Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

(mm) Model LA LB LC LD LE LF LH LT 200 (233) 224 (257) 235 (273.5) 274 (318) 333 (399) CVRA1L50 62 108 4.5 9 44 41 263 (301.5) 316 (360) 375 (441) CVRA1L63 76 127 5 11 55 48 CVRA1L80 92 154 6 13 67 58 CVRA1L100 112 189.5 6 13 87 73.5 ( ) are the dimensions for rotation of 180 and 190.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Foot style: CDVRA1L Foot bracket Mounting hole (mm) LA LB LC LD LE LF LH LT Model 212 (245) 247 (285.5) 287 (331) 347 (413) 236 (269) 275 (313.5) 329 (373) 389 (455) ( ) are the dimensions for rotation of 180 and 190.

Guide Cylinder Series MGG

T 2 x P (Rc, NPT, G) Q AH AG S U W K L B R A AL I J AI AJ AP 4 x AK hole AA AB V Y + Stroke X Z + Stroke For 4 x AO AG AN AI Cutout window AM Mounting dimensions (mm) Bore size (mm) 20 25 32 40 50 Stroke range (mm) AA AB AG AH AI AJ AK AL AM AN AO AP B I J K L M N O A 11 11 112 125 82 95 6.6 9 65 115 M6 25 108 30 55 60 80 25 45 M6 x 1 depth 9 90 75, 100, 125, 150, 200 14 13 134 150 92 108

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com AA I A R AP AB Y + Stroke X J V Z + Stroke AC AD 8-AF AE Stroke range (mm) Bore size (mm) AF AE AD AC AB AA G F N E M D L C K B J AP H I A 20 30 75 16.5 11 12 5.5 45 92 25 60 80 24 60 108 55 25 30 99 75, 100, 125, 150, 200 M5 x 0.8 depth 10 M8 x 1.25

SMC Basic Pneumatics

in{Hp) 2.s357 r 10' h(HS) 0.0s5t8 mrf psi 6 897 qe psi 0.06697 l|t, psi 0.07G1 Prrt|0fa mm(H,O) 0,00142 Pll mn(Hg) 0.0197 Psl bn 0.0t97 Pri kPs 0,145 Prt bar la.5o Pg kg/cm?

High-Precision Digital Pressure Switch

B P_1 or n_1 H_1 P_1=A(AB)/4 n_1=B+(AB)/4 H_1=(AB)/2 Released Workpiece 1 Workpiece 2 Workpiece n Atmosphere B Display value fine adjustment function (F6) Fine adjustment of the indicated value of the pressure sensor can be made within the range of 5% of the read value. (The scattering of the indicated value can be eliminated.) 5% R.D.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

B P_1 or n_1 H_1 P_1=A(AB)/4 n_1=B+(AB)/4 H_1=(AB)/2 Released Workpiece 1 Workpiece 2 Workpiece n Atmosphere B Display value fine adjustment function (F6) Fine adjustment of the indicated value of the pressure sensor can be made within the range of 5% of the read value. (The scattering of the indicated value can be eliminated.) 5% R.D.

PFxx-OMJ0005CN

--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 36.3 C6 6 10.3 8.3 C8 8(5/16) 12 37 C8 8(5/16) 12 10 N7 1/4 10.3 36.3 N7 1/4 10.3 8.3 PFM7-01/02--X694 PFM7S-01/02--X694 A B

AC Servo Motor Driver (Pulse input type/Positioning type)

(differential line driver) 20 LZR Personal computer 15 LA Encoder A-phase pulse (differential line driver) (Note 7) MR Configura tor 16 LAR USB cable (option) CN3 17 LB Encoder B-phase pulse (differential line driver) 18 LBR Control common 14 LG Control common 21 OP SD Encoder Z -phase pulse (open collector) Plate 2m max.

Series CE1

NTJ-015A NT-02 NT-04 NT-05 12 M5 X 0.8 4 8 9.2 7.8 H B 20 M8 X 1.25 5 13 15.0 12.5 32, 40 M14 X 1.5 8 22 25.4 21.0 50, 63 M18 X 1.5 11 27 31.2 26 Electrical Wiring Output style Input/Output The output signal of the stroke reading cylinder is A/B phase difference output (open collector output) as shown in the figure below.

CE

NTJ-015A NT-02 NT-04 NT-05 12 M5 x 0.8 4 8 9.2 7.8 H B 20 5 13 15.0 12.5 M8 x 1.25 32, 40 8 22 25.4 21.0 M14 x 1.5 50, 63 11 27 31.2 26 M18 x 1.5 Electrical Wiring Output type The output signal of the stroke reading cylinder is A/B phase difference output (open collector output) as shown in the figure below.

