VQZ1000/2000/3000

AC (1) Yes (W/o indicator light) Yes (W/o indicator light) (3) Nil Standard (1) (1) High pressure (Metal seal only) Note 1) Applicable to VQZ2000 and 3000.

SX

(g) n: Stations W = 30n + 50 W = 37n + 63 W = 61n + 101 W = 79n + 127 W = 100n + 151 Note) For more than 10 stations, supply pressure to P port on both sides and exhaust from EA and EB port on both sides.

Nozzle Type Ionizer

Bar length [mm] IZN10-G-100-X226 100 IZN10-G-200-X226 200 IZN10-G-300-X226 300 IZN10-G-400-X226 400 IZN10-G-500-X226 500 IZN10-G-600-X226 600 Part no.

MXH

Refer to Graph (10) based on horizontal mounting, a speed of 500 mm/s and load eccentricity of 50 mm. In Graph (10), find the intersection of a 30 mm overhang and load weight of 0.1 kg, which results in a determination of 16. 8-2-13 12 Series MXH Construction MXH6 (6) MXH10 (10) y @1 !7 w q!9 t !8 i !0 @0 @0 y @1 !6 w q !9 t !8 !

JXCx-OMT0005CN

1W 2 WAREA ON W 1 W 1 *W 1W 2 PARA W 1=W 2=0 WAREA OFF (-) (+) W 2 W 2 * * 1 1 * 11 11 * 12 12 * *1 46 - 11.3 12 1CW [CW] 2CCW [CCW] 12 1[] 2[SW] *1 * *1 *1 * 0[] 1a [a ] 2b [b ] 02 SW * 21 21 * *1 47 - 12 12.1 ( ) *1 2 M 2 1 12.2 * []0 [] / M 48 - 12.3 []1 1 INP ON (/) M 2 () INP OFF 3 [1] INP OFF INP ON 49 - [2] INP ON 12.4 1 2 3 PLC 2 12.5 3

e-Rodless Actuator

Load weight Allowable moment E-MY2H/m3 E-MY2H/M3 E-MY2H/M1 E-MY2H/M2 60 50 60 50 60 50 60 50 40 40 30 30 30 30 q r w et 20 20 20 20 Moment (Nm) Moment (Nm) Moment (Nm) Moment (Nm) 10 10 10 10 MY2H25 MY2H25 MY2H25 MY2H25 5 5 5 5 4 4 MY2H16 4 4 3 3 3 3 MY2H16 MY2H16 2 2 2 2 MY2H16 0.2 1 1 1 100 200 300 400500 1000 1500 1 100 200 300400 500 1000 1500 100 200 300400500 1000 1500 100 200 300400500

AC Servo Motor Driver (CC-Link Type)

power supply input terminal (U, V, W) to the driver power terminal (U, V, W) Connect the motor ground terminal to the driver ground terminal.

240

22.0 30.0 W 9.5 4.0 4.0 1.5 W 7.5 2.0 2.0 0.5 W 3.5 (6) 2.0 (0.5) 2.0 (0.5) 4.5 (2) A 12.5 11.0 18.0 26.0 B 3.5 4.0 6.5 Note 1) Negative figures in the table W indicate that an auto switch is mounted inward from the edge of the cylinder body.

Booster Regulator/Air Tank

When the inlet pressure is 0.4 MPa: VBA VBAT VBA VBAT 1 Pilot pressure 0.2 MPa to 0.4 MPa 0.9 AP100 Outlet pressure 0.4 MPa to 0.8 MPa 0.8 Outlet pressure MPa (Q = 0) 0.7 0.6 0.5 0.4 0.3 0.2 0.1 0.1 0 0.2 Pilot pressure MPa 0.3 0.4 0.5 1017 VBA Series Construction/Replacement Parts VBA10A VBA11A w q r e w t r e u q t VBA20A, 22A, VBA40A, 42A, 43A Air-operated type q w r y q t e VBA22A, 42A

AC Servo Motor Driver (Pulse input type/Positioning type)

7) 0V [1] Power supply input terminals, L1 and L2: Specify power supply to input terminals L1 and L2. [2] Connect the motor power supply input terminal (U, V, W) to the driver power terminal (U, V, W).

10

1 u w e t y i o !2 No.

Speed Controller with Indicator

5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.

Thermo-chiller

3 w Parts List (170) No.

33

0 200 400 600 800 1000 1200 1400 Cooling capacity [W] Cooling capacity [W] 25C 25C HED HEA 35C 35C 40C IDH 40C 0 10 20 30 40 0 10 20 30 40 Circulating fluid temperature [C] Circulating fluid temperature [C] HRSE018-A-20/23-(T) [50 Hz] [60 Hz] 2000 2000 Ambient temperature Ambient temperature 25C Cooling capacity [W] Cooling capacity [W] 25C 1500 1500 35C 1000 1000 35C 500 500 40C 40C 0 0

HRX-OM-W032

*1: To use the power of the device, the total load current must be 500 mA or less.

Clean Air Module

AME Digital flow switch AMF Measured flow range 5 to 100 L/min 50 to 500 L/min Nominal filtration rating: 0.01 m (Filtration efficiency 99.99%) Measured flow range 5 to 100 L/min 50 to 500 L/min Nominal filtration rating: 0.01 m (Filtration efficiency 99.99%) Filter Restrictor Regulator ZFC SF SFD LLB LLB AD GD Nominal filtration rating: 0.01 m Nominal filtration rating: 0.01 m (Filtration

Electric Actuators

128 116 94 to 300 146 LJ1S202SC 90 130 118 96 to 300 LJ1H101SC to 500 6 48 LJ1H101PB 122 2 110 44 to 600 104 145 LJ1H101NB 4 46 to 600 LJ1H202SC 124 112 16 58 to 500 LJ1S303SC 146 132 120 92 98 to 300 to 300 to 300 LJ1H202PA 8 50 to 500 124 112 106 LJ1H202NA 12 54 to 500 LJ1H303SE 126 114 22 64 to 500 to 500 to 500 LJ1H202PC 10 52 to 1000 to 740 to 930 to 600 to 500 145 124 112 106

New

Manufacturers Association) Body Series VXN material Air Air Medium vacuum Medium vacuum Oil Water C37 (Brass), Stainless steel Power consumption 4.5 W (Size 1) 7 W (Size 2) 20 W (Size 3) (DC) C37 (Brass) body Stainless steel body Body Series VX2 material Air Air Aluminum, Resin Power consumption 4.5 W (Size 1) 7 W (Size 2) 10.5 W (Size 3) (DC) Aluminum body Resin body CAT.ES70-48A Series

LX

L X P Table displacement (m) Table displacement (m) LXPB-200 LXPB-200 1500 1500 LXPB-175 LXPB-175 1000 1000 LXPB-150 LXPB-150 LXPB-125 LXPB-125 LXPB-100 LXPB-100 500 500 LXPB-75 LXPB-75 LXPB-50 LXPB-50 0 Weight (kg) 0 Weight (kg) 1 2 3 4 5 6 1 2 3 4 5 6 Displacement at the section indicated by the arrow when a load is applied to this section with the slide table fully extended.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

Replacement Parts: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.