Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Fluoropolymer Piping Equipment

Class Class No. 1 1 2 2 2 2 2 2 3 3 3 3 3 3 3 3 3 3 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1 2 1 2 C 3 4 F 1 2 3 4 5 6 7 E 9 10 1 2 3 4 5 6 F 9 1 2 3 4 5 7 8 9 1 2 3 4 5 6 1/8" A A B C D E F A B C D E F A B C D E F G A B C D E F G H A B C D E F 1 2 2 2 2 2 2 3 3 3 3 3 3 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1/8" 1/8" 1/8" Branch tee female Run tee male Run tee female 1/4" A A 1/4

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

( ) 1 to 9 stations 18 J kit Flat ribbon cable (20P) PC wiring system compatible D side JD0 1 to 8 stations 16 Flat ribbon cable (20P) (PC wiring system compatible) D side U side D side U side D side U side LD0 (N) LU0 (N) LD1 (N) LU1 (N) LD2 (N) LU2 (N) SDF SDH SDJ1 SDJ2 SDQ SDR1 SDR2 SDV L kit Lead wire kit with 0.6 m cable Note 3) Lead wire kit with 1.5 m cable 1 to 12 stations Lead

MHZ

Finger Position/Narrow Type 11.6 MHZ2-16N 5.8 Auto switch mounting groove (For D-F, D-M9(V)) 2.1 +2.2 0 0 0.4 When open 12.6 Note) When using D-Y59, D-Y69 and D-Y7 type auto switches, through-hole mounting is not possible.

MHZ

Finger Position/Narrow Type 11.6 MHZ2-16N 5.8 Auto switch mounting groove (For D-F, D-M9(V)) 2.1 +2.2 0 0 0.4 When open 12.6 Note) When using D-Y59, D-Y69 and D-Y7 type auto switches, through-hole mounting is not possible.

VQ7-6/7-8

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQ7-6-FG-DVQ7-6-FG-D-R o o t r u t r u w y e q w y e q FHG FJG FIG FHG FJG FIG VQ7-6-DVQ7-6-D-R o o t r u t r u w y e q w y e q VQ7-6-FPG-Do t r u w y e q i Replacement Parts (For valve) FHG FJG FIG FHG FJG FIG Description

Floating Joint

nominal thread size 40-150 M40 x 1.5 45-150 M45 x 1.5 Basic Type: JA JA180 200--X530 Center of sphere M M U U D Width across flats F 60 B E H G P A R Dimensions (mm) DMaximum operating tensile and compressive force (N) Center of sphere R Maximum screw-in depth P Allowable eccentricity U Applicable bore size Model M A B D E F G H Weight (kg) Nominal size Pitch -X 180 JA180-40-150-X530 40

Modular Type Filter Regulator Series AW

u u Drain Drain Drain Parts list Material No.

Proposals for Energy Saving

Hi Lo Auto shift input Time Repeatability IP65 compatible Dust-tight/Splash proof type 0.2% F.S. 1digit or less 111 &RXUWHV\RI6WHYHQ(QJLQHHULQJ,QF5\DQ:D\6RXWK6DQ)UDQFLVFR&$ *HQHUDO ISE40 01 22 ZSE40 01 22 Nil F A Bracket B (ZS-24-B) B Bracket D (ZS-24-D) D Panel mount (ZS-22-A) E Description Bracket A Bracket B Bracket D Panel mount Panel mount + Front protection Symbol A B D E F Nil M Lead

CLA

light/Operation D-AS9W, D-8S9W, D-FS*W, D-GS*W, D HJS9W, D-FS' F, D-J59W, D-KS9W, D-'SBAL Solid Stat.

CHKD/CHKG

Auto Switch Mounting Heights (mm) D-Y59 D-Y7P D-Y7W D-Y7BA D-Z7 D-Z80 D-M9 D-M9W D-M9A D-A9 D-M9V D-M9WV D-M9AV D-A9V D-Y69 D-Y7PV D-Y7WV Bore size (mm) U 21.5 24.5 31.5 35.5 40.5 Note) U 28 30 34 38.5 44.5 53 63.5 76 U 25.5 27.5 31.5 36 Note) U 31.5 35.5 40.5 48.5 58.5 71 U 31.5 35.5 41.5 50 60.5 73 20 25 32 40 50 63 80 100 48.5 58.5 71 50.5 61 73.5 Note 1) D-A9/A9V models cannot be

