Made to Order

Except with auto switch Except with auto switch Except with auto switch w-1 From P. 1070 w-1 From P. 1468 w-3 From P. 389 w-2 From P. 432 w-2 From P. 520 w-2 From P. 538 w-2 From P. 578 w-2 From P. 737 w-2 From P. 749 Magnetically coupled rodless cylinder Rotary clamp Compact guide cylinder Compact guide cylinder Guide cylinder Guide cylinder Dual rod cylinder Note 1) Operate without lubrication

V

H E R M A N I F O L D O P T I O N S : L A T C H I N G S O L E N O I D T Y P E L A T C H I N G T Y P E V A L V E L A T C H I N G T Y P E V A L V E W I T H M A N U A L O V E R R I D E M A N I F O L D O P T I O N P A R T S A V A I L A B L E : P E R F E C T C H E C K B L O C K P E R F E C T C H E C K B L O C K W I T H V A L V E O R M A N I F O L D Courtesy of Steven Engineering, Inc. !

Compact 5-Port Solenoid Valve

Enclosure IP67*1 Pitch width [mm] Different pressures Reverse pressure Negative common Positive common 6.5 9 V G G V V v p. 132 v p. 132 v p. 132 v p. 133 v p. 133 v p. 133 v Individual SUP V External pilot External pilot 11.5 V 16 V *1 Refer to Manifold Specifications on pages 17 and 18 for details on IP67.

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Rated voltage S L Z For VX21: VVX21-3A-P For VX22: VVX22-3A-P For VX23: VVX23-3A-P Voltage With surge voltage suppressor With light and surge voltage suppressor AC/ DC Voltage symbol 1 2 3 4 7 8 J 5 6 With light 100 V 200 V 110 V 220 V 240 V 48 V 230 V 24 V 12 V Seal material: PTFE AC How to Order Manifold Assemblies (Example) Enter the valve and blanking plate to be mounted under the manifold

V100

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

Battery-less

LEFS v v E339743 v v v v 11-LEFS v v E339743 v v v v 25A-LEFS v v E339743 v v v v LEFB v v E339743 v v v v LEJS v v E339743 v v v v 11-LEJS v v E339743 v v v v 25A-LEJS v v E339743 v v v v LEJB v v E339743 v v v v LEY25/32/63 v v E339743 v v v v LEY100 v LEYG v v E339743 v v v v LESYH v v AC servo motor Compatible

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Load weight W (kg) MX 3. Operating pressure P (MPa) P 0.7 MPa MTS 4.

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San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Exhaust port Rc 1 25 Vacuum pressure gauge Exhaust port With vacuum pressure gauge ZL212-G P V Exhaust port Vacuum adapter Rc 1/8 7 With vacuum adapter ZL212-GN P V Vacuum pressure switch Exhaust port With digital vacuum pressure switch ZL212-E P V RESETSET ~ = ~ = 500 (L

ZP

Bracket Assembly Flat, Ball Joint Type Thin Flat Type with Ribs Deep Type q w e r t y u i Deep type t Buffer stroke q Vacuum inlet direction w Pad diameter Nil Pad unit T Vertical R Lateral (With One-touch fitting) Y Lateral (With barb fitting) 10 10 16 16 25 25 40 40 Stroke [mm] Pad diameter [mm] 10 16 25 40 10 V V V V 20 V V V V 30 V V V V 40 V V V 50 V V V V e Material N NBR S Silicone

Modular Design with Uniform Body Style

Series AWmK Series p. 76 p. 76 p. 94 p. 94 Port size Port size Port size Port size 1/8 1/4 3/8 1/2 3/4 1 1/8 1/4 3/8 1/2 3/4 1 1/8 1/4 3/8 1/2 3/4 1 1/8 1/4 3/8 1/2 3/4 1 Size 20 V V V V V V V V Size 30 V V V V V V V V Size 40 V V V V V V V V V V V V Size 40-06 V V V V Size 50 V V V V Size 60 V V V V V V Lubricator New Spacer p. 48 AL Series p. 87 Port size 1/8 1/4 3/8 1/2 3/4 1 Size 20

