MY1

F1 -X L2 L1 50 50 50 L3 2040 40 40 30 30 30 Data 20 20 20 1.

VQ5000

How to Order Indicate option symbol -K in the manifold part number and be sure to specify station positions for single or double wiring on the manifold specification sheet. 2.

VQZ1000/2000/3000

Note 3) K (High pressure) and Y (Low wattage) are not available. Electrical entry: L/M plug connector only. Note 4) Applicable to latching type.

SX

L1 L2 L3 L4 160.5 173 185.5 185.5 198 210.5 223 235.5 M3 Terminal screw A: Orange B: Green 150 162.5 175 175 187.5 200 212.5 225 129 139.5 150 160.5 171 181.5 192 202.5 15.5 16.5 17.5 12.5 13.5 14.5 15.5 16.5 (Rail mounting hole pitch 12.5) Stations n 10 stations 11 12 13 14 15 16 17 stations 248 248 260.5 273 285.5 298 310.5 310.5 L1 L2 L3 L4 237.5 237.5 250 262.5 275 287.5 300 300 213 223.5

Table of Contents

Cylinder port is located at U side of body. 1(P) SUP port 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread P = 11 2-C6 3(R) EXH port Dimensions 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 Formula L1 = 11n + 15.5, L2 = 11n + 60 n: Station (Maximum 16 stations) L n L1 L2 (L3) (L4) 26.5 71 100 110.5 37.5 82 100 110.5 48.5 93 112.5

LEC-OM02904

AC200230V AC100120V 40 M5 3.24[Nm] M5 3.24[Nm] 6 AC100120V AC200230V AC100120V AC200230V L1 L1 PE PE L2 2-M5 2-M5 L2 L3 CNP1 CNP1 N N P1 P1 M4 1.2[Nm] P2 P2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L11 L11 L21 L21 U U CNP3 V CNP3 V W W 9 2 9 (2) LECSS-S8 [mm] 5 40 6 6 6 (80) (170) 6 6 () CN4 CN2L CN2 CN1B CN1A CN3 CN5 CNP1 L1 L2 L3 N P1 P2 P C D L11 L21 U V W L1 L2 () L3 N P1 CNP2 P2

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

In case of mixed wiring, add the option symbol "-K".

7

48 VAC 24 VDC VXB GDM2A-L5 GDM2A-L6 GDM2A-L1 GDM2A-L1 GDM2A-L2 GDM2A-L2 GDM2A-L2 GDM2A-L2 GDM2A-L5 GDM2A-L15 24 VDC 100 VAC 12 VDC 110 VAC VXE 100 VAC 200 VAC 110 VAC 220 VAC With light VXP 200 VAC 230 VAC With light 220 VAC 240 VAC VXR 230 VAC 24 VAC 240 VAC 48 VAC VXH 24 VAC 48 VAC VXF VX3 Gasket Part No. for DIN Connector VCW20-1-29-1 (for Class B) VCW20-1-29-1-F (for Class H) VXA Lead

REA/REB

Dynamic moment We = 5 x 10-3WgU = 5 x 10-319.8300 = 15 [N ] Me3 = 1/3We(L2-A) = 1/3150.182 = 0.91 [Nm] 3 = Me3/Me3max = 0.91/10 = 0.091 Me3 Guide central axis We W L2 Review Me3.

VS 8-2/VS 8-4

SI unit Formula: L1 = 19n + 71, L2 = 19n + 114.5 n: Stations (Maximum 16 stations) Dimension (mm) 7 L n 6 5 4 3 2 9 242 285.5 90 133.5 1 128 171.5 223 266.5 8 204 247.5 10 261 304.5 11 280 323.5 12 299 342.5 13 318 361.5 14 337 380.5 15 356 399.5 16 375 418.5 185 228.5 166 209.5 147 190.5 109 152.5 L1 L2 8 Series VS 8-2/VS 8-4 S R S R S Series VS 8S R 2 4 kit (Serial transmission) For EX250

VCA

281 292 325 336 7 278 289 314 325 322 333 366 377 4 173 184 209 220 199 210 243 254 5 208 219 244 255 240 251 284 295 2 103 114 139 150 117 128 161 172 3 138 149 174 185 158 169 202 213 L1 Side ported L2 VV2CA3 L1 Front ported L2 L1 Side ported L2 VV2CA4 L1 Front ported L2 (mm) Dimensions Electrical entry B C E F G H J1 J2 J3 K L M N A Grommet: G Conduit: C DIN terminal: D Conduit terminal

ZP

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

ZP

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

(KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) A B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

L3 L4 L1 L2 L3 L4 L n 12 260.5 250 229 16 L n 12 273 262.5 239.5 17 10 235.5 225 208 14 11 248 237.5 218.5 15 13 273 262.5 239.5 17 14 285.5 275 250 18 15 285.5 275 260.5 12.5 16 298 287.5 271 13.5 10 248 237.5 218.5 15 11 260.5 250 229 16 13 285.5 275 250 18 14 285.5 275 260.5 12.5 15 298 287.5 271 13.5 16 310.5 300 281.5 14.5 L1 L2 L3 L4 L1 L2 L3 L4 402 Series 10-SZ3000 EX510 Gateway-type

REA/REB

Dynamic moment RB Me3 Guide central axis J L2 We W Examine Me3.

REA/REB

Dynamic moment RB Me3 Guide central axis J L2 We W Examine Me3.

2/3 Port Valve

The right side of the common port provides plug. 4.1-15 VVX21/22/23 Dimensions Common SUP Individual SUP n Mark L1 L2 L1 L2 Model 2 100 86 126 108 3 136 122 172 154 4 172 158 218 200 5 208 194 264 246 6 244 230 310 292 7 280 266 356 338 8 316 302 402 384 9 352 338 448 430 10 388 374 494 476 VVX22m VVX23m VVX21m Grommet Electrical entry Model A B D E F H J K M N Conduit S 39 41.5 44 Conduit

Compact manifold regulator ARM5 Series

K 50 SMC 25 S L2=(14 x n)+13 29 55 (Max. 58) Note) U IN IN 33 14 Note) Max. dimension is the size when the knob is unlocked.

VCA

185 158 169 202 213 4 173 184 209 220 199 210 243 254 5 208 219 244 255 240 251 284 295 2 103 114 139 150 117 128 161 172 L1 Side ported L2 VV2CA3 L1 Front ported L2 L1 Side ported L2 VV2CA4 L1 Front ported L2 (mm) Dimensions Electrical entry Grommet: G Conduit: C DIN connector: D Conduit terminal: T A B C E F G H J1 J2 J3 K L M N Model Q 30 32 R 36 41 S 50 52 T 32 38 U 54 57 V 66 69 W 30