A

COMBINATION UNITS MODULAR TYPE (N)AC1010(N)AC4010 M51" C o m b i n a t i o n o f f i l t e r, re g u l a t o r a n d l u b r i c a t o r i n c l u d i n g mounting bracket and pressure gauge S Y M B O L S T E C H N I C A L SPECIFICATIONS H O W T O O R D E R FILTER/REGULATOR, LUBRICATOR (N)AC 10 G Model NAC1010 NAC2010 NAC3010 NAC4010 Filter regulator NAW1000 NAW2000 NAW3000 NAW4000 Combination

VQZ1000/2000/3000

(P) 3 (R2) 3 position exhaust center L plug connector (L) With light/surge voltage suppressor VQD (B) 2 (A) 4 Non-locking push type (Tool required) VQZ3000 (Standard) 12 VDC 24 VDC 5 (R1) 1 (P) 3 (R2) Base Mounted 3 position pressure center 3.0 4.6 (B) 2 (A) 4 A C B L plug connector (L) 5 (R1) M plug connector (M) 1 (P) 3 (R2) (Option) 100 VAC 200 VAC 110 VAC 220 VAC VQZ1000 M plug connector

F

A R B F I T T I N G F O R S O F T T U B E: M-3AU-4 M-5AU-4 M-5AU-6 B A R B E L B O W F O R S O F T T U B E: M-3ALU-4 M-5ALU-6 U N I V E R S A L E L B O W: M-3UL M-5UL 18 female diverted to 9 x M5 MORE SELECTIONS S E E N E X T P A G E P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R H O W T O O R D E R S E E N E X T P

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

screw R R B B B B B B B B X X P P 18.7 7.7 A A A A A A A A (12) (7.5) P = 10.5 31.4 18.1 C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread C8 [1(P) SUP port] C8: 8 One-touch fitting 2 L n Dimensions Formula L1 = 10.5n + 44.5, L2 = 10.5n + 62.5 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

screw R R B B B B B B B B X X P P 18.7 7.7 A A A A A A A A (12) (7.5) P = 10.5 31.4 18.1 C3, C4, C6, M5 [4(A), 2(B) port] C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread C8 [1(P) SUP port] C8: 8 One-touch fitting 2 L n Dimensions Formula L1 = 10.5n + 44.5, L2 = 10.5n + 62.5 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19

V

O Z Z L E D I A M E T E R S High Vacuum Type (-640mmHg / -12PSI) L Low Vacuum Type (-360mmHg / -7PSI) PSI -12 -12 -7 -7 05 0.5mm 07 0.7mm Suction Flow Rate nl/min 7 9 10 18 Air Consumption nl/min 9.5 19 9.5 19 D I M E N S I O N S S E R I E S ZU A P P L I C A B L E T U B E OD 6 A P P L I C A B L E T U B E OD 6 Courtesy of Steven Engineering, Inc. !

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

A B !

2/3 Port Valve

Option Symbol and Configuration Fluid and Options Option symbol Seal material Coil insulation Body, Shading coil material Option symbol and body material Brass SUS304 F L X F, B L, J B J B J J T A H A H A H D N G, J S Q E P V M Y A H K K A H A H B J V M V M Y D, E N, P B J Fluid(Application) Standard A B C D E F NBR FPM Argon Argon(long life) Ethyl Alcohol Ethylene glycol Ozone(low

Air Cylinder

Axial foot: CBM2L Bore size Stroke 4 x LD 2 x LC LH B CJ1 X Y Z Y X LT CJP ZZ + Stroke LS + Stroke LZ LX Rod flange: CBM2F Bore size Stroke * -H -R -W CJ2 N L Head flange: CBM2G Bore size Stroke -H -R -W N L JCM 4 x FD Mounting hole 2 x FD C2 CM2 CM2 Mounting hole FY CM3 B FX FZ FT Z + Stroke CG1 FT Z 20 to 32 40 CG3 Single clevis: CBM2C Bore size Stroke -H -R -W N L CD JMB MB MB1 U L

Electric Grippers

LEHZ LECP6 LEC-G LECP1 LECPA LEHZJ LEHF LEHS 4 x MM through Thread for attachment mounting A B B A Step Motor (Servo/24 VDC) 4 x H through Hole for attachment mounting C C [mm] [mm] Model A B C MM LEHZ10(L)K2-4A LEHZ16(L)K2-6A LEHZ20(L)K2-10A LEHZ25(L)K2-14A LEHZ32K2-22A LEHZ40K2-30A Model A B H LEHZ10(L)K2-4B LEHZ16(L)K2-6B LEHZ20(L)K2-10B LEHZ25(L)K2-14B LEHZ32K2-22B LEHZ40K2-30B 3 4

