Type: Bar Type, Indicator: Not Provided, Additional Function: Error Signal Output, Air Flow/Consumption Amount(m³/min): -, Ion Balance: ±30V, Ion Balance Adjusting Function: Automatic, Operating Pressure Range(MPa): null～0.7, Power Supply: DC24V, Accessories/options: ordered separately: Power supply cable included (3 m) / with bracket, I/O specifications: PNP output, Bar length

Air Volume: Rapid Deionizing Type, 0.66m³/min, Output: NPN Output, Power Supply Cable, AC Adapter: Power Supply Cable , 10m, Bracket: -

Air Volume: Rapid Deionizing Type, 0.66m³/min, Output: NPN Output, Power Supply Cable, AC Adapter: AC Adapter + Connector, Bracket: -

Bracket: B1

Flow Rate Adjustment: w/o Flow Rate Adjustment, Cord Option: with AC Cord

Flow Rate Adjustment: w/o Flow Rate Adjustment, Cord Option: w/o AC Cord

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

.) @0 10-11-11 11 Series MIW/MIS Dimensions: Double Finger Type MIW-D 2-P Supply port 3-LA Scraper mounting thread EB FB NB ME PE GD LB JA B FA FC GC GB JB Mounting hole 4-GA LC C EA D 2-P Attachment mounting thread 4-FD through Supply port PD NA FF FE PC PA A Mounting threads 4-MA thread depth MB Groove position for auto switch mounting HB depth HC HD (2 pcs.)

2–4

Standard without auto switch: 12 and 16; 5 stroke, 25; 5 to 10 stroke Built-in magnet with auto switch: 20; 5 stroke 6 Series CQM Dimensions 32 to 50 2-HA through Auto switch 2-P 2-HB through V KA F Q U 2 x 2-OB counterbore with depth RB 2-N through IB IA EA EB EC M 22 Z 11 Min. lead wire bending radius 10 (KB) D-A7/A8 Auto switch KA A + Stroke B + Stroke W L S EA EB EC M J 2 x 2-OA 2 x 2

MIW/MIS

KB Mounting threads 4-MA thread depth MB HB depth HC HD KA 3 4 Groove position for auto switch mounting HE MD MC 2-HA depth HC D FC GC A B C EA EB FA FB FD FE FF FG FH GA GB GD 111 155 44 64 21 29.5 35 48.5 23 28.5 8 11 19 25.5 10 13 4.5 6.5 Model MIW12-12 MIW20-20 10 (Effective depth 4) 9.5 12.5 3.3 5.1 12.5 16.5 37 54 34 43.5 M3 x 0.5 M5 x 0.8 8 11 076 106.5 6 (Effective depth 3) HA, HB

Vacuum Pad

Bellows HW Oval U ( ( ( ( Mark-free pad H Related pad Sponge pad S ( ( ( ( ( Resin attachment K ( ( ( ( Pad with ball spline buffer U ( ( ( ( H Heavy-duty ball joint pad HB Note) The ZP2 series is blast type.

Vacuum Pad

Bellows HW Oval U ( ( ( ( Mark-free pad H Related pad Sponge pad S ( ( ( ( ( Resin attachment K ( ( ( ( Pad with ball spline buffer U ( ( ( ( H Heavy-duty ball joint pad HB Note) The ZP2 series is blast type.

Escapements Series MIW/MIS

2 1425 Series MIW/MIS Dimensions/Double Finger Type MIW-D 2 x P Supply port 3 x LA Scraper mounting thread EB FB NB GD LB JA B FA FC GC GB JB D Mounting hole 4 x GA LC EA C 2 x P Attachment mounting thread 4 x FD through Supply port PD NA FF FE PC PA A Groove position for auto switch mounting Mounting threads 4 x MA thread depth MB HB depth HC ME PE HD (2 pcs.)

Rotary Table/

M5 x 0.8 depth 5 M5 x 0.8 depth 5 (Vacuum port) DC DB DA High precision type 11-MSQAA 11-MSQAR Basic type 11-MSQBA 11-MSQBR DC DB DA (Vacuum port) HB HB HA HE (HD) (HD) 11.5 5.5 HC HC DD DD (mm) (mm) DA(h8) DB(h8) DC(h8) DD(h8) HA HB HC HD HE DA(h9) DB(h9) DC(h9) DD(h9) HB HC HD Size 10 20 30 50 Size 10 20 30 50 46 45 20 35 15.5 24 5 63 9.5 46 45 20 35 20 5 59 61 60 28 40 19.5 30 6 73 13.5

ZP

EPR AMJ Material Pad diameter (mm) ZP 40HBN ZP 50HBN ZP 63HBN ZP 80HBN ZP100HBN ZP125HBN 40 1 0 17 +10 +1 50 2 0 33 +19 +1 N NBR Misc. 63 40 3 0 63 +37 +2 40 S Silicon rubber 80 50 6 0 103 +61 +2 50 U Urethane rubber 100 63 12 1 206 +121 +4 63 F Fluoro rubber 125 80 22 3 390 +228 +7 80 E EPR 100 100 Pad type 125 125 HB Large bellows pad Dimensions 40 50 63 80 100 125 ZP 40HB ZP HB ZP HB F

Escapements Series MIW/MIS

KB Mounting threads 4-MA thread depth MB HB depth HC HD KA 3 4 Groove position for auto switch mounting HE MD MC 2-HA depth HC D FC GC A B C EA EB FA FB FD FE FF FG FH GA GB GD 111 155 44 64 21 29.5 35 48.5 23 28.5 8 11 19 25.5 10 13 4.5 6.5 Model MIW12-12 MIW20-20 10 (Effective depth 4) 9.5 12.5 3.3 5.1 12.5 16.5 37 54 34 43.5 M3 x 0.5 M5 x 0.8 8 11 076 106.5 6 (Effective depth 3) HA, HB

Basic Type/Direct Mount Type

HB HT HC N X A W K 2 x plug H 2 x P (Piping port) HA CB 4 x counter bore dia.

Vacuum Pad

Bellows HW Oval U ( ( ( ( Mark-free pad H Related pad Sponge pad S ( ( ( ( ( Resin attachment K ( ( ( ( Pad with ball spline buffer U ( ( ( ( H Heavy-duty ball joint pad HB Note) The ZP2 series is blast type.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

MRQ DBasic type 11-MSQBA 11-MSQBR M5 x 0.8 depth 5 (Vacuum port) 20DC DB DA (mm) DA(h9) DB(h9) DC(H9) DD(h9) HB HC HD Size 10 20 30 50 46 45 20 35 20 5 59 HB 61 60 28 40 22 6 65 (HD) 11.5 67 65 32 48 22 6 68 5.5 HC 77 75 35 54 24 7 77 Dimensions other than above are identical to the basic type.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2-P Attachment mounting thread 4-FD through Supply port PD NA FF FE PC PA A Mounting threads 4-MA thread depth MB Groove position for auto switch mounting HB depth HC HD (2 pcs.)

CQM

45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 110 x 135 M5 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 90 x 115 x 140 M6 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 90 x 95 x 120 x 145 6.5 8.5 7.5 6.5 9 6.5 12.5 7-5-6 7 Series CQM Compact Cylinder: Guide Rod Type Double Acting, Single Rod Dimensions 12 to 25 CUJ CU V V 16 12 CQS 2 x 2-OB counterbore with depth RB 2-M5 x 0.8 Auto switch CQM 2-HB