Magnetically Coupled Rodless Cylinder

Very low speed (7 to 50mm/s) specifications There is no sticking and slipping even at very low drive speeds of 7 to 50mm/s. Furthermore, there is no lurching at start up, allowing smooth drive through the entire stroke.

Vacuum System Peripherals:

/S (8 points output) R2 09 9 Can accommodate up to 16 solenoids.

5

S 1 pc. n n pcs.

Series VQ Metal Seal/Rubber Seal Body Ported

5m Speed controller: AS3000F-06 (S=6.5mm2) Cylinder stroke 100mm Fitting (One-touch fitting) Effective area (mm2)(Cv) Cylinder Speed (mm/s) Model AS3000F-06 (S=6.5mm2) Cylinder stroke 50mm 10 6 16 20 25 32 40 40 50 63 80 100 150 300 450 600 750 150 300 450 600 750 6 4.5 (0.25) VQ1000 (Metal seal) 6 6.3 (0.35) VQ1001 (Rubber seal) Series VQ2000 Cylinder bore size (mm) Series CJ2 Pressure

HRX-OM-M090

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-M090 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

HRX-OM-R016

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-10 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-R016 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Vacuum Filter AFJ Series

m AFJ20-02-40-S/AFJ30-03-40-S/AFJ40-04-40-S AFJ20-02-40-T/AFJ30-03-40-T/AFJ40-04-40-T 12 12 AFJ20-02-40-T AFJ30-03-40-T AFJ20-02-40-S AFJ30-03-40-S AFJ40-04-40-S 10 10 Pressure drop [kPa] Pressure drop [kPa] 8 8 AFJ40-04-40-T 6 6 4 4 2 2 Water drop removal type Nominal filtration rating: 40 m Large flow type Nominal filtration rating: 40 m 0 0 0 100 200 300 400 500 600 800 700 900 Flow rate

Model Selection 1

amount (10 6 Pam 3/s) of V, M options are values when differential pressure is 0.1 MPa.

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

O.D. 6 I.D. 4 1051 Specialty Lubricators NALF Series Auto Feed Lubricators NALF400, 400-06, 500, 600, 800, 900 Lubricator NALF400 Tank NALT-5 s n o i t a c i f i c e p S F L A N e b u L d e e F o t u A 0 0 4 F L A N 6 0 N 0 0 4 F L A N 0 0 5 F L A N 0 0 6 F L A N 0 0 8 F L A N 0 0 9 F L A N ) a P M ( g i s p e r u s s e r p y l p p u s . x a M ) 5 . 1 ( 0 2 2 ) a P M ( g i s p e r u s s e

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Very low speed (7 to 50mm/s) specifications There is no sticking and slipping even at very low drive speeds of 7 to 50mm/s. Furthermore, there is no lurching at start up, allowing smooth drive through the entire stroke.

NCA1

6.50 3/4 NPT .50 5.00 3.13 4.88 7.63 3.25 8.63 1.63 7.38 6.63 8 MS1 Foot style (L) XA+ Stroke A P + Stroke 2-EE KK MM B AH AT LF + Stroke WF S AB E AO SA + Stroke AO Bore Size (in) MM KK A AB AH AO AT B E EE LF+ P+ S SA+ WF XA+ 500 (5") 1.000 3/4-16 1.13 .63 2.75 .63 .19 1.500 5.50 1/2 NPT 4.50 2.88 4.25 7.88 1.38 7.25 600 (6") 1.375 1-14 1.63 .75 3.25 .63 .19 2.000 6.50 3/4 NPT 5.00 3.13

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

(increment of 0.1 s), 1 to 10 s (increment of 1 s), 20 s, 30 s, 40 s, 50 s, or 60 s.

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

amount (10 6 Pam 3/s) of V, M options are values when differential pressure is 0.1 MPa.

7

S CAC408 50 50A Flange R 230 VAC G N.O.

Basic Type/Direct Mount Type

Direct mount type CY3R Series Basic type CY3B Series Series Variations Standard stroke (mm) Individual Made-to-Order products Bore size 1000 900 800 700 600 500 450 400 350 300 250 200 150 100 50 Series Heat resistant specifications (XB6) Low speed specifications (15 to 50 mm/s) (XB9) 6 10 Long stroke (XB11) 15 Low speed specifications (7 to 50 mm/s) (XB13) 20 CY3B Hydro specifications (X116

VQ7-6/7-8

700 600 500 400 300 200 100 Horizontal actuation VQ7-6-FG-S-RA02 0 1000 900 800 700 600 500 400 300 200 100 0 VQ7-6-FG-S-RA03 It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being fully open.

HRX-OM-W038

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-W038 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly. Incorrect piping might cause leakage of supplied or drained leakage and wet surrounding area and facility.

Cylinder with Lock Series CNS

200 100 100 500 400 300 200 100 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 3000 3000 2000 2000 160 140 1000 1000 700 800 900 700 800 900 125 Load weight: m(kg) Load weight: m(kg) 600 600 160 500 500 400 400 140 320 125 300 300 200 200 280 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 7

Cylinder with Lock Series CLS

m(kg) Load weight: m(kg) 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) 31

Angle Seat Valve /

The value of the effective area S, like that of sonic conductance C, expresses the ease of flow. (3) Formula for flow rate When P2 + 0.1 0.5, choked flow P1 + 0.1 293 Q = 120 x S (P1 + 0.1) (3) 273 + t When P2 + 0.1 > 0.5, subsonic flow P1 + 0.1 293 Q = 240 x S (P2 + 0.1) (P1 P2) (4) 273 + t Conversion with sonic conductance C: S = 5.0 x C(5) Q : Air flow rate [dm3/min (ANR)], dm3