Ozone Resistant

220-02-F 320-03 (02) 320-03-F (02) 420-04 420-04-F 121F-M3 131F-M3 121F-M5 (U10, 32) 131F-M5 (U10, 32) 221F-01 231F-01 2211F-01-06 221F-02 231F-02 321F-03 (02) 331F-03 (02) 421F-04 431F-04 1000F 2000F 2050F 3000F 4000F 1001F 2001F 2051F 3001F 4001F 230F 330F 430F 530F 630F 330F 430F 530F 630F Manifold regulator 4-, 5-port solenoid valve VQ Directional control valves 0 1000 2000 4000 5000

AS-FPQ/AS-FPG

A Note 1) 4 6 4 6 8 4 6 8 10 6 8 10 12 10 12 AS121FP-M5-04 AS121FP-M5-06 AS221FP-01-04 AS221FP-01-06 AS221FP-01-08 AS221FP-02-04 AS221FP-02-06 AS221FP-02-08 AS221FP-02-10 AS321FP-03-06 AS321FP-03-08 AS321FP-03-10 AS321FP-03-12 AS421FP-04-10 AS421FP-04-12 28 7 7 18.4 23.2 8 10.4 22.2 25 25.5 28.3 9.6 M5 x 0.8 12.2 29 8 8 19.4 24.2 12.8 32.4 17 17 18.4 25.3 10.4 27.4 32.4 31.4 36.4 14.2 12

Fieldbus System

Symbol Stations Note 02 2 stations P, E port entry Double wiring Note 1) U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 20 stations) 16 02 16 stations 2 stations Note 2) Specified layout: Indicate the wiring specifications on the manifold specification sheet.

A

-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4 x 0.7 Depth 4.5 22 29 0 38 40 31 105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4

SQ1000/2000

R1) 3 (R2) 1 (P) For applications which demand high speed, high frequency, long life and a precise response time. 1 2 (A) 4 (B) 2 1 2 1 2 SQ B31 N.O. valve N.O. valve 5 (R1) 3 (R2) A side B side 1 (P) A (A) 4 (B) 2 1 2 B SQ C31 N.C. valve N.O. valve 5 (R1) 3 (R2) 1 (P) R P Features 2 Series SQ1000 Plug-in Type How to Order Manifolds SS5Q13 08 FD2 D Option Stations 01 Nil 1 station None 02

VCA

02 How to Order Manifold Assemblies (Example) Enter the valve and option models to be mounted under the manifold base part number.

Pressure Range: ISE70 (0 to 1 MPa), Piping: N02 (NPT 1/4), Output Specification: L2 (I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type]), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: L (Lead Wire with M12 Connector; Right-angled, 5 m), Bracket: A (Bracket A, Interchangeable with ISE70)

Pressure Range: 0 to 1 MPa, Piping: NPT 1/4, Output Specification: I/O Link: Switch Output 1 + Switch Output 2 [Switch Output: NPN or PNP Switching Type], Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Lead Wire: Lead Wire with M12 Connector; Right-angled, 5 m, Bracket: Bracket A, Interchangeable with ISE70, Operation Manual/Calibration

Piping: G1/4, ISO1179, Output: 43 [NPN Open Collector 1 Output (Pin No.:4)+PNP Open Collector 1 Output (Pin no.:2)], Display Unit: With Unit Display Switching Function, Option 1: L [Lead Wire with M12 Connector (5m), Right-Angled], Option 2: With Bracket

Piping: G1/4, ISO1179, Output: 65 [PNP Open Collector 1 Output (Pin no.: 4)], Display Unit: With Unit Display Switching Function, Option 1: L [Lead Wire with M12 Connector (5m), Right-Angled], Option 2: With Bracket

Piping: NPT1/4, Output: 43 [NPN Open Collector 1 Output (Pin No.:4)+PNP Open Collector 1 Output (Pin no.:2)], Display Unit: With Unit Display Switching Function, Option 1: L [Lead Wire with M12 Connector (5m), Right-Angled], Option 2: With Bracket

Piping: NPT1/4, Output: 65 [PNP Open Collector 1 Output (Pin no.: 4)], Display Unit: With Unit Display Switching Function, Option 1: L [Lead Wire with M12 Connector (5m), Right-Angled], Option 2: With Bracket

Piping: NPT1/4, Output: 27 [NPN Open Collector 2 Outputs (Pin no.: 2,4)], Display Unit: With Unit Display Switching Function, Option 1: L [Lead Wire with M12 Connector (5m), Right-Angled], Option 2: With Bracket

Piping: G1/4, ISO1179, Output: 67 [PNP Open Collector 2 Outputs (Pin no.: 2,4)], Display Unit: With Unit Display Switching Function, Option 1: L [Lead Wire with M12 Connector (5m), Right-Angled], Option 2: With Bracket

Series VCL

OUT port size Material D side U side 1 2 3 4 5 n Symbol 01 02 Port size 1/8 (6A) 1/4 (8A) Stations Body material C37 Symbol Nil H Seal material FKM FKM 02 : 10 2 stations : 10 stations Stainless steel All IN ports are 3/8. Refer to the "L" dimensions on page 6 regarding the maximum number of stations.

Series VCS

OUT port size Material Symbol 01 02 Port size 1/8 (6A) 1/4 (8A) Stations D side U side 1 2 3 4 5 n Body material Brass Symbol D H Seal material FKM FKM 02 : 10 2 stations : 10 stations All IN ports are 3/8. Stainless steel Refer to the L dimensions on page 6 regarding the maximum number of stations.

VCW

OUT port size Material Symbol 01 02 Port size 1/8 (6A) 1/4 (8A) Stations Symbol Nil S Material Brass Stainless steel D side U side 1 2 3 4 5 n 02 : 10 2 stations : 10 stations All IN ports are 3/8. Refer to the L dimension table on page 7 regarding the maximum number of stations.

VQ5000

5 1 1 Option 08 Series Option None Exhaust cleaner for Rc1: D side exhaust Exhaust cleaner for Rc1 1/2: D side exhaust Exhaust cleaner for Rc1: U side exhaust Exhaust cleaner for Rc1 1/2: U side exhaust Symbol 5 VQ5000 Nil CD1 CD2 CU1 CU2 K Note3) Cable length Manifold type 0 1 2 3 Without cable Cable length 1.5m Cable length 3m Cable length 5m 1 Plug-in unit Stations Cylinder port size 02

5 Port Solenoid Valve, Series VQC

Note) Available for the rubber seal type only. 25 Manifold Specification Sheet Series VQC4000: Base-Mounted Type/Plug-in Unit How to order manifolds VV5QC 4 1 08 TD0 02 T Kit 1 2 3 7 VV5QC 4 1 16 SDQW 02 S Kit Series VQC4000 4 5 6 Base-Mounted plug-in Stations Electrical entry Options 01 1 station Nil None Special wiring specifications Note 1) (except for double wiring) D-side entry Kit

PA3000/5000/PAX1000

Option Body material Nil N Body only With silencer 1 2 ADC12 (aluminum) SCS14 (stainless steel) For AIR EXH: AN200-02 Connection port size 1/4 (8A) 3/8 (10A) Diaphragm material 02 03 1 PTFE (fluororesin) Symbol Type of operation Thread type FLUID OUT AIR SUP Nil T F N Rc NPTF G NPT Automatically operated type with built-in pulsation attenuator 2 AIR EXH FLUID IN Built-in pulsation attenuator