Tie-rod Type Hydraulic Cylinder

W D E W a MA A K F NA NB U CX 0.3 S + Stroke H L 0 0.3 C Z + Stroke RR B ZZ + Stroke With rod boot e 10 f l h + l Z + l + Stroke ZZ + l + Stroke (mm) Bore size (mm) a CX B C d D CDH9 E F GB GA G J MA L K NB P NA RR S R MM A +0.043 0 +0.043 0 +0.043 0 +0.043 0 +0.052 0 +0.052 0 +0.052 0 0 0.018 0 0.021 0 0.021 0 0.021 0 0.025 0 0.025 0 0.025 0 0.062 0 0.062 0 0.074 0 0.074 0 0.074 0 0.074

SZ3000

Connector type F: D-Sub connector (25 pins) P: Flat cable (26 pins) Supply/Exhaust block mounting position Power supply terminal specifications U D B M U Side (2 to 10 stations) D Side (2 to 10 stations) Symbol P P12 N N12 Specifications Both sides (2 to 20 stations) 24VDC, positive common Special specifications 12VDC, positive common In the case of special specifications, indicate separately

10

With rod boot G 2 x Rc P G Width across flats KA G Width across flats KA Rubber Bumper Bore size [mm] S ZZ TX D e d d e D 32 90 184 40 90 192 50 102 218 63 102 218 80 124 268 100 124 268 125 132 326 MM MM N f A AL 10.2 10.2 H1 ZZ + 2 x Stroke h S + Stroke h + Stroke A N f l + Stroke AL 10.2 10.2 H1 Width across flats B1 Width across flats B1 K K TT l [mm] Bore size [mm] A AL B B1 C D E F

15

D-M9PA(V) D-M9BA(V) 7 13 38 63 D-M9NA(V) 8 14 41 68 Auto switch model 0.5 m (Nil) 1 m (M) 3 m (L) 5 m (Z) Lead wire length Dimensions (mm) D-M9A Indicator light Slotted set screw (flat point) Mounting screw M2.5 x 4 L Stainless steel 2 24 2.8 500(1000)(3000)(5000) 0.2 3 4 6 Most sensitive position 2.6 D-M9NAV/D-M9PAV D-M9BAV 500(1000)(3000)(5000) Mounting screw M2.5 x 4 L Stainless steel

Table of Contents

(mm) Fitting size D 3.2 4 Weight g A B C E F Model M-32R-2 M-04R-2 36 36.5 31 .5 32 0.9 0.7 0.8 2 x 1 .2 20.5 4 Component Parts Note Electroless nickel plated Electroless nickel plated Material Brass Brass PP No. 1 2 3 Description Sleeve Studded body Stem Applicable fitting size D Applicable tubing 3 2 1 C F D E B A 15-6-29 6 Miniature Tubing and Miniature Fittings Specific Product Precautions

1

/C8 D-H7 A B 11.5 8.5 16 Auto switch D-C7/C8, D-H7 D-B5/B6 D-G5/K5 A 12 14.5 B 24.5 Auto switch D-B5/B6, D-G5/K5 D-B7/B8 D-G7/K7 8.5 A 14.5 B 11 Auto switch D-B7/B8, D-G7/K7 Auto Switch Mounting Position D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C D-B7/B8 D-B73C D-B80C D-G7/K7 D-K79C Auto switch model D-C7/C8 D-C73C D-C80C D-G5 D-K5 D-G5NYL D-B59W D-H7 D-H7C D-H7W D-H79F D-H7BAL Bore size (mm

MGP

bushing U U U Standard series MGP Slide U U 16, 20, 25, 32, 40, 50, 63, 80, 100 Air cushion 3.17-16 D-Y5/Y6 D-Y7 (2 color) D-Y7BAL (Water resistant, 2 color) Ball bushing U U Oversized guide rod series MGPS Rubber bumper 3.17-28 Slide 50, 80 U 3.17-2 Series MGP/Precautions Be sure to read before handling.

VCC

G D Approx. C 6 13.5 4.5 0.5 Width across flats F 10 Tightening torque: Tighten within 10 1 Nm. G1/4 (mm) Part no.

TABLE OF CONTENTS

Listed and CSA Certified for Hazardous LocationsClass I, Div 1, Group C and D Class II, Div 1, Groups E, F, and G; Div 2 Groups A,B,C,D,E,F, AND G. Mtg.