6) Plug Note) Air pressure SUP port (P) M5 (or M6) (55.4) 17 17.5 50 PD V P 18 8 6 10 2 x 3 (Mounting hole) Vacuum port (V) M5 (or M6) 1 3 5.4 Note 1) Remove the plug at external release.

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

P EXH V V V V PE ZQ1 1U-K1 5 6 E F F K E F F KType J1 ZQ1 1U-J1 (With L-type plug connector) Bracket A (Standard) Suction filter Vacuum pressure switch Supply valve 62.8 Pilot pressure exhaust (PE) port M3, Atmospheric release Note 4) 2 x 3.2 through (Body mounting hole) Air pressure supply (P) port M5 Note 4) 69.4 76.3 (63.1) (63.1) Vacuum (V) port (M5) Note 4) SMC PE 20.3 29.4 3 20.2 P

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

CNP3 CNP3 V V W W 9 3 9.

Shock Absorbers and Rate Controls

(otaloq l{0, lltlodell trl tl P 0 R 5 T U v w x CR 6.59 ?

Membrane Air Dryer

OUT IN Purge air for dehumidification Option With fitting for purge air discharge (Option: P) M V IN Purge air for dehumidification IDG3, 5 IDG3H, 5H IDG10, 20 IDG10H, 20H Option Option With fitting for purge With fitting for purge o t air discharge air discharge (Option: P) (Option: P) t plug IN OUT OUT IN !

NCQ8

Solid state switch Reed switch Yes 5 V A96V A96 Grommet A90V A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV A90 A93 M9N M9P M9B F9NW F9PW F9BW F9BA 100 V 5 V, 12 V 12 V IC circuit Relay, PLC No 2-wire 24 V Yes 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 24 V 5 V, 12 V IC circuit Grommet 12 V Relay, PLC Yes IC circuit Diagnostic indication (2-color display) 5 V, 12 V Grommet 12 V 2-wire

HRX-OM-X084

Contents 9.4 Cooling capacity . 9-9 9.4.1 HRR010-A -10. 9-9 9.4.2 HRR010-W-10. 9-9 9.4.3 HRR010-A -20. 9-10 9.4.4 HRR010-W-20. 9-10 9.5 Heating capacity . 9-11 9.5.1 HRR010-A-10. 9-11 9.5.2 HRR010-W-10. 9-11 9.5.3 HRR010-A-20. 9-12 9.5.4 HRR010-W-20. 9-12 9.6 Pump capacity. 9-13 9.6.1 HRR010-A/W-10 . 9-13 9.6.2 HRR010-A/W-10-T1 . 9-13 9.7 Required facility water flow (for water-cooled type

ZX

The needle will fall out if it is turned more than 4 full turns. 1 Connector (w/o lead wire) LO Without connector M Connector (0.3 m) MN Connector (w/o lead wire) MO Without connector G Grommet (0.3 m) H Grommet (0.6 m) 3 100 VAC 110 VAC 5 24 VDC 6 12 VDC V Pilot valve DC: 0.45 W (With indicator light: 0.5 W) AC DC: 1 W (With indicator light: 1.05 W) Nil 6 VDC S 5 VDC R 3 VDC Applicable

VQ20/30

Power wave form of power-saving type (Rated voltage at 24 VDC) Applied voltage 24 V Applicable cable Cord O.D.: 3.5 to 7 (Reference) 0.5 mm2 2-core and 3-core wire equivalent to JIS C 3306. 0 V 10 to 20 ms 2.9 W Ground nut Tightening torque 1.65 to 2.5 Nm Washer Power-saving Tightening screw Tightening torque 0.3 to 0.4 Nm 0.6 W 0 W AC circuit Grommet (Rubber) Housing Lead wire color DIN

Digital Flow Switches

Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin no. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.

VK3000

direction 01 1 station Solenoid on same side of A and B port A port: Rc 1/8 B port: Rc 1/8 Nil P port: Rc 1/8 Thread type R port: Rc 1/8 20 Type S42 Solenoid on same side of A and B port 20 stations Type VK334 Nil F N T Rc S Port size Type VK3140 G P port: Rc 1/8 1 8 01 Rc C6 6 cassette NPT R port: Rc 1/8 NPTF B port: Rc 1/8 A port: Rc 1/8 Common SUP/Individual EXH Type 21: Body ported (

NCM

= 75 PSI (Example) (Example) P = 75 PSI W W = 90 lbs P = 75 PSI Fig. (2) Fig. (1) W = 100 lbs Fig. (3) W Example 1: If the minimum force of 85 lbf is necessary to keep the workpiece pressed as shown in Fig. (1), because this is the extending side, use Graph (1) to determine the load factor of 0.7 and the operating pressure of 75 PSI.

Clean Room Rodless Cylinder Series CYP ø15, ø32

(port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P (port h)] HI HP H HL HG HT HS HB HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (port d)] Inner cover Note 3) holding screw (mm) K 21 20 JK 10 12 J M6 x 1 M10 x 1.5 HT 19.5 39 HS 27 49.5 HP