Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

(different sides/same side) 10 100 100 110 120 D-A5, D-A6 D-F5, D-J5 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 2) 2 "n" pcs. (same side) 10 + 55 110 + 55 120 + 55 100 + 55 100 + 55 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 2 pcs. (different sides/same side) 20 100 100 110 120 D-A59W (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 2) 2 "n" pcs.

Table of Contents

Metric size Inch size 1 2 3 4 5 6 7 8 9 M 1 station Elbow Straight Elbow OUT side IN side Straight 6 Elbow Straight Elbow OUT side IN side Straight 2 stations Symbol Symbol Note) 3 stations 8 10 6 8 10 4 6 4 6 1/4 5/16 3/8 1/4 5/16 3/8 5/32 1/4 5/32 1/4 4 stations 07 08 09 10 11 12 19 20 21 22 23 24 26 27 28 29 30 31 33 34 35 36 37 38 57 58 59 60 61 62 69 70 71 72 73 74 76 77 78 79 80

SMC Pneumatic Clean Series

LC (Knock pin position) W Y M X LX LZ Z LS + Stroke ZZ + 2 Stroke 4-LD (mm) 7 7 6 6 LD 4 4 4 4 LC 30 25 22 20 LH 16.5 16 15 15 X 60 69 69 69 LS 4 3.5 3.5 3 M 3 3 3 3 LT B 8.5 8 7 7 Y 10 10 10 10 W 54 44 36 32 LX 187 175 173 163 ZZ 71 58 49 44 LZ Z Bore size 63.5 53 52 47 54.5 45 38.5 34 40 32 25 20 10 12 55 74 4.5 100 125 5 20 28.5 80 101 6 11 65 74 6 120 150 7 20 30 100 121 6 14 With air

CHKD/CHKG

40 75 65 10 22.4 19 M16 x 2 20 7 52 9 14 depth 8.6 71 1/4 21.5 10 21.5 50 17.5 depth 10.8 81 70 11 28 24 M20 x 2.5 24 8 58 11 81 1/4 24 10 24 63 20 depth 13 90 77 13 35.5 30 M27 x 3 33 9 69 13 100 1/4 27.5 10 27.5 80 23 depth 15.2 105 88 17 45 41 M30 x 3.5 36 14 86 15 121 3/8 31 15 31 100 132 106 26 56 50 M39 x 4 45 21 106 17 26 depth 17.5 146 3/8 36 15 36 Note 1) Body dimensions are the

ZP

5 3 x 4 4 x 8 3 x 6.5 4 x 9.5 18 34 40 Dimensions Dimensions Dimensions Model A 40 50 ZP40H ZP50H B 42 52 C 32 42 Model A 63 80 ZP63H ZP80H B 65 82 C 50 61 D 14.5 16.5 Y 3.5 4.5 Model A 100 125 ZP100H ZP125H B 103 128 C 80 104 ZP HB 40 50 ZP HB ZP HB 63 80 100 125 F F F 4 x 9.5 4 x 8 3 x 6.5 4 x 6 4 x 5 3 x 4 6 G E E Y E 3.5 Y Y 10 6 8 40 18 34 C C C A A A B B B D D D Dimensions Model ZP63HB

CLQ

38 8 33.5 60 46 101 75, 100 43.5 107.5 10 to 50 80 117.5 53.5 11 11 99 116 134 43 10 43.5 77 53.5 117.5 75, 100 53 126 10 to 50 Rod end nut L1 100 136 63 11 11 117 136 154 50 12 43.5 94 63 136 75, 100 Double clevis type: CLQD/CDLQD Double clevis type (mm) CT 4-N Cap bolt Stroke range Without auto switch With auto switch Bore size (mm) CD CT A A B CL B CL 10 to 50 75, 100 10 to 50 75, 100

Environment

0 300 200 400 100 500 600 Speed [mm/s] Speed [mm/s] LEPY LEPS LEY32m LEY32m for acceleration/deceleration: 2000 mm/s2 LER 90 50 80 Lead 4: LEY32C LEH 40 42 Horizontal work load [kg] Vertical work load [kg] 70 Lead 4: LEY32C LEY -X5 60 Lead 8: LEY32B 30 50 11LEFS 40 20 21 Lead 8: LEY32B 30 11LEJS Lead 16: LEY32A 20 10 Lead 16: LEY32A 10 25A0 0 0 300 200 400 100 500 600 0 300 200 400 100 500

Vacuum Unit

ZK2 (Ejector System) 100 90 80 70 60 50 40 30 20 10 0 0 5 10 15 20 25 30 Suction flow [L/min (ANR)] 0.5 40 Release flow [L/min (ANR)] Vacuum pressure [kPa] Supply pressure [MPa] 0.4 0.35 0.3 30 20 0.2 10 0 0 1 2 3 4 5 6 7 8 9 10 Needle opening [Number of rotations] The actual suction flow at the point of suction varies depending on the piping conditions to the vacuum port.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

1.1 Port Class A Communication speed 100 Mbps*2 10/100 Mbps*2 (Automatic negotiation) 100 Mbps*2 125/250/500 kbps 230.4 kbps (COM3) Configuration file*3 ESI file EDS file GSDML file EDS file IODD file I/O occupation area Input 20 bytes Output 36 bytes Input 36 bytes Output 36 bytes Input 36 bytes Output 36 bytes Input 4, 10, 20 bytes Output 4, 12, 20, 36 bytes Input 14 bytes Output 22 bytes

