Serial Transmission System Series EX250 Series EX500

Ports 1, 3, 5 Applicable series Ports 1, 3, 5 Applicable series Ports 2, 4 Symbol 3.2 One-touch fitting 4 One-touch fitting 6 One-touch fitting 4 One-touch fitting 6 One-touch fitting 8 One-touch fitting 6 One-touch fitting 8 One-touch fitting 10 One-touch fitting 8 One-touch fitting 10 One-touch fitting 12 One-touch fitting Rc 1/4 Rc 3/8 G 1/4 G 3/8 Ports 2, 4 mixed 8 One-touch fitting N1

AC Servo Motor Driver (Pulse input type)

[PA05] = 0(Initial value) Initial value 0 correspond to "Number of command input pulses per revolution." 262144 [pulses/rev]. 1 [PA06] [Number of command input pulses per revolution]P = 1000 [PA07] [PA06] 1 [PA07] [Actuator lead L [mm] ] n1/n2 6 1 [P]10[m] P: Travel amount per 1 command pulse [m] n1/n2: Pulley ratio *1 Ex.)

AC Servo Motor Driver (CC-Link Type)

Symbol Name PA06 CMX Electronic gear numerator 1 0 to 65535 PA07 CDV Electronic gear denominator 1 1 to 65535 Set the values as follows. 1 [PA06] M = 1000 [PA07] Actuator lead (L) [mm] n1/n2 M : [Servo motor resolution : 262144(Pulse/rev)] n1/n2: Pulley ratio *1 EX.)

AC Servo Motor Driver (CC-Link Type)

Symbol Name PA06 CMX Electronic gear numerator 1 0 to 65535 PA07 CDV Electronic gear denominator 1 1 to 65535 Set the values as follows. 1 [PA06] M = 1000 [PA07] Actuator lead (L) [mm] n1/n2 M : [Servo motor resolution : 262144(Pulse/rev)] n1/n2: Pulley ratio *1 EX.)

AC Servo Motor Driver (MECHATROLINK-II type)

resolution is 1048576 [Pulse/rev] P Travel amount per 1 command pulse [m] n1/n2 Pulley ratio *1 Ex.)

AC Servo Motor Driver (MECHATROLINK-III type)

resolution is 1048576 [Pulse/rev] P Travel amount per 1 command pulse [m] n1/n2 Pulley ratio *1 Ex.)

Rotary Actuator/Vane Type

Applicable shaft type: Y a1 1.5 L1 Y = Y = Applicable shaft type: J, K, T N1 Size: 10 to 30 Size: 40 [mm] Size CRB2, CRBU2 Y 10 1 to 14 15 1.5 to 18 20 1.5 to 20 30 2 to 22 40 18 to 30 [mm] Size CRB2, CRBU2 a1 L1 N1 20 2h9 0 -0.025 10 6.8 30 3h9 0 -0.025 14 9.2 Symbol: A48 Symbol: A52 The long shaft is shortened. The short shaft is shortened.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft types: Y CRB2 a1 1.5 L1 (mm) CRBU2 Y Size N1 10 1 to 14 CRB1 15 1.5 to 18 (mm) Y = Y = 20 N1 a1 L1 1.5 to 20 Size MSU Size: 10 to 30 Size: 40 0 -0.025 20 30 6.8 10 2h 2 to 22 CRJ 0 -0.025 30 40 9.2 14 3h 18 to 30 CRA1 Symbol: A48 Shorten the long shaft. Symbol: A52 Shorten the short shaft.

VK3000

3.5 to 7 Mounting screw ( ) Mounting hole ( ) (Breather hole) 2-M5 x 0.8 (R1, R2 port) Refer to grommet type for other dimensions. 3-2-5 Series VK3000 Dimensions: Base Mounted Grommet: VK3140-G-01 DIN terminal: VK3140-D-01 ~ = Refer to grommet type for other dimensions. 3-2-6 5 Port Direct Operated Poppet Solenoid Valve Rubber Seal Series VK3000 Type 20 Manifold Body ported (Top ported) n1

VK3000

.: 3.5 to 7 Manual override (Non-locking) Pg7 ~ = 300 78.4 (Lead wire length) 70.9 4.5 7.5 44.5 R P 20 13.5 13 4 x Rc1/8 (Piping port) 40 4 x Rc1/8 (Piping port) Refer to grommet type for other dimensions. 1424 VK3000 Series 5 Port Solenoid Valve Direct Operated Poppet Type Type 20 Manifold/Body ported (Top ported) VV5K3-20Station n1 = Number of VK3000 n2 = Number of VK300 Grommet: G DIN