Plate Cylinder with Lock Series MLU

LA LB LB LDH10 LDH10 LU LU L L Z + Stroke Z + Stroke RR RR ZZ + Stroke ZZ + Stroke (mm) (mm) LC 18 22 26 32 Applicable pin no.

CE

NTJ-015A NT-02 NT-04 NT-05 12 M5 x 0.8 4 8 9.2 7.8 H B 20 5 13 15.0 12.5 M8 x 1.25 32, 40 8 22 25.4 21.0 M14 x 1.5 50, 63 11 27 31.2 26 M18 x 1.5 Electrical Wiring Output type The output signal of the stroke reading cylinder is A/B phase difference output (open collector output) as shown in the figure below.

Stroke Reading Cylinder and Counter

NTJ-015A NT-02 NT-04 NT-05 12 M5 x 0.8 4 8 9.2 7.8 H B 20 M8 x 1.25 5 13 15.0 12.5 32 . 40 M14 x 1.5 8 22 25.4 21.0 50 . 63 M18 x 1.5 11 27 31.2 26 Electrical Wiring Output type The output signal of the stroke reading cylinder is A/B phase difference output (open collector output) as shown in the figure below.

CE

NTJ-015A NT-02 NT-04 NT-05 12 7.8 M5 x 0.8 9.2 8 4 H B 20 12.5 15.0 13 5 M8 x 1.25 32, 40 21.0 25.4 22 8 M14 x 1.5 50, 63 26 31.2 27 11 M18 x 1.5 Electrical Wiring Output type The output signal of the stroke reading cylinder is A/B phase difference output (open collector output) as shown in the figure below.

MLU

CD-MU02 Z 142.5 159 171 205.5 LX RR 8.5 10 11 16 LD LU 11 14 15 20 LC 16 18 20 28 Z LB 27 31 36 46 LB 27 31 36 46 LX RR 8 10 10 16 LA 35.5 41 47 62 ZZ 151 169 182 221.5 L 52.5 59 67 81 LA 35 41 46 62 LD LU 13 14 17 23 ZZ L 52.5 59 67 81 Model MLU25 MLU32 MLU40 MLU50 Model MLU25 MLU32 MLU40 MLU50 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 The L, Z and ZZ dimensions are reference dimensions when

VS 8-2/VS 8-4

How to Order Applicable solenoid valve model Interface regulator model Regulating port VVS8040-ARB-A-1 VVS8040-ARB-B-1 VVS8040-ARB-P-1 VVS8040-ARB-AB-1 A VSS R8-4 (Size 26 mm) B P A, B Unit: mm 50 54.5 148 SMC SMC 2 3/5 14 4 1 109.5 90 90 27 VVS8040-ARB-AB-1 VVS8040-ARB-1 A B P Regulating port: A Regulating port: A, B Regulating port: B Regulating port: P 25 Series VS 8-2/VS 8-4 S R S R Conforms

90

Common PS port q Stations Note 1) Symbol w System (Port combination) Note 2) Stations Symbol Standard Port System 01 02 1 station Common PV port 2 stations Vacuum pump system Common PV: 8, Common PS: 6 Note 3) P P 10 10 stations Metric size Note 1) In case of an ejector, for an adequate performance, the number of stations when operated simultaneously depends on the nozzle diameter.

Micro-Mist Separator with Prefilter Series AMH

-l ~ / /o~la ~ / /v 0.7MPa ~ /-Y ~0.04 V ~ 0.04 f-i-,I"''---c,..-f'''---c-l---l-l ~ /~/ VI Q) a. 0.3MPa_0.5MPs_ ~ 80021-W'--+---+---+0.3MP.~-1__1 ~ Max.fIowline ---o.7MPa 8 0.02 Max.fIow line ~~_-0.5M!,a -I _:---..

VM

plunger VM220-02-05 VM230-02-05 Polyacetal roller Hard steel roller Roller plunger VM220-02-06 VM220-02-06S VM230-02-06 VM230-02-06S Cross roller plunger VM220-02-07 VM220-02-07S VM230-02-07 VM230-02-07S Polyacetal roller Hard steel roller Toggle lever VM220-02-08 VM230-02-08 VM230-02-30R VM230-02-30B VM230-02-30G VM230-02-30Y VM220-02-30R VM-30AR Red Push button (Mushroom) VM-30AB Black