XL

58.5 64 64 43 G 92 95 97 H 48 58.5 64 64 97 J 59 62 66 41(51) 46.5(57) 46.5(57) 50(66) 8.5 11.5 11.5 11.5 22 25 25 25 20 23 25.5 25.5 56 61 61 65 64 75.5 82 82 30 35 40 40 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) P DIN terminal M L Model G 59 60 63 H 48 58.5 64 64 63 J 47 48 51 51 (Unit: inch) 1/4 1/4 1/4 3/8 8 10 10 10 3 5 5 5 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) 34 High Vacuum

C85

With Rod Boot (mm) Item h KK 1 to 50 AM C e f K Stroke 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore 20 20 8 36 20 6 M8 x 1.25 71 84 96 134 159 109 25 22 10 36 20 8 M10 x 1.25 74 87 99 137 162 112 187 Item Wh I Stroke 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore

HRX-OM-S004

-A-20. 8-1 8.1.2 HRS100/150-A-40. 8-2 8.1.3 HRS100/150-A-46. 8-3 8.1.4 HRS100/150-W-20. 8-4 8.1.5 HRS100/150-W-40. 8-5 8.1.6 HRS100/150-W-46. 8-6 8.1.7 Refrigerant with GWP reference . 8-7 8.1.8 Communication specification . 8-7 8.2 Outline dimensions . 8-8 8.2.1 HRS100/150-A-20/40/46. 8-8 8.2.2 HRS100/150-W-20/40/46. 8-9 8.3 Flow diagram . 8-10 8.3.1 HRS100/150-A-20/40/46. 8-10 8.3.2 HRS100

Series AP500

psig (1.0 MPa) 100 0.69 80 0.55 Delivery pressure (MPa) Delivery pressure (psig) 60 0.41 40 0.28 20 0.14 0 0.00 0 50 100 150 200 250 300 350 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

Modular Design with Uniform Body Style

Units AC Series Attachment List Pressure relief 3-port valve Pressure switch Spacer with bracket T-spacer Piping adapter OUT IN Spacers T-Spacer Ym10 Series Cross Spacer Ym4 Series Spacer Ymm Series Spacer with Bracket YmmT Series p. 48 p. 48 Piping in 2 directions is possible (upward or downward).

3 Port Solenoid Valve Metal Seal Series VZ200 1

(Values at the initial period) VFN Base mounted JIS Symbol Solenoid Specifications Option Grommet (G), Plug connector (L), Plug connector (M), DIN terminal (D) 100, 200, 24 , 48 , 110 , 220 Electrical entry DC AC 50/60 Hz Coil rated voltage (V) 24, 6 , 12 , 48 Allowable voltage fluctuation (%) 15 to +10% of rated voltage Caution Coil insulation type Class E or equivalent (120C) (2) Temperature

Shock Absorbers and Rate Controls

x 1.5 l3 38 44 143 37 (LR)0Iil2.0llx2 226 243 t3 M64x2 t9 50 57 140 70 48 50 0Ifi2.0Sx4 328 345 1164 x 2 t9 50 57 l9l 96 48 t6 0t 2.0tlxd 456 413 73 M 6 4 x ? t 9 60 60 241 l 2 l 48 76 0E113.()flx2 245 265 98 il85 x 2 69 76 l{0 70 J8 5l 0tlll3.0llx3.5 323 343 98 M 8 5 x 2 22 69 76 v9 90 58 7l Otlll3.0frlx5 399 419 90 M 8 5 x ? 22 69 76 2tl r09 58 7l Otl{13.0Iir6.5 494 514 98 l{85 x ?

51

Caution Standard stroke (mm) Note) Bore size (mm) 20 25 32 40 50 63 80 100 25, 50, 75, 100, 125, 150, 200 25, 50, 75, 100, 125, 150, 200, 250, 300 Note) Manufacture of intermediate strokes in 1 mm increments is possible. (Spacers are not used.)

SYJ3000/5000/7000

9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Manual override (Manual operation) Pilot exhaust method Non-locking push type, push-turn locking slotted type, push-turn locking lever type Individual exhaust for the pilot valve, common exhaust for the pilot and main valve Lubrication Mounting orientation Not required Unrestricted Note 2) Shock/Vibration resistance (m/s2) 150

IDG

Purge air flow rate (l/min(ANR))(3) 2.5 12 25 50 75 125 125 150 190 6 Inlet air pressure (MPa) 0.7 Part no.

Refrigerated Air Dryers

Refrigerant R134a (HFC) IDU E IDF 100F 30 W Water-cooled Nil C G K P R V 4 5 Size Size Air compressor size *1 Piping direction 100F 100 kW 125F 125 kW 150F 150 kW Symbol Description 4 Facility water piping direction: Right *1 Refrigerant R407C (HFC) IDU E 5 Facility water piping direction: Left *1 *1 Note that the above values are for reference only.