5 Port Solenoid Valve Series SY3000/5000/7000/9000

50/60 Hz 110 V 50/60 Hz 200 V 50/60 Hz 220 V 50/60 Hz M plug connector Sonic conductance C [dm3/(sbar)] L plug connector 24 V Note 4) Series M8 connector Pressure center 12 V DIN terminal Closed center Exhaust center 6 V Grommet 4/25/3 (A/BEA/EB) Double 5 V Single { } 3 V SJ P.108 SY3 20 0.65 SY Body ported Base mounted Body ported Base mounted SY5 20 2.4 SV SY7 20 3.3 SYJ SY9 20 SZ 8.6 P

Stability of suction position,

Flat type with groove (UM) Bellows type with groove (BM) 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EA-S1 V V V V V V ZP3EA-S2 V V V V V V V V w Holder Form/Diameter Part no.

smcmaintenancepartslist

12 V Solid state switch Relay, PLC 24 V Grommet Yes 12 V 5 V, 12 V 12 V 100 V or less 100 V IC circuit no Yes Relay, PLC 24 V 2-wire Reed switch Grommet 161 Sine Rodless Cylinder/Direct Mount Type Series REAR 10, 15 Replacement Procedure is P.316 Construction @2 @3 @6 @7 !

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D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

Smooth Cylinder/Low Speed Cylinder

Foot: CS2YL H K A AL F S + Stroke With rod boot Width across flats KA Port REA V W G G 2 x P (Rc, NPT, G) 4 x J Cushion valve MM REB REC D B E e LH LY CY CY 4 x LD CX f l LX Y N X LS + Stroke N X Y LT MQ B C ZZ1 + l + Stroke h + l ZZ + Stroke RHC (mm) RZQ Bore size (mm) Stroke range (mm) B C A AL B D E F G J V W K KA LD LH LS 125 140 160 50 47 143 143 115 32 71 43 15 M14 x 1.5 15 17 15 27

High Vacuum Angle Valve

XLS-16XLS-16-P XLS-25XLS-25-P Description w y r e-1 e-2 XLS16-20G, C, T, D XLS16-20-P G XLS25-20G, C, T, D XLS25-20-P G Coil assembly Core assembly Armature assembly O-ring O-ring XLS16-30-1 XLS16-30-2 AS568-018V AS568-025V XLS25-30-1 XLS25-30-2 AS568-018V AS568-030V Note 1) In case of coil assembly, please enter voltage symbol in .

Vacuum Unit

V V p. 13 Pressure switch for vacuum V Manifold Manifold p. 14 V V V With valve V V Single unit p. 15 V V Pressure sensor Vacuum Pump System V V V V With valve V V For Manifold p. 16 V V Pressure sensor V Manifold Manifold p. 17 7 C O N T E N T S Vacuum Unit ZK2mA Series VEjector System Single Unit Ejector + With Valve + Without Energy Saving Function p. 9 Single Unit Ejector

Modular F.R.L. Units

Example) AL30-03B-3RW-A q w e r t Nq Body size 10 20 30 40 50 60 Symbol Description Nw Pipe thread type Nil Metric thread (M5) V Rc V V V V V N NPT V V V V V F G V V V V V + M5 M5 x 0.8 V 01 1/8 V 02 1/4 V V V 03 3/8 V V 04 1/2 V 06 3/4 V V 10 1 V V + Ne Port size Nr Option (Mounting) Nil Without mounting option V V V V V V B*1 With bracket V V V V V + Nil Polycarbonate bowl

5

V V V V V V V MB 20 V V V V V V Tie-rod V CA2 25 V V V V V V V CS2 32 V V V V V V V Compact V V V CQS 40 V V V V V V V V V V CQ2 Free mount V V CU 50 V V V V V 63 V V V V V v: Standard 80 V V V V V 100 V V V V V 125 V 140 V D160 V P. 141 P. 155 P. 172 P. 198 P. 212 P. 183 P. 225 P. 233 P. 251 P. 265 P. 285 P. 294 P. 309 -X 137 Smooth/Low Speed Cylinders CQlY/CQlX Series Added compact foot

&snac

, v i t h 6 p c s ' o f s c r e t v s . p r o p e r t Y @ N o t e : E n s u r e t h e p r o t r u s i o n a t b o d v f i x a t s L o t o f M e m b r a n e m o d u l e ' l n s t a I L n e w o r i n s a t b e l o w o f m o d u l e ' T h e n , i n s e r t c o v e r a n d f a s t e n i t w i t n 4 @ S C T E W S f r o m t h e b e t o w o f c o v e [ . @ u n s c r e w t n e c o v e r .