Modular F.R.L. Units High pressure 2.0 MPa (-X425) P.53 P.77 P.107 Low temperature 30 to 60C (-X430) P.53 P.77 P.106 High temperature 5 to 80C (-X440) P.53 P.77 P.106 Clean series (10-) P.54 P.63 P.80 P.80 P.111 P.111 Copper, fluorine and silicone-free + Low particle generation (21-) P.54 P.63 P.80 P.80 P.111 P.111 Related Product Modular adapter Example) Air filter + 3 port valve Easy modular connections for
500 to 600 to 600 to 750 to 750 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 CXS +0.3 +0.1 +0.3 +0.1 +0.3 +0.1 CXT +0.3 +0.1 MX Bore (mm) W/o rod boot W/ rod boot KA L LZ MM PG S N PH U P PL W H 51 58 58 71 72 PW RR J K Z 244 273 296 347 381 Z 252 281 304 356 390 ZZ 43 52 52 65 65 e 11.2 11.2 11.2 12.5 14.0 f 59 66 66 80 81 ZZ 14 18 18 22 26 h l 40 50 63 80 100 1/4 Stroke 1/4 Stroke
W D 1.6 x P 0.1 x W + W D 5.0 x P 20Data W W > Wv P > Pv Determination of allowable load weight & pressure Inclined operation (For vertical operation, refer to page 8-15-64.)
2 1 6 8 C J R Z W N AWD30 to 40 Accessory/Optional specifications B C D E G P 1 2 6 8 C J N R W Z With bracket (with set nut) Float type auto drain (N.C.)
VQ1000 Series P.1.10-124 P.1.10-128 P.1.10-132 Plug-in Plug lead VQ2000 Series P.1.10-124 P.1.10-128 P.1.10-132 VQ0 Series P.1.10-170 P.1.10-174 VQ1000 Series P.1.10-170 P.1.10-174 P.742 1.10-114 Manifold Variations T L C S Port size SUP EXH port Cylinder port kit kit kit Lead wire Direct electrical entry style Serial transmission unit Terminal box (Terminal block) SY P, R A, B Enables single-wire
for purge air discharge (Option: P) u t e q IN OUT i } r w y HA Purge air for dehumidification Purge air for dehumidification AT ID AMG Component Parts AFF Material Description No.
SYJ72R is only for manifold use. 4-4-38 39 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ700 Construction q e r t w y q e r t w y N.C. N.O. (A) 2 (A) 2 (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) i i V100 3 (R) 1 (P) 3 (R) 1 (P) SY u u SYJ VK Component Parts Replacement Parts VZ No.
Table Displacement (Reference Value) W L 0.08 LEFS32 (L = 30 mm) 0.06 Displacement [mm] LEFS25 (L = 25 mm) 0.04 LEFS16 (L = 20 mm) LEFS40 (L = 37 mm) 0.02 0 0 22.5 [100] 44.9 [200] 67.4 [300] 89.9 [400] 112.4 [500] Load W lbf [N] Note 1) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table.
~dth across flats 12 \ Appllcable tube 0.0. , p MBX.ds II ~\Width across ha ls 12 A "I \ APPhcable tube 0 .0. . p A w M6 X I.25 w .. ; 8 --, 0 0 u >1 ~ j uj >l l/' ~ .L Ud I .tll II PA .8 J Flat with rib Flat with rib Deep type/ ZPR25D only Deep type/ ZPR400 only a r H Width across flats 12 '.~ 11i. .f "'I ~'--:;~m2L I T ~l 1-'--' R \ APpl;cabla luba 0 .0. , p II:I!
D 2.8 x P First tentative bore size determination 0.3 x Wcos + Wsin D 5.0 x P 0.3 x W + W D 5.0 x P W W > Wv P > Pv Determination of allowable load weight & pressure (Refer to page 25 for vertical operation.)
N.O. 3(R) (P)1 3(R) (P)1 e t q r e t q r (A) (A) 2 2 u u 3 (R) 1 (P) 3 (R) 1 (P) w w y y Component Parts Replacement Parts Note Zinc die-casted Part no.
ARBF2000-00-P JIS Symbol Inlet pressure 0.7 MPa Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) B port regulation A port regulation P port regulation Flow rate (l/min (ANR)) ARBF5050-00-P ARBF3050-00-P ARBF4050-00-P 0.6 Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa 0.5 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.4 0.3 0.2 0.1
(B) (A)4 r r (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w e w q VQC1201 VQC1200 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) r r e q w e q w VQC1300 VQC1400 VQC1301 VQC1401 2(B) (A)4 2(B) (A)4 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) VQC1500 VQC1501 r r 2(B) (A)4 2(B) (A)4 (R1)5 1 (P) 3(R2) (R1)5 1 (P) 3(R2) e q w VQC1A01 VQC1B01
Note) Table 1 Table 2 Output type ON YES Hysteresis mode For air OFF P-1 P-2 Display Real-time flow rate l/min Accumulated flow l Higher flow rate "P" H H H (fixed hysteresis) = 3 digits CFM x 10ft x 10ON CFM = ft/min Window comparator mode NO OFF P-1 P-2 For water Higher flow rate OUT1 Output mode Accumulated flow l Display Real-time flow rate l/min ON YES The same for OUT2.
AC200230V AC100120V 40 AC100120V 6 AC200230V L 1 L 1 PE L 2 2-M5 2-M5 L 2 L 3 CNP1 CNP1 N N P 1 P 1 P 2 P 2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L 11 L 11 L 21 L 21 U U CNP3 V CNP3 V M5 3.24[Nm] W W 11 2 11 (2) LECSC-S8 [mm] 40 6 5 6 6 (80) 170 CNP1 () CN1 CNP2 CNP3 6 (68) (25.5) MR-J3BA MR-J3BAT 1.0[kg] .
W is width across flats dimension. (E) Class 6 Class 2 to 5 Metric sizes Inch sizes Connection threads Rc/NPT E H L M Min. port size W Y Connection threads Rc/NPT E H L M Min. port size W Y Model Applicable tubing O.D. Model Applicable tubing O.D.
Unit Series AC20C to 40C Dimensions AC20C A Pressure gauge port size G Q F E T L P B C H IN OUT U H L J Pressure gauge (Option) F.R.L.
N L ZZ + Stroke LS + Stroke N L CBM2G Bore size Stroke A Head flange: * -H -R -W Rod flange: CBM2F Bore size Stroke A * -H -R -W N L Z + Stroke Single clevis: CBM2C Bore size Stroke A -H -R -W N L Double clevis: CBM2D Bore size Stroke A -H -R -W N L ZZ + Stroke Z + Stroke + 1.2 0 + 1.2 0 ZZ + Stroke Z + Stroke + 1.2 0 + 1.2 0 CBM2U Bore size Stroke A Rod trunnion: * -H -R -W N L CBM2T
T X Y Connecting port position Z RB1B 63 90 S E XC1C30 Without auto switch W C P RB1B 63 90 S T79L XC1C30 W E With auto switch CD P With solenoid valve (Refer to page 70.) Vane type Made to Order symbol Rotation Auto switch Size Shaft type Standard W Patterned sequence ordering J Refer to page 71.
2 B P 1 P 1 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.