70astamb1 Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14 22 22
(mm) EA EB F FA GA GB GC H1 Bore size (mm) A AL B B1 BX BY C D BP J K KA Without rod boot Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 Up to 1000 Up to 1000 Up to 1200 With rod boot 20 to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to 1000 30 to 1000 30 to 1200 1/4 1/4 1/4 1/4 1/4 1/2 1/2 3/4 40 50 63 80 100 125 140 160 30 35 35 40 40 50 50 56 59 67 73 77 85 112.5 121 133 44 52 64
Bore size (mm) c e b d a 40 50 63 5.5 7.5 10 11 13.5 18.5 10.5 13.5 17.8 4 4.5 7 6.5 8.5 11 b a c d e Common Dimensions: MVGPM/MVGPL Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA ID IE IH J K L IB 52 64 77 40 46 58 M6 27 32 39 34 35 38 11 13 16.5 4 7 6.5 10 14 34.5 40 50 63 100 120 148 162 16 20 20 14 44 12 16 16 44 47 50 54 64
Note 3) Not compatible with 64-bit Windows XP and 64-bit Windows Vista. For MR Configurator (setup software English version), contact your nearest sales branch. USB cable (3 m) for setup software LEC MR J3USB Battery LEC MR J3BAT 64 Series LECSA/LECSB Specific Product Precautions 1 Be sure to read before handling.
Actuator Controller q q w 549 Fieldbus Network CC-Link Direct Input Type Step Motor Controller LECPMJ Series Page 600 CC-Link Ver. 1.10 compliant External data import function The step data can be rewrite temporarily by feeding back external information to the PLC. 64 or more data points can be defined with the 3 types of data import modes.
When a pressure gauge is included, the display will show a range from 0 to 0.7 MPa. r Clean Series (10-) e t Copper, Fluorine and Silicone-free + Low Particle Generation (21-) 64 A Regulator AR10-A Symbol Regulator 2 1 AR10-A Refer to page 67 for size 20 to 60. How to Order AR10 M5 A Option/Semi-standard: Select one each for a to g.
10 3/8" PE X X One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, 5/32" 6, 1/4" 8, 5/16" One-touch fitting [X: External pilot port] Applicable tubing O.D.: 4 5/32" One-touch fitting [PE: Pilot EXH port] Applicable tubing O.D.: 4 5/32" L3 28.8 (L4) U side D side L5 18.4 4 x 5.3 (For mounting) (5.3) (4.9) 8 B B B B B 115.5 5.5 109.4 102.9 97.5 M3 Terminal screw 35 A A A A A 13 64
350l 547 589 356 430 8 3 300 11-LEFS16l-400l 597 639 406 480 10 4 400 11-LEFS16l-450l 647 689 456 530 10 4 400 11-LEFS16l-500l 697 739 506 580 12 5 500 40 518 Electric Actuator/Slider Type Ball Screw Drive 11-LEFS Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication Dimensions: Ball Screw Drive 11-LEFS25 (102) ( ) +0.025 0 3H9 depth 3 4 x M5 x 0.8 thread depth 8.5 64
No.EX-OMS0026CN TMSI EtherNet/IP // EX600-SEN3/4 EX600-ED# 2 8 9 10 12 12 14 SI 15 15 16 16 17 LED 21 25 25 26 27 27 28 28 29 29 29 31 32 42 42 58 62 63 64 EDS 64 TM 64 Logix Designer Device Level Ring (DLR) 69 TM 69 QuickConnect TM 71 EtherNet/IP Web 77 86 -1No.EX-OMS0026CN 1) (ISO/IEC)(JIS) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating
Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14 22 22
Bore size (mm) c e b a d 40 50 63 5.5 7.5 10 10.5 13.5 17.8 11 13.5 18.5 4 4.5 7 6.5 8.5 11 b a c d e Common Dimensions: MVGPM/MVGPL Extension locking Retraction locking IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA ID IE IH J K L IB 52 64 77 40 46 58 M6 27 32 39 34 35 38 11 13 16.5 4 7 6.5 10 14 34.5 40 50 63 100 120 148 162 16 20 20 14 44 12 16 16 44 47 50 54 64
Rc(PT) 1/8 64.5 30 14 62 49 50 6.6 M8 x 1.25 Rc(PT) 1/4 76.5 35 19 61.5 49 60 9 M10 x 1.5 Rc(PT) 1/4 89.5 35 19 64 Refer to page 11 regarding the rod end nut which is included.
flats 55 Width across flats 55 M36 x 1.5 M36 x 1.5 21 21 47 47 50 50 64 + Stroke 64 237 + 2 (strokes) 8 Compact Cylinder Series CQ2 Reed Switches/Direct Mounting Type D-Z73/Z76/Z80 Auto Switch Specifications With indicator light D-Z73 D-Z76 Auto switch part no.
specification Standard specification With pressure gauge With auto drain Model Port size B C D A L 4.5 E 28 F 31 G 25 H 20 J 27 K 7 N 40 Q B 104 L 4.5 M 2.8 P 26 T 0 AC10 AC20 AC25 AC30 AC40 AC40-06 AC50 AC55 AC60 85 26 35 87 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1 41.5 43 30 24 33 12 5.5 50 29.5 141 5.5 3.2 65 2 Note 1) 123 36 60 126 55 57 41 35 0 14 7 7 4 71 64
Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 11 11 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14
Grommet (2 color, perpendicular) 5.3-66 Grommet (2 color, water resistant, in-line) 5.3-67 40 to 63 5.3-64 Grommet (2 color, strong magnetic field resistant, in-line) Auto Switch Mounting Position (Stroke end) Precautions 20, 25 32 to 63 Be sure to read before handling. Refer to p.0-44 to 0-46 for common precautions.
77 40 46 58 12 16 16 10 11 13 16.5 27 32 39 44 47 50 14 54 64 78 6.5 6.8 7.5 14 19 19 4 7 6.5 40 50 63 25, 50, 75, 100, 125, 150 175, 200, 250, 300, 350 107 M8 39.5 14 44 11 12 115 M10 46 16.5 49 13.5 16.5 WA Bore size (mm) ML S T U VA OA OB OL P PA PB PW Q R VB MM NN st25 25
77 40 46 58 12 16 16 10 11 13 16.5 27 32 39 44 47 50 14 54 64 78 6.5 6.8 7.5 14 19 19 4 7 6.5 40 50 63 25, 50, 75, 100, 125, 150 175, 200, 250, 300, 350 107 M8 39.5 14 44 11 12 115 M10 46 16.5 49 13.5 16.5 WA Bore size (mm) ML S T U VA OA OB OL P PA PB PW Q R VB MM NN st25 25
For SYJ5000, refer to page 1-5-41, and for SYJ7000, refer to page 1-5-64.
18.0 l3i ) (37) z.2a (58) 7.20 (143) 7 6 8 o95) 2.05 (52) 11.2) 2 6 0 (66) S T o e 7.52 1 9 1 ) 799 1203t L3a 135) l85l 2.52 (64) 0.79 (20) 1.57 140) 0.39 00) 0.67 (171 M8x1.25 0.28 t7) 1 5 7 M 1 8 x 1 . 5 '|.22 (31) 0.63 (16) 3.65 {98) 1.91 (23) 25.0 l3i ) 1.89 ga) 2.24 (58) T.-t2 (r96j 8.35 (212) 2.O5 (vJ 1 1 2 ) ?.