Basic type / Direct mount type Series CY3B/CY3R

+ B) x 103 M Yaw moment M3 = m x g x (L + A) x 103 M Roll moment M2 = m x g x (L + B) x 103 (mm) A 16.5 27.0 B 25.5 48.0 Model CYV15 CYV32 L B L B L A M1, 2, 3: Moment [Nm] m: Load mass [kg] L: Distance to load center of gravity [mm] A, B: Distance to guide shaft (mm) g: Gravitational acceleration [9.8 m/s2] M2 M3 M1 m x g m x g m x g Guide shaft mounting surface Central axis of guide Central

Valve Single Unit

Model/Series SX5000 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Port size Weight (g) Valve model Type of actuation L plug connector M plug connector 1, 5, 3 (P, EA, EB) 4, 2 (A, B) C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv Grommet Single Double 75 76 83 84 0.61 0.39 2.4 0.49 0.35 1.9 2 position 0.46 0.35 1.8 0.43 1.7 0.45 Closed center Exhaust center Pressure center Single Double

Valve Single Unit

Model/Series SX5000 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Port size Weight (g) Valve model Type of actuation L plug connector M plug connector 1, 5, 3 (P, EA, EB) 4, 2 (A, B) C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv Grommet Single Double 75 76 83 84 0.61 0.39 2.4 0.49 0.35 1.9 2 position 0.46 0.35 1.8 0.43 1.7 0.45 Closed center Exhaust center Pressure center Single Double

NCM

K L M B A C (inch) Part no.

SV

12.5) L1 58.4 60.9 3/5 3/5 E E 4 A 4 A 4 A 4 A 85.4 101.2 105.7 MAX.21 98.7 2 B 2 B 2 B 2 B (Station n) (Station 1) P 1 P 1 5 3 E 1 P Light/Surge voltage suppressor 1 1 Individual SUP spacer SV3000-00Interface regulator 82.7 Individual EXH spacer 63.8 75 SV3000-M1Interface regulator 12 (10) (For DIN rail mounting) B B B B 157.9 14.7 139.9 A A A A B A B A B A B A L Dimension n: Stations L

Digital Flow Switch (Manifold type)

Flow range: 0.5 to 4 L/min (symbol 04) Flow range: 2 to 16 L/min (symbol 20) Flow range: 5 to 40 L/min (symbol 40) -52No.PF-OMW0004-B Flow rate characteristics for several supply units Flow range: 0.5 to 4 L/min (symbol 04) (reference value) Nil S P W -53No.PF-OMW0004-B Flow range: 2 to 16 L/min (symbol 20) (reference value) Nil S P W -54No.PF-OMW0004-B Flow range: 5 to 40 L/min (symbol

Fluoropolymer Piping Equipment

B E E F G H L L M Min. port size 2 x B L, L LQ3T11 4 3.5 10 9 4.8 9.5 11 28.5 27.5 14 2.5 LQ3T12 3 2 LQ3T21 6 4 17 16 6 12 16 34.5 33.5 20 4 LQ3T31 10 5 22.5 19.5 9 18 21 47.5 44.5 25 7.5 LQ3T32 8 6.4 LQ3T41 12 6 24 22 10 20 24 52.5 50.5 29 9.5 LQ3T51 19 7 26.5 24 14 28 32 64 61.5 37 16 LQ3T61 25 8 30 26 18 36 41 78 74 49 22 M (E, E) (E, E) G H L, L L, L (E,E): Reference dimension for the

ZP

A B d H Model H A SN-015A M14 x 1 19 21.9 5 ZPNA-M16 M16 x 1.5 22 25.4 6 ZPNA-M18 M18 x 1.5 27 31.2 9 ZPNA-M22 M22 x 1.5 30 34.6 8 Bolts (Hexagonal Socket Head Cap Screw) Dimensions d B (mm) A B d L 8 11 5.5 M3 x 0.5 L 8 12 7 M4 x 0.7 A 10 15 8.5 M5 x 0.8 13-11-96 New New Vacuum Pad More shapes and sizes of pads.

24

Contents 20 MGP20-B-PS Set of nos. above @4, @5, @6, @7, #5, $4, $5 50 MGP50-B-PS Set of nos. @4, @5, @6, @7, above #5, #6, $4, $5 63 MGP63-B-PS 80 MGP80-B-PS Set of nos. @4, @5, @6, @7, above $4, $5 100 MGP100-B-PS 25 MGP25-B-PS 32 MGP32-B-PS 40 MGP40-B-PS *: Each seal kit includes the parts listed above.

Secondary Batteries

B L F G D *Mounting brackets are shipped together, (but not assembled).