LEC-OM02904

LEC-CSS-L 11 13 11 11.2 (1) [W] LEC-MR-RB-032 LEC-MR-RB-12 [40] [40] LECSS-S5 30 LECSS-S7 10 30 100 LECSS-S8 10 30 100 (2) No.PA02 No.PA02 PA02 0 0 00 100W 0.2k7kW 11k22kW 30kWMR-J3-CR55K(4) (30kWMR-J3-CR55K(4) ) 01FR-BU2-(H)FR-RC-(H)FR-CV-(H) 02MR-RB032 03MR-RB12 04MR-RB32 05MR-RB30 06MR-RB50() 08MR-RB31 09MR-RB51() 80MR-RB1H-4 81MR-RB3M-4() 82MR-RB3G-4() 83MR-RB5G-4() 84MR-RB34-

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Lateral 0.2 0.1 200 300 500 100 Load point distance mm LJ1H20 LJ1H30 20 10 Lateral load 100% 10 5000 Lateral load 50% 5000 2000 Horizontal load 100% 2000 Horizontal load 50% 1000 Horizontal load 100% 1000 Horizontal load 50% 500 500 Amount of deflection m Amount of deflection m 200 200 100 100 50 50 20 20 10 Lateral load 100% 10 5 Lateral load 50% 5 Horizontal empty weight deflection 2 2

JXCx-OMU0004

LEHZ 3 5mm/s LEHZ10 LEHZ16 LEHZ2025 LEHZ LEHZ 32 40 6 2(3) 6 3(4) 16 11 52 84 10 4 10 5.5 28 19.5 91 147 [N] 14 6 14 8 40 28 130 210 *LEHZ1016 30%F.S.LEHZ2025 25%F.S.LEHZ32 40 20%F.S. * (LEHZJ ) 53 No.JXC-OMU0004-A LEHF LEHF10 LEHF20 LEHF32 LEHF40 2] 2] 2] 2] [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s 0 5 100 5 100 5 100 5 100 1 10 150 10 150 10 150 10 150 2 15 200 15 200 15

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

160 258 100 50 185 75 308 125 (Z) 4-M4 x 0.7 thread depth 6 6 (30) (30) 210 358 100 150 2-M6 x 1 thread depth 10 235 408 175 125 260 458 150 200 285 508 225 175 0.2 310 200 558 250 Only the CXSW20-10 has a groove cut out for installing auto switches.

Aluminum High Vacuum Angle Valve

pressure (Pa) (abs) 1 x 10-6 to atmospheric pressure Main exhaust valve 800 300 200 160 45 14 80 Conductance (L/s) Note 1) Initial exhaust valve 6.5 to 31.5 6.5 to 31.5 4 to 18 4 to 18 2 to 8 0.5 to 3 2.5 to 11 In case of standard material FKM: 1.3 x 10-10 at normal temperature, excluding gas permeation Internal Leakage (Pam3/s) In case of standard material FKM: 1.3 x 10-11 at normal temperature

7ND9071en

(s) 6 0.3 18 1/4 6 mm or 1/4" 1.6* 1.6* 6 mm or 1/4" 1.0* 1.0* 9 0.6 37 1/4 6 mm or 1/4" 2.0 2.0 11 1.1 67 3/8 10 mm or 3/8" [6 mm or 1/4" (x)] 4.1 4.1 13 2.3 140 3/8 10 mm or 3/8" 17 4.3 262 1/2 10 mm or 3/8" 3.6 3.6 20 5.4 330 1/2 10 mm or 3/8" 5.0 5.0 25 10.5 610 1/2 10 mm or 3/8" 9.5 9.5 32 21 1282 3/4 10 mm or 3/8" 18.0 18.0 40 43 2624 3/4 10 mm or 3/8" 35.0 35.0 50 84 5126 1 10 mm

Auto Switch Guide

drop 4 V or less 100 A or less at 24 VDC Leakage current 0.8 mA or less at 24 VDC Red LED lights when ON.

RHC

n 20 25 32 40 50 63 80 100 Different sides Same side Different sides Same side D-C7/Z80 D-C73C/C80C RS H A 8 10 9 10 10 11 D-C7 D-C80 10 15 50 50 + 45 (n2) D-B5/B64 8 10 13 4 8.5 9 14 4.5 9 10 14 5 10 10 14 6 9.5 11 17 6.5 10.5 11 16 6.5 10.5 11 18 7 11 9 10 9 10 10 11 11 11 9 10 10 11 RZQ 15 + 45 ( ) n2 2 D-H7 D-H7W D-H7BAL D-H7NF D-B59W 13 (n = 2, 4, 6, ) D-H7/H7NF/H7W/H7BAL 4 10 15

VQZ1000/2000/3000

44.5 mounting hole C10: One-touch fitting for 10 02: Rc 1/4 DIN rail clamp screw n Manual override 5 A 2 4 SMC SMC SMC B 4 A (L4) (L3) 2 L2 L1 3 SMC B 4 A 2 2 SMC SMC P = 19 B 4 A 2 1 SMC SMC B 21 4 6 Stations Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 9 9 10.5

SYJ300/500/700

N.O. + P. 4-4-37 SYJ300 Push-turn locking slotted type Note) For AC For AC 0.36 2 3 (A R) M5 x 0.8 With light/surge voltage suppressor 100 VAC Hz 110 VAC Hz 200 VAC Hz 220 VAC Hz 50 60 50 60 50 60 50 60 P. 4-4-4 SYJ500 Push-turn locking lever type DIN terminal 1.2 2 3 (A R) 1/8 (SYJ500, 700 only) P. 4-4-18 SYJ700 M8 connector 2.7 2 3 (A R) 1/8, 1/4 P. 4-4-37 Note) All AC voltage

Series IDG

) With dew point indicator 1 10/2.5 3 25/6 50/12 100/25 200/50 300/75 500/125 600/125 750/150 1000/190 5 S Standard equipment 10 20 30 50 60 75 100 Note) In case of two or more options, indicate them in alphabetical order.