Ejector Valve Unit Series ZYY/ZYX 1

Note 2) V, S and R specifications are 45T, 45T1.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

weight W kg 1.5 Metal stopper screw 3 1.0 1 100 50 200 300 400 560 2 100 50 200 300 400 500 Average speed Va mm/s Collision speed V mm/s 0.5 Average speed Va mm/s 0.0 Collision speed V mm/s 0 100 200 300 400 500 280 560 Note) Use the average speed when calculating static moment.

3 Port Solenoid Valve Metal Seal Series VZ200 1

1 Sub-plate Assembly Part No.: VZ400-S!2 Mounting bolt and gasket are not attached. Carbon steel Round head combination screw !4 !5 !6 Pilot valve assembly !

Air Cylinder Series MB

500, 600, 700, 800 Oversized rod cylinder XB5 125 1500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (150C) XB6 Intermediate strokes are available.

CP95

63 is actuated with max. actuating speed 500 mm/s.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

rate: 50% Stroke 300 mm Series MB, CA2 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation SY3140-01 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5140-02 800 700 600 500 400 300 200 100 0 SY7140-03 800 700 600 500 400 300 200 100 0 SY9140-04 Cylinder is in extending.

Dedicated Controller

SETUP I PORTOPORTLOOP SEC mm2/s LABEL PRO Main modes ALM mm/s L C Directs a program operation. RUN Operation mode ACTUATOR & CONSTRUCTION SYSTEM CONTROLLER POWER ALARM STOP Executes a JOG operation.

RZQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Additional cylinder tube length Full stroke RHC CDQ2 MK(2) RS Q G Overall length of cylinder tube RS H A Comparison of cylinder tube overall length (mm) RZQ Full stroke = 300 mm (150 + 150 = 300 mm in case of CG1BN) MI W S CG1BN150+150-XC11 Dual stroke

E-P HYREG ® Series VY1 1

3% F .S. 5% F .S.

MHK2

D 1 F MHKL 2 20 S D 1 F M9N Long stroke type Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Number of auto switches Number of fingers Nil S 2 pcs. 1 pc.

RLQ

speed mm/s Allowable load weight (Graph (2)) Horizontal (With and without switch) 10 Load weight m (kg) 1 63 50 40 32 m 0.1 10 100 Eccentric distance + Stroke L (mm) l S l: Eccentric distance (mm) S: Stroke (mm) L Cushion Needle Adjustment Warning 1.

Auto Switch Guide

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com V (mm/s) = Auto switch operating range (mm) Load operating time (ms) x 1000 Current to operate load (OFF condition) > Leakage current If the condition given in the above formula is not met, it will not reset correctly

JA/JAH/JB/JS

How to Order J S 32 10-125 Stainless steel type Dust cover material Series JS Symbol Nil S Material Fluoro rubber Silicon rubber Applicable bore size (mm) Precautions Be sure to read before handling. Refer to pages 10-24-3 to 10-24-6 for Safety Instructions and Actuator Precautions.

Series AP500

Vespel is a registered trademark of DuPont. 21 Bulk gas delivery Single Stage Regulator for Ultra High Purity Series AP9000 & 9100 For UHP gas delivery Inlet pressure AP9000: Max. 1700 psig (11.7 MPa) AP9100: Max. 800 psig (5.5 MPa) Flow capacity AP9000: to 2000 slpm AP9100: to 5000 slpm Body material: 316L SS Tied-diaphragm design How to Order Port Number q w e AP9 S FV16 FV16 0 2PW 10 Size

Series IDG

0 100 200 300 400 500 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG60H IDG75H 0 P1 = 0.3MPa P1 = 0.3MPa 0 Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C 10 10 P1 = 0.5MPa P1 = 0.5MPa P1 = 0.7MPa 20 20 P1 = 0.7MPa 30 30 40 40 50 0 200 400 600 800 50 0 200 400 600 1000 800 Outlet air flow rate l/min (ANR) Outlet air flow rate

Air-hydro Unit

Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) No load No load No load No load Load ratio Load ratio Load ratio Load ratio Bore size (mm) Bore size (mm) Bore size (mm) CCVS30/31/32/33 CCVL20/21/22/23 CCVL02 Piping bore Piping bore Piping bore Piping bore Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) No load

Cylinder with Lock

Step M z Precautions on Model Selection Caution Find the maximum load speed: V [mm/s] from the load movement time: t [s] and the movement distance: st [mm]. 1.

PSE550/300

(Not including sensor accuracy), Response time: 150 ms or less Accuracy (To display value) (25C) 1.0% F .S. or less 1.5% F .S. or less 2.0% F .S. or less PF2 0.5% F .S.

Vacuum Equipment

S = Qmax/11.1 S: Effective area (mm 2) Qmax: Max. adsorption /min (ANR) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Vacuum Switch (Series ZS), Vacuum Gauge (Series GZ) Suction flow rate (/min (ANR)) Suction flow rate (/min (ANR)) When adsorbing and transporting

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Note 4) Piston speed is ranged from 50 to 500 mm/s. Standard model no.