VS 8-2/VS 8-4

Nil B Push type Locking type (Tool required) CE compliant Internal/External pilot Nil Q CE compliant Nil R Internal pilot External pilot 27 Series VS 8-2/VS 8-4 S R S R Conforms to ISO 15407-2 Standard 5 Port Solenoid Valve/Plug-in Type Dimensions (F kit) VV801--FD-W1-M 2 x 1/2" 3(R) port L1 = 19 x n1 + 27 x n2 + 85 L2 = L1 + 17 2 x 1/8" Pilot port n1: Piece of Size 18 mm n2: Piece of Size

XLAQ/XLDQ

treatment Part numbers indicating changed seal material and leakage XM XY Surface treatment External: Hard anodized Internal: Raw material External: Hard anodized Internal: Oxalic acid anodized Symbol Nil A Note 2) Leakage Pam3/s or less Note 1) Changed part None w, e w e Symbol External 1.3 x 10-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 DNil A B C Seal material XSA Symbol Nil N1

Compact and Lightweight

Vacuum pressure Suction flow rate 227 ZH Series Body Ported: ZH05D A--to ZH20D A--S L S L One-touch connection d3 d1 2 x E 2 x N1 2 x K1 A (10.4) G1 J1 D32 D12 SUP. EXH. P1 12 C L4 M2 9.7 2 The release button of 6 One-touch fitting is oval as shown above. The button can be rotated freely. L1 L21 L3 M1 d2 M3 Q1 D22 2 x F VAC.

MQQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 A F MM F S + Stroke H ZZ + Stroke Bore size (mm) NN A P D MM F G1 G2 S ZZ I H J N1 N2 NA 10 M12 x 1 15 M5 x 0.8 4 M4 x 0.7 8 15 6 65 101 18.5 28 16 11 20 16 16 M14 x 1 15 M5 x 0.8 5

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 A F MM F S + Stroke H ZZ + Stroke Bore size (mm) NN A P D MM F G1 G2 S ZZ I H J N1 N2 NA 10 M12 x 1 15 M5 x 0.8 4 M4 x 0.7 8 15 6 65 101 18.5 28 16 11 20 16 16 M14 x 1 15 M5 x 0.8 5

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

MIL-C-83503 Flat ribbon cable connector Socket: 10 pin MIL type with strain relief Conforming to MIL-C-83503 Applicable connector Internal wiring +COM, COM Location Valve 4(A), 2(B) port Porting specifications Direction Lateral, Upward, Downward Metric 1(P), 3/5(R) port: 8 4(A), 2(B) port: M5, 4, 6 Port size Inch 1(P), 3/5(R) port: 5/16" 4(A), 2(B) port: 5/32", 1/4" Weight W (g) Note 2) n1

MQQ

A F MM F S + Stroke H ZZ + Stroke Bore size (mm) NN A P D MM F G1 G2 S ZZ I H J N1 N2 NA 10 M12 x 1 15 M5 x 0.8 4 M4 x 0.7 8 15 6 65 101 18.5 28 16 11 20 16 16 M14 x 1 15 M5 x 0.8 5 M5 x 0.8 10 15 6 74 114 22 30 22 12 21 19.5 20 M20 x 1.5 18 Rc 1/8 8 M8 x 1.25 13 25 8.5 97.5 151 31.5 40.5 28.5 20.5 33 29 25 M26 x 1.5 18 Rc 1/8 10 M10 x 1.25 13 30 8.5 102.5 160 34.5 44.5 32 20.5 38 32 For

MQQ

MM A F S + Stroke F H ZZ + Stroke (mm) Bore size (mm) A D NN F G1 P G2 MM S I ZZ H J N1 N2 NA M5 x 0.8 16 15 4 8 15 6 M12 x 1 M4 x 0.7 65 18.5 101 28 11 20 16 10 M5 x 0.8 22 15 5 10 15 6 M14 x 1 M5 x 0.8 74 22 114 30 12 21 19.5 16 Rc 1/8 28.5 18 8 13 25 8.5 M20 x 1.5 M8 x 1.25 97.5 31.5 151 40.5 20.5 33 29 20 Rc 1/8 32 18 10 13 30 8.5 M26 x 1.5 M10 x 1.25 102.5 34.5 160 44.5 20.5 38 32 25

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ~ = Refer to grommet type for other dimensions. 3-2-6 7 5 Port Direct Operated Poppet Solenoid Valve Rubber Seal Series VK3000 Type 20 Manifold Body ported (Top ported) n1 = Number of VK3000 n2 = Number of VK300 VV5K3-20Station Grommet: G DIN terminal

Proposals for Energy Saving

Multiple units available with unit switching function Display units can be easily selected. mmHg kPa PSI kgf/cm bar Vacuum Positive Pressure MPa PSI kgf/cm bar Variety of switch output modes Sensors Measuring Instruments ON ON Hysteresis mode OFF OFF P2 P1 n2 n1 (Standard) (Inverted) Window comparator mode ON ON OFF OFF n1 n2 P1 P2 (Standard) (Inverted) Exact detection of atmospheric