3

1V 24 VAC 1K 48 VAC Conduit terminal With surge voltage suppressor Special voltage VXP VXR 1L 220 VAC 1M 240 VAC 1W 24 VAC 1P 48 VAC Conduit With surge voltage suppressor VXH VXF 1Q 220 VAC 1R 240 VAC 1Y 24 VAC VX3 VXA 2A 24 VDC 2B 100 VAC 2C 110 VAC 2D 200 VAC 2E 230 VAC 2F 48 VAC 2G 220 VAC 2H 240 VAC 2V 24 VAC 2L 100 VAC DIN terminal With surge voltage suppressor With light 2M 110 VAC

Cylinder with Lock Series CNG

CG-020-24A CG-025-24A CG-032-24A CG-040-24A CNG-020-24 CNG-025-24 CNG-032-24 CNG-040-24 + 0.036 0 8 8 + 0.4 + 0.1 41 + 0.4 + 0.1 48 + 0.5 + 0.1 48 + 0.5 + 0.1 56 (29.3) (33.1) (40.4) (49.2) 31 37 38.5 42.5 5.5 5.5 6.6 6.6 42 48 53 60 10 10 10 10 10 10 10 10 20 25 32 40 + 0.036 0 + 0.036 0 + 0.043 0 + 0.043 0 25 30 35 40 5.5 5.5 6.6 6.6 36 43 50 58 20 25 32 40 10 10 + 0.043 0 12 12 + 0.043

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

L plug connector (L): 10-SYJ74M-LM plug connector (M): 10-SYJ74M-M01 02 DIN terminal (D, Y): 10-SYJ74MD Y01 02 M8 connector (WO): 10-SYJ74M-WO01 02 01 02 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) Max. 10 91.5 84 58 [65] 42.6 62.5 72.7 M8 x 1 45 69.1 [76.1] Approx. 300 (Lead wire length) Pg7 80.6 [82.8] 90.6 89.6 70.8 [73] 79.7 72.3 65.8 23 15 23 15 23 15 23 15 48 48 48

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

124 200 300 34 84 122 172 50 4 4.5 3 6 16 22 46 40 M8 x 1.25 92 24 48 124 200 300 36 86 124 174 66 5 6 4 8 20 24 48 50 M10 x 1.5 28 52 128 200 300 38 50 88 124 174 110 80 5 6 4 8 20 24 63 M10 x 1.5 MLGPM (slide bearing)/A, DB, E dimensions MLGPL (ball bushing)/A, DB, E dimensions A E A E Bore size (mm) Bore size (mm) DB st50 50

EXxx-OMZ0016

Number of connected units: 15, Bit area RX/RY: 128/128, Word area RWr/RWw: 16/16 I/O mapping order Mode 1 Unit 0 Unit 1 Unit 2 Unit 3 Remote setting parameters values (Wireless channel 001) DYB AXA DXD EX600-WSV* End Digital output Analog input Digital input Valve Remote 32 bit Module input size: 64 points / 64 bits Module output size: 48 points / 48 bits Valve manifold output

CNG

CG-020-24A CG-025-24A CG-032-24A CG-040-24A CNG-020-24 CNG-025-24 CNG-032-24 CNG-040-24 + 0.036 0 8 8 + 0.4 + 0.1 41 + 0.4 + 0.1 48 + 0.5 + 0.1 48 + 0.5 + 0.1 56 (29.3) (33.1) (40.4) (49.2) 31 37 38.5 42.5 5.5 5.5 6.6 6.6 42 48 53 60 10 10 10 10 10 10 10 10 20 25 32 40 + 0.036 0 + 0.036 0 + 0.043 0 + 0.043 0 25 30 35 40 5.5 5.5 6.6 6.6 36 43 50 58 20 25 32 40 10 10 + 0.043 0 12 12 + 0.043

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Bore (mm) Standard stroke (mm) Nylon tarpaulin 60C 110C Neo plain cloth 25, 50, 75, 100, 125, 150, 175, 200, 250, MG 40 Maximum ambient temperature for the rod boot itself. 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, MGP 50, 63 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, MGQ 80, 100 300, 350, 400, 450, 500, 600, 700 MGG Minimum stroke of

V

Ambient & Fluid Temperature -10 ~ 50C A Clean Room version is available to specified Lubrication Not Required order Manual Override Non-Locking Push Type Shock Resistance/Vibration Resistance 150 / 30m/s2 Mounting Orientation Free The VQD1000 is used either on a Single SubEnclosure Dust Proof base or Manifold Mounted.

CNG

CG-020-24A CG-025-24A CG-032-24A CG-040-24A CNG-020-24 CNG-025-24 CNG-032-24 CNG-040-24 +0.036 0 8 8 +0.4 +0.1 41 +0.4 +0.1 48 +0.5 +0.1 48 +0.5 +0.1 56 (29.3) (33.1) (40.4) (49.2) +0.036 0 +0.036 0 +0.043 0 +0.043 0 31 37 38.5 42.5 5.5 5.5 6.6 6.6 10 10 10 10 42 48 53 60 20 25 32 40 25 30 35 40 5.5 5.5 6.6 6.6 10 10 10 10 36 43 50 58 20 25 32 40 +0.036 0 10 10 +0.043 0 12 12 +0.